JPH0451131U - - Google Patents

Info

Publication number
JPH0451131U
JPH0451131U JP9233790U JP9233790U JPH0451131U JP H0451131 U JPH0451131 U JP H0451131U JP 9233790 U JP9233790 U JP 9233790U JP 9233790 U JP9233790 U JP 9233790U JP H0451131 U JPH0451131 U JP H0451131U
Authority
JP
Japan
Prior art keywords
rotor
semiconductor materials
air filter
air
drying device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9233790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9233790U priority Critical patent/JPH0451131U/ja
Publication of JPH0451131U publication Critical patent/JPH0451131U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP9233790U 1990-08-31 1990-08-31 Pending JPH0451131U (US07696358-20100413-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9233790U JPH0451131U (US07696358-20100413-C00002.png) 1990-08-31 1990-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9233790U JPH0451131U (US07696358-20100413-C00002.png) 1990-08-31 1990-08-31

Publications (1)

Publication Number Publication Date
JPH0451131U true JPH0451131U (US07696358-20100413-C00002.png) 1992-04-30

Family

ID=31828705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9233790U Pending JPH0451131U (US07696358-20100413-C00002.png) 1990-08-31 1990-08-31

Country Status (1)

Country Link
JP (1) JPH0451131U (US07696358-20100413-C00002.png)

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