JPH0438417A - Apparatus for measuring coordinate - Google Patents

Abstract

PURPOSE:To correctly measure a plane coordinate value of an optional point on a pattern which is formed on a photo mask or the like by allowing a substrate holding mechanism to hold and fix a substrate in a vertical direction. CONSTITUTION:A driving motor 12c is actuated to move a table 14 in a Z-axis direction, and when the table 14 comes to a predetermined position in the z-a0xis direction, the actuation of the driving motor 12c is stopped. Then a driving motor 15c is actuated to move a substrate holding plate 16 in an X-axis direction, and when the substrate holding plate 16 comes to a predetermined position in the X-axis direction, the actuation of the driving motor 12c is stopped. Subsequently, a rear face of a photo mask 31 is brought into tight contact with a surface of the substrate holding plate 16 to close a vacuum suction hole 16a, and also an exhaust device connected to a vacuum suction hole 16a is actuated to have the photo mask 31 vacuum-sucked to be held on the surface of the substrate holding plate 16. Then a vacuum suction hole opened at the tip of a slider 17a of a gradient angle adjusting mechanism 17 is closed by a rear face of a lower end of the photo mask 31, the exhaust device connected to the vacuum-suction hole is actuated, and the photo mask 31 is fixed at the tip of the slider 17a.

Description

[Detailed Description of the Invention] [Summary] Regarding a coordinate measuring device having a substrate holding mechanism that holds and fixes the substrate when measuring the plane coordinate value of an arbitrary point on the substrate, holding the substrate without deforming it. The present invention aims to provide a coordinate measuring device having a substrate holding mechanism that allows the substrate holding mechanism to be configured to hold and fix the substrate in the vertical direction.

[Industrial application field]

The present invention relates to a coordinate measuring device having a substrate holding mechanism that holds a substrate as an object to be measured, and particularly to a coordinate measuring device having a substrate holding mechanism that can hold the substrate without deforming it.

The wiring patterns of recent highly integrated, large-scale semiconductor devices have become finer and denser.

Therefore, the pattern accuracy of photomasks used to form such wiring patterns is becoming increasingly strict, and there is a strong demand for a coordinate measuring device that can accurately measure the plane coordinate values of arbitrary points on the pattern.

[Conventional technology]

Next, a conventional coordinate measuring device will be described with reference to the drawings.

FIG. 2 is a schematic side sectional view of a conventional coordinate measuring device.

Note that the same symbols are given to the same parts and materials throughout the drawings.

As shown in FIG. 2, the substrate holding mechanism 21 of the conventional coordinate measuring device has a flat vacuum suction surface 21a on which a substrate, for example, a photomask 31, is placed horizontally, and a vacuum suction surface 21a at one end.
The vacuum suction hole 21b has a vacuum suction hole 21b that is open to the inside and the other end is connected to an exhaust device (not shown), and a through hole 21c that allows the laser beam 32 to pass therethrough and prevents diffused reflection.

When measuring the plane coordinate value of an arbitrary point on the pattern of the photomask 31 using a conventional coordinate measuring device having such a substrate holding mechanism 21, the photomask 31 is placed on the vacuum suction surface 21a of the substrate holding mechanism 21. Place it in the through hole 21c
Then, the exhaust device is operated to reduce the pressure inside the through hole 21c, and the photomask 31 is held and fixed on the vacuum suction surface 21a.

[Problem to be solved by the invention]

However, as described above, the photomask 31 fixed to the substrate holding mechanism 21 of the conventional coordinate measuring apparatus deforms into a pot-like shape due to its own weight, as shown by the dotted line in FIG.

Therefore, in the photomask 31 in such a state, there is a problem that the plane coordinate value of any point on the pattern cannot be accurately measured.

The present invention has been made to solve such problems, and its purpose is to provide a coordinate measuring device having a substrate holding mechanism that can hold a substrate without deforming it.

[Means to solve the problem]

The above purpose is to provide a coordinate measuring device that includes a substrate holding mechanism that holds and fixes the substrate when measuring the plane coordinate value of an arbitrary point on the substrate, in which the substrate holding mechanism holds and fixes the substrate in the vertical direction. This is achieved by a coordinate measuring device characterized by:

[For production]

The coordinate measuring device of the present invention includes a substrate holding mechanism that holds and fixes the substrate in the vertical direction.

Therefore, the substrate held in the vertical direction by the substrate holding mechanism is not deformed.

Therefore, the coordinate measuring device of the present invention having such a substrate holding mechanism can accurately determine the plane coordinate value of any point on the substrate.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram for explaining a coordinate measuring device according to an embodiment of the present invention, in which (a) is a schematic plan view of a substrate holding mechanism of the coordinate measuring device, and (b) is a schematic plan view of the coordinate measuring device. FIG. 3 is a schematic side view of the substrate holding mechanism of FIG.

