JPH0437000A - Electrostatic accelerator - Google Patents

Electrostatic accelerator

Info

Publication number
JPH0437000A
JPH0437000A JP14380990A JP14380990A JPH0437000A JP H0437000 A JPH0437000 A JP H0437000A JP 14380990 A JP14380990 A JP 14380990A JP 14380990 A JP14380990 A JP 14380990A JP H0437000 A JPH0437000 A JP H0437000A
Authority
JP
Japan
Prior art keywords
electrode
charged particle
particle beam
magnetic field
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14380990A
Other languages
Japanese (ja)
Other versions
JP3067784B2 (en
Inventor
Yoshihiro Obara
小原 祥裕
Makoto Mizuno
誠 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute filed Critical Japan Atomic Energy Research Institute
Priority to JP2143809A priority Critical patent/JP3067784B2/en
Publication of JPH0437000A publication Critical patent/JPH0437000A/en
Application granted granted Critical
Publication of JP3067784B2 publication Critical patent/JP3067784B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To produce a charged particle beam carrying a large current, good in the converging characteristic, and equipped with a high brightness by arranging a plurality of magnets around electrode hole provided in each accelerating electrode, and generating a quadripolar magnetic field within this electrode hole. CONSTITUTION:In an electrostatic acceleration system 2 to accelerate a charged particle beam by permitting it to pass through a single electrode hole 1, magnets 5 to generate a pair of quadripolar magnetic fields 4a, 4b are installed above and below and on the left and right of each of accelerating electrodes 3 in multi-stage arrangement. When a charged particle beam is incident to the downstream quadripolar magnetic field 4A, the beam has a larger energy than when situated further downstream, and therefore, a charged particle beam converged both in the horizontal and vertical directions is obtained by giving the upstream quaripolar magnetic field 4B a greater intensity than the other 4A.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、静電加速器に関するものである。[Detailed description of the invention] (Industrial application field) This invention relates to an electrostatic accelerator.

さらに詳しくは、この発明は、大電流で、収束性の良好
な高輝度の荷電粒子ビームを発生させることのできる静
電加速器に関するものである。
More specifically, the present invention relates to an electrostatic accelerator that can generate a high-intensity charged particle beam with good convergence using a large current.

(従来の技術) 従来より、荷電粒子ビームを数10 k、 e Vから
数M e V程度の高エネルギー領域に静電的に加速す
る静電加速器については、たとえば第6図に例示したよ
うな単一電極孔(ア)を有する複数の加速電極(イ)を
多段配置した椙造のものが知られている。
(Prior Art) Conventionally, electrostatic accelerators that electrostatically accelerate charged particle beams to a high energy region of several tens of kilovolts, eV to several megavolts have been used, for example, as shown in FIG. Sugizo's device is known in which a plurality of accelerating electrodes (b) each having a single electrode hole (a) are arranged in multiple stages.

このような静電加速器においては、加速電極くイ)間に
加速電源(つ)から静電界を印加し、イオン源(1)に
設けたプラズマ生成電源(オ)からの印加電圧により供
給カス(力)をプラズマ(キ)励起しな荷電粒子ビーム
(り)を加速している。荷電粒子ビーム(り)の収束は
、各々の加速電極(イ)の電極孔(ア)を通過する際に
静電界より受りる静電レンズ作用により行っていた。
In such an electrostatic accelerator, an electrostatic field is applied between the accelerating electrodes (A) from an accelerating power source (X), and a supply gas (A) is generated by an applied voltage from a plasma generation power source (O) provided in the ion source (1). The charged particle beam is accelerated by exciting the plasma. Convergence of the charged particle beam (ri) was performed by the electrostatic lens effect received from the electrostatic field when passing through the electrode hole (a) of each accelerating electrode (a).

(発明が解決しようとする課題) 殻間に、荷電粒子ビーム(り)を加速する場合、荷電粒
子ビーム(り)の電流値が大きくなるにつれてビーム自
身のもつ空間電荷により発散力か強より、ビームの収束
性が悪化する。これを防止し、荷電粒子ビーム(り)の
収束性を向上させるためには、静電加速器の加速電極(
イ)間に印加する電界強度を大きくし、レンズ作用を強
くする必要がある。
(Problem to be solved by the invention) When accelerating a charged particle beam between shells, as the current value of the charged particle beam increases, the divergence force becomes stronger due to the space charge of the beam itself. Beam convergence deteriorates. In order to prevent this and improve the convergence of the charged particle beam, the accelerating electrode of the electrostatic accelerator (
b) It is necessary to increase the electric field strength applied between the two to strengthen the lens effect.

しかしながら、加速電極(イ)間に印加できる電界強度
は真空耐電圧上の制約を受けるため、従来では、収束性
の良好な大電流ビームの生成には限界があるのが実情で
あった。
However, since the electric field strength that can be applied between the accelerating electrodes (A) is limited by the vacuum withstand voltage, conventionally there is a limit to the generation of a large current beam with good convergence.

一方、加速器)rf!(イ)間においては、第7図にも
示したように、ビーム粒子と周囲のカス分子との衝突に
よって生じる低速の電子(ケ)やイオン(コ)等の二次
粒子が、電界方向に加速され、電極孔(ア)を順次通過
するにしたかって高エネルギーに加速されることとなる
。この加速した高エネルギーの電子(ゲ)やイオン(コ
)は、一般に下流側の電極(イ)に衝突する軌道を取り
やすく、ひとたび電@!(イ)に衝突すると、X線(す
)や−゛次電子(シ)か発生し、これによって、加速器
の耐電圧特性を劣化させるという問題があっ/、:。
On the other hand, accelerator) rf! As shown in Figure 7, between (b), secondary particles such as low-velocity electrons (k) and ions (k), which are generated by collisions between beam particles and surrounding scrap molecules, move in the direction of the electric field. As it passes through the electrode holes (A) sequentially, it is accelerated to high energy. These accelerated high-energy electrons (ge) and ions (co) generally tend to take a trajectory that collides with the downstream electrode (a), and once they become electric @! When it collides with (a), X-rays (su) and -th order electrons (shi) are generated, which causes the problem of deteriorating the withstand voltage characteristics of the accelerator.

