JPH0444804A - Automatic feeding and discharge apparatus of laser scriber substrate - Google Patents

Automatic feeding and discharge apparatus of laser scriber substrate

Info

Publication number
JPH0444804A
JPH0444804A JP2152376A JP15237690A JPH0444804A JP H0444804 A JPH0444804 A JP H0444804A JP 2152376 A JP2152376 A JP 2152376A JP 15237690 A JP15237690 A JP 15237690A JP H0444804 A JPH0444804 A JP H0444804A
Authority
JP
Japan
Prior art keywords
substrate
feeding
magazine
receiving
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2152376A
Other languages
Japanese (ja)
Inventor
Ryoji Hakuta
Masahiko Ando
Original Assignee
Hitachi Chem Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chem Co Ltd filed Critical Hitachi Chem Co Ltd
Priority to JP2152376A priority Critical patent/JPH0444804A/en
Publication of JPH0444804A publication Critical patent/JPH0444804A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/53Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Abstract

PURPOSE:To prevent the receipt of 2 pieces of substrate steadily and contrive a speedy feeding and discharge of the same to and from a descending table by providing an outlet for substrate which has a slit permitting the passage of no more than one piece of substrate on the lower part of a feeding magazine part, fixing the substrate by adsorption and having a movable feeding table and registration base. CONSTITUTION:On the lower part thereof a feeding magazine part 14 is equipped with an outlet for substrate which has a slit permitting the passage of no more than one piece of substrate 23. A feeding table 15 is adjusted to the side of the feeding magazine part 14 and a substrate 23 is set thereon (initial position). To prevent the substrate from the dislocation, the substrate to be discharged 23 is securely fixed by an adsorbing opening 32 in the feeding side and the substrate to be received 23 by a suction opening 33 in the receiving side. The substrate 23 is discharged and moved to the processing position, while the processed substrate 23 is caused to slide into and be received by the lowermost part within the receiving magazine part 17, preceded by a synthetic resin plate 35. Thereafter, a registration base 16 is elevated to the height of processing, receiving the substrate 23 from the feeding table 15, adjusting its position, causing it to be sucked in a vacuum and simultaneously returning the feeding magazine part 14 and the receiving magazine part 17 to the initial position (by elevation).
JP2152376A 1990-06-11 1990-06-11 Automatic feeding and discharge apparatus of laser scriber substrate Pending JPH0444804A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2152376A JPH0444804A (en) 1990-06-11 1990-06-11 Automatic feeding and discharge apparatus of laser scriber substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2152376A JPH0444804A (en) 1990-06-11 1990-06-11 Automatic feeding and discharge apparatus of laser scriber substrate

Publications (1)

Publication Number Publication Date
JPH0444804A true JPH0444804A (en) 1992-02-14

Family

ID=15539175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2152376A Pending JPH0444804A (en) 1990-06-11 1990-06-11 Automatic feeding and discharge apparatus of laser scriber substrate

Country Status (1)

Country Link
JP (1) JPH0444804A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106312495A (en) * 2015-06-30 2017-01-11 万润科技股份有限公司 A flow path mechanism and a conveyance method and apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106312495A (en) * 2015-06-30 2017-01-11 万润科技股份有限公司 A flow path mechanism and a conveyance method and apparatus using the same

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