JPH04523B2 - - Google Patents
Info
- Publication number
- JPH04523B2 JPH04523B2 JP15343884A JP15343884A JPH04523B2 JP H04523 B2 JPH04523 B2 JP H04523B2 JP 15343884 A JP15343884 A JP 15343884A JP 15343884 A JP15343884 A JP 15343884A JP H04523 B2 JPH04523 B2 JP H04523B2
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- imaging lens
- axis
- mirror
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 27
- 238000003384 imaging method Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15343884A JPS6130705A (ja) | 1984-07-24 | 1984-07-24 | 光触針装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15343884A JPS6130705A (ja) | 1984-07-24 | 1984-07-24 | 光触針装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6130705A JPS6130705A (ja) | 1986-02-13 |
JPH04523B2 true JPH04523B2 (ko) | 1992-01-07 |
Family
ID=15562524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15343884A Granted JPS6130705A (ja) | 1984-07-24 | 1984-07-24 | 光触針装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6130705A (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0726841B2 (ja) * | 1987-04-21 | 1995-03-29 | 理化学研究所 | 光学的距離検出装置 |
JP2584630B2 (ja) * | 1987-05-29 | 1997-02-26 | 理化学研究所 | 側面形状計測用光触針の構成 |
JP5309542B2 (ja) * | 2007-12-05 | 2013-10-09 | 株式会社ニコン | 測定装置およびその方法 |
-
1984
- 1984-07-24 JP JP15343884A patent/JPS6130705A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6130705A (ja) | 1986-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Takatsuji et al. | Whole-viewing-angle cat's-eye retroreflector as a target of laser trackers | |
US4897536A (en) | Optical axis displacement sensor with cylindrical lens means | |
JPH03282203A (ja) | ターゲット及びこれを用いた三次元位置姿勢計測システム | |
JPH10501890A (ja) | 反射性目標マークの位置を決定する光学装置 | |
US4637715A (en) | Optical distance measuring apparatus | |
US4787748A (en) | Synchronous optical scanning apparatus | |
US6327038B1 (en) | Linear and angular retroreflecting interferometric alignment target | |
CN100582678C (zh) | 离轴旋转对称型激光三角位移传感器 | |
JPH04523B2 (ko) | ||
JPH0262903A (ja) | 孔内面測定装置 | |
JPH03264804A (ja) | 表面形状測定装置 | |
Stevenson | Use of laser triangulation probes in coordinate measuring machines for part tolerance inspection and reverse engineering | |
JPH01188254A (ja) | 非接触倣いデジタイジング方法 | |
JPH0521165B2 (ko) | ||
JPH0519641B2 (ko) | ||
JPH07332954A (ja) | 変位傾斜測定方法および装置 | |
SU879298A1 (ru) | Оптико-электронное устройство дл контрол углового поворота объекта | |
JPH02272308A (ja) | 非接触式形状測定装置 | |
JP2584630B2 (ja) | 側面形状計測用光触針の構成 | |
JPS63263411A (ja) | 光学的距離検出装置 | |
JPS61189405A (ja) | 非接触形状測定装置 | |
JPH0542509Y2 (ko) | ||
JPS62179605A (ja) | 法線方向検出センサ | |
JPS63187103A (ja) | 三次元形状の非接触計測方法 | |
JPS60211302A (ja) | 倒れ測定装置 |