JPH0451637U - - Google Patents

Info

Publication number

JPH0451637U

JPH0451637U JP9279890U JP9279890U JPH0451637U JP H0451637 U JPH0451637 U JP H0451637U JP 9279890 U JP9279890 U JP 9279890U JP 9279890 U JP9279890 U JP 9279890U JP H0451637 U JPH0451637 U JP H0451637U

Authority

JP

Japan

Prior art keywords

infrared

silicon wafer

infrared detector

carbon film

hard carbon

Prior art date

1990-09-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 4
• 229910021385 hard carbon Inorganic materials 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 238000007789 sealing Methods 0.000 claims 1
• 238000001514 detection method Methods 0.000 description 1
• 238000002834 transmittance Methods 0.000 description 1