JPH0451140U - - Google Patents

Info

Publication number
JPH0451140U
JPH0451140U JP9295990U JP9295990U JPH0451140U JP H0451140 U JPH0451140 U JP H0451140U JP 9295990 U JP9295990 U JP 9295990U JP 9295990 U JP9295990 U JP 9295990U JP H0451140 U JPH0451140 U JP H0451140U
Authority
JP
Japan
Prior art keywords
wafer
elastic body
protective sheet
processed side
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9295990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9295990U priority Critical patent/JPH0451140U/ja
Publication of JPH0451140U publication Critical patent/JPH0451140U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP9295990U 1990-09-04 1990-09-04 Pending JPH0451140U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9295990U JPH0451140U (US06330241-20011211-M00004.png) 1990-09-04 1990-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9295990U JPH0451140U (US06330241-20011211-M00004.png) 1990-09-04 1990-09-04

Publications (1)

Publication Number Publication Date
JPH0451140U true JPH0451140U (US06330241-20011211-M00004.png) 1992-04-30

Family

ID=31829813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9295990U Pending JPH0451140U (US06330241-20011211-M00004.png) 1990-09-04 1990-09-04

Country Status (1)

Country Link
JP (1) JPH0451140U (US06330241-20011211-M00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016117290A (ja) * 2016-02-29 2016-06-30 三星ダイヤモンド工業株式会社 脆性材料基板の分断装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016117290A (ja) * 2016-02-29 2016-06-30 三星ダイヤモンド工業株式会社 脆性材料基板の分断装置

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