As shown in FIGS. 1(a) and 1(b), the coordinate measuring device according to an embodiment of the present invention is a vertical plate whose flat surface is parallel to the vertical direction (hereinafter referred to as the Z-axis direction). 11, and a ball napft 12b whose both ends are supported by bearings 12a fixed to the surface of the vertical plate 11, whose lower end is connected to a drive motor 12c, and which is rotated and screwed into the drive motor 12c in the Z-axis direction (vertical direction). A pair of slide rails 13b are fixed at both ends to support fittings 13a fixed to the surface of the vertical board 11, and are parallel to and spaced apart from each other in the Z-axis direction. two sliders 13 and a ball naff l-12 on the back.
b, a table 14 fixed to the slider 13 and having a surface parallel to the Z-axis that is moved in the Z-axis direction by a ball nut 12b, and a bearing 15 fixed to the surface of the chiffle 4.
The ball nut 15b, which is supported at both ends by a and whose one end is connected to a drive motor 15c and is rotated and screwed by the drive motor 15c, is moved in the X-axis direction (in the direction perpendicular to the Z-axis direction, that is, in the horizontal direction). The inside is depressurized by an exhaust device (not shown) which has one end opened on a surface parallel to the surface of the table 14 and the other end connected to the ball screw 15 whose back surface is fixed to the ball nut 15b, and the substrate, e.g. A substrate holding plate 16 having a vacuum suction hole 16a that holds the photomask 31 in the Z-axis direction and a slider 17a fixed to the tip of the photomask 31 by vacuum suction are used to accurately tilt the photomask 31 with respect to the Y-axis. A distance measuring device that can measure
(not shown) in the Y-axis direction (perpendicular to the X-axis)
The substrate holding mechanism includes a tilt angle adjustment mechanism 17 that expands and contracts the photomask 31 to accurately align it parallel to the Y axis.

A method of using the substrate holding mechanism of the coordinate measuring apparatus according to the embodiment of the present invention having such a configuration will be described.

First, the drive motor 12c is operated to move the table 14 in the X-axis direction, and when the table 14 reaches a predetermined position in the X-axis direction, the operation of the drive motor 12c is stopped.

Next, the drive motor 15c is operated to move the substrate holding plate 16 in the X-axis direction, and when the substrate holding plate 16 reaches a predetermined position in the X-axis direction, the operation of the drive motor 12c is stopped.

After that, the back side of the photomask 31 is brought into close contact with the surface of the substrate holding plate 16 to close the vacuum suction hole 16a, and the exhaust device connected to the vacuum suction hole 16a is activated to vacuum suction the photomask 31 to the substrate. It is held on the surface of the holding plate 16.

Next, a vacuum suction hole (not shown) opened at the tip of the slider 17a of the inclination angle adjustment mechanism 17 is inserted into the photomask 31.
The photomask 31 is fixed to the tip of the slider 17a by operating an exhaust device (not shown) that is closed at the back surface of the lower end and connected to the vacuum suction hole.

After that, the distance measuring device measures the inclination of the photomask 31 with respect to the Y axis, and if the photomask 31 is tilted, the distance measuring device controls the inclination angle adjustment mechanism 17 to adjust the slider 17.
Correct the inclination by slightly moving a in the Y-axis direction.

In this way, the surface direction of the photomask 31 is aligned with the X axis and the Y axis.
It is held parallel to the axis and perpendicular to the Y axis, and is held without deformation of bending in the direction perpendicular to the surface.

As a result, the coordinate measuring device of the present invention has a photomask 31
The plane coordinate value of any point on the pattern can be accurately measured.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, it is possible to provide a coordinate measuring device that can accurately measure the plane coordinate value of an arbitrary point on a pattern formed on a photomask or the like.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining a coordinate measuring device according to an embodiment of the present invention, and FIG. 2 is a schematic side sectional view of a conventional coordinate measuring device. In the figure, 11 is a vertical plate, 12 and 15 are ball screws, 12a and 15a are bearings, 12b and 15b are ball nuts, 12c and 15c are drive motors, 13 is a slider 13a is a support fitting, 13b is a slide rail, and 14 is a table , 16 is a substrate holding plate, 16a is a vacuum suction hole, 17 is a tilt angle adjustment mechanism, and 17a is a slider 31 is a substrate (photomask).

Claims (1)

[Claims] In a coordinate measuring device having a substrate holding mechanism that holds and fixes the substrate when measuring the plane coordinate value of an arbitrary point on the substrate, the substrate holding mechanism holds the substrate vertically. A coordinate measuring device characterized in that it is fixed in place.