JPH0438052U - - Google Patents

Info

Publication number
JPH0438052U
JPH0438052U JP7966590U JP7966590U JPH0438052U JP H0438052 U JPH0438052 U JP H0438052U JP 7966590 U JP7966590 U JP 7966590U JP 7966590 U JP7966590 U JP 7966590U JP H0438052 U JPH0438052 U JP H0438052U
Authority
JP
Japan
Prior art keywords
wafer
storage container
wafer storage
pieces
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7966590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7966590U priority Critical patent/JPH0438052U/ja
Publication of JPH0438052U publication Critical patent/JPH0438052U/ja
Pending legal-status Critical Current

Links

JP7966590U 1990-07-25 1990-07-25 Pending JPH0438052U (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7966590U JPH0438052U (US06368395-20020409-C00050.png) 1990-07-25 1990-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7966590U JPH0438052U (US06368395-20020409-C00050.png) 1990-07-25 1990-07-25

Publications (1)

Publication Number Publication Date
JPH0438052U true JPH0438052U (US06368395-20020409-C00050.png) 1992-03-31

Family

ID=31624027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7966590U Pending JPH0438052U (US06368395-20020409-C00050.png) 1990-07-25 1990-07-25

Country Status (1)

Country Link
JP (1) JPH0438052U (US06368395-20020409-C00050.png)

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