JPH044560B2 - - Google Patents

Info

Publication number
JPH044560B2
JPH044560B2 JP61287268A JP28726886A JPH044560B2 JP H044560 B2 JPH044560 B2 JP H044560B2 JP 61287268 A JP61287268 A JP 61287268A JP 28726886 A JP28726886 A JP 28726886A JP H044560 B2 JPH044560 B2 JP H044560B2
Authority
JP
Japan
Prior art keywords
fine movement
fulcrum
movement mechanism
fixed
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61287268A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63139290A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61287268A priority Critical patent/JPS63139290A/ja
Publication of JPS63139290A publication Critical patent/JPS63139290A/ja
Publication of JPH044560B2 publication Critical patent/JPH044560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP61287268A 1986-12-02 1986-12-02 微動機構 Granted JPS63139290A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61287268A JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61287268A JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Publications (2)

Publication Number Publication Date
JPS63139290A JPS63139290A (ja) 1988-06-11
JPH044560B2 true JPH044560B2 (enrdf_load_stackoverflow) 1992-01-28

Family

ID=17715204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61287268A Granted JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Country Status (1)

Country Link
JP (1) JPS63139290A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183429A (ja) * 1989-01-06 1990-07-18 Hitachi Ltd 情報記録再生用光ピックアップ
JP7556054B2 (ja) * 2020-12-24 2024-09-25 株式会社日立ハイテク 荷電粒子顕微鏡およびステージ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0125357Y2 (enrdf_load_stackoverflow) * 1980-06-27 1989-07-28

Also Published As

Publication number Publication date
JPS63139290A (ja) 1988-06-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term