JPH0453051U - - Google Patents

Info

Publication number
JPH0453051U
JPH0453051U JP9153390U JP9153390U JPH0453051U JP H0453051 U JPH0453051 U JP H0453051U JP 9153390 U JP9153390 U JP 9153390U JP 9153390 U JP9153390 U JP 9153390U JP H0453051 U JPH0453051 U JP H0453051U
Authority
JP
Japan
Prior art keywords
crucible
heater wire
lids
mouth
lid provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9153390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9153390U priority Critical patent/JPH0453051U/ja
Publication of JPH0453051U publication Critical patent/JPH0453051U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Furnace Details (AREA)
JP9153390U 1990-09-03 1990-09-03 Pending JPH0453051U (US06420036-20020716-C00037.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9153390U JPH0453051U (US06420036-20020716-C00037.png) 1990-09-03 1990-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9153390U JPH0453051U (US06420036-20020716-C00037.png) 1990-09-03 1990-09-03

Publications (1)

Publication Number Publication Date
JPH0453051U true JPH0453051U (US06420036-20020716-C00037.png) 1992-05-06

Family

ID=31827264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9153390U Pending JPH0453051U (US06420036-20020716-C00037.png) 1990-09-03 1990-09-03

Country Status (1)

Country Link
JP (1) JPH0453051U (US06420036-20020716-C00037.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009134A (ja) * 2003-07-31 2006-01-12 Semiconductor Energy Lab Co Ltd 製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009134A (ja) * 2003-07-31 2006-01-12 Semiconductor Energy Lab Co Ltd 製造装置
JP4578872B2 (ja) * 2003-07-31 2010-11-10 株式会社半導体エネルギー研究所 容器および蒸着装置

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