JPH0454381U

JPH0454381U -

Info

Publication number: JPH0454381U
Application number: JP9644990U
Authority: JP
Priority date: 1990-09-17
Filing date: 1990-09-17
Publication date: 1992-05-11

Description

[Brief explanation of the drawing]

第１図は本考案の第１の実施例を示す止弁の断
面図、第２図は同例の要部を示す拡大部分図、第
３図および第４図は本考案の第２の実施例を示す
それぞれ止弁の要部の異なる作動状態の拡大部分
図、第５図は従来例を示す配置図である。３……流入路、４……流出路、５……親弁、７
……主弁体、１２……子弁、１４……副弁体、１
５……弁軸、２０……ばね部材、２２……ベロー
ズ、２４，２５……駆動部、２７……ピストン、
３７……ダイアフラム、４５……金属ダイアフラ
ム。 Fig. 1 is a sectional view of a stop valve showing a first embodiment of the invention, Fig. 2 is an enlarged partial view showing the main parts of the same example, and Figs. 3 and 4 are a second embodiment of the invention. FIG. 5 is an enlarged partial view showing the main parts of the stop valve in different operating states, and FIG. 5 is a layout diagram showing a conventional example. 3... Inflow channel, 4... Outflow channel, 5... Main valve, 7
...Main valve body, 12...Sub valve, 14...Sub-valve body, 1
5... Valve shaft, 20... Spring member, 22... Bellows, 24, 25... Drive section, 27... Piston,
37...Diaphragm, 45...Metal diaphragm.

Claims

[Scope of Claim for Utility Model Registration] (1) A stop valve for a vacuum device having a large-capacity master valve and a small-capacity slave valve provided in an exhaust flow path,
It has a common valve shaft for opening and closing the master valve and the child valve, and is provided with means capable of controlling the common valve shaft in two stages: a wide range corresponding to the master valve and a narrow range corresponding to the child valve. A stop valve for vacuum equipment featuring: (2) The above-mentioned master valve is arranged to open and close the valve seat provided in the exhaust flow path by coming into contact with it, and the child valve opens and closes the small hole provided in this main valve, so that this child valve and the above-mentioned main valve are connected. A guide mechanism connects these so that they can move toward and away from each other over a predetermined stroke, and this child valve is connected to the common valve shaft.A spring urges the parent valve and child valve in a direction that separates them from each other. The stop valve for a vacuum device according to claim 1, wherein the stop valve is isolated from the fluid by a metal diaphragm.