加速器内の真空度が高真空である場合には、−成粒子の
発生は少なく、さほど大きな問題とはならないが、ビー
ム電流を増大させるにしなかってイオン源〈工)へ供給
するカス(力)の供給量か増大し、加速器内のカス圧か
上昇する場合には、加速電極(イ)間で発生ずる電子(
ケ)やイオン(コ)等の二次粒子をいかに抑制するかが
極めて重要となる。すなわち、このような二次粒子を窩
エネルギー状態に加速することなく、低エネルギー状態
のうぢに処理しなければならないという問題があった。
If the degree of vacuum inside the accelerator is high, the generation of -particles will be small and will not be a big problem, but the amount of debris (force) supplied to the ion source will increase without increasing the beam current. When the supply amount of gas increases and the gas pressure inside the accelerator increases, the electrons (
It is extremely important how to suppress secondary particles such as (e) and ions (e). That is, there is a problem in that such secondary particles must be processed in a low energy state without being accelerated to a low energy state.

この発明は、以上の通りの事情に鑑みてなされたもので
あり、従来の静電加速器の欠点を解消し、大電流て、か
つ収束性の良好な高輝度の荷電粒子ビームを発生させる
ことができる、新しい静電加速器提供することを目的と
している。
This invention was made in view of the above circumstances, and it is possible to eliminate the drawbacks of conventional electrostatic accelerators and generate a high-intensity charged particle beam with large current and good convergence. The aim is to provide a new electrostatic accelerator that can be used.

(課題を解決するための手段) この発明は、上記の課題を解決するものとして、加速電
極の電極孔周辺に複数の磁石を配設し、この電極孔内に
磁気四重極磁場を発生させてなることを特徴とするi?
il電加速器を提供する。
(Means for Solving the Problems) This invention solves the above problems by disposing a plurality of magnets around the electrode hole of an accelerating electrode and generating a magnetic quadrupole magnetic field within the electrode hole. i?
Provides an il electric accelerator.

この発明においては、隣接する電極孔内に互いに極性の
逆の四重極磁場を発生させることを好ましい態様として
もいる。
In this invention, a preferred embodiment is to generate quadrupole magnetic fields with opposite polarities in adjacent electrode holes.

(作 用) この発明の静電加速器においては、加速電極の電極孔周
辺に複数の磁石を配設し、この電極孔内に磁気四重極磁
場を発生させることによって、荷電粒子ビームが電極孔
を通過するたび毎にこの四垂極磁場で荷電粒子ビームを
その断面の垂直方向および水平方向に収束と発散とを交
互に繰り返させ、最終的に収束性の良好な加速荷電粒子
ビームとすることかできる。また加速電極間において粒
子ビームと周囲のカス分子との衝突により生じる電子や
イオン等の二次粒子を四重極磁場で偏向させることもで
きるなめ、この二次粒子を高エネルギー状態に加速する
のを防止でき、しかも加速電極との衝突による加速電極
表面からのX線や二次電子の発生を抑制することができ
る。
(Function) In the electrostatic accelerator of the present invention, a plurality of magnets are disposed around the electrode hole of the accelerating electrode, and a magnetic quadrupole magnetic field is generated within the electrode hole, so that a charged particle beam is directed to the electrode hole. Each time the charged particle beam passes through the quadrupole magnetic field, it alternately converges and diverges in the vertical and horizontal directions of its cross section, and finally becomes an accelerated charged particle beam with good convergence. I can do it. It is also possible to deflect secondary particles such as electrons and ions generated by the collision between the particle beam and surrounding dregs molecules between the accelerating electrodes using a quadrupole magnetic field, so it is possible to accelerate these secondary particles to a high energy state. In addition, generation of X-rays and secondary electrons from the surface of the accelerating electrode due to collision with the accelerating electrode can be suppressed.

(実施例) 以下、図面に沿って実施例を示し、この発明の静電加速
器についてさらに詳しく説明する。
(Example) Hereinafter, the electrostatic accelerator of the present invention will be described in more detail by showing examples along with the drawings.

第1図(a)(b)は、各々、この発明の静電加速器の
一実施例を模式的に示した要部断面図および要部正面図
である。
FIGS. 1(a) and 1(b) are a sectional view and a front view of a main part, respectively, schematically showing an embodiment of an electrostatic accelerator of the present invention.

この例においては、荷電粒子ビームを単一の電極孔(1
)を通過させて加速する静電加速系(2)において、多
段配置した加速電極(3)の各々に、一対の四重′#!
磁場(4a)(4b)を発生させる磁石(5)を」1下
左右に一つずつ配設している。
In this example, the charged particle beam is transmitted through a single electrode hole (1
) in an electrostatic acceleration system (2) that accelerates by passing through a pair of quadruple '#!
Magnets (5) that generate magnetic fields (4a) and (4b) are placed one each on the left and right sides of the bottom.

通常、一対の等しい四重極磁場(4a)(4b)を用い
ることによって、荷電粒子ビームをその断面の垂直方向
と水平方向との両方向に収束させることができる。四重
極磁場(4a)(4b)を発生させる磁石(5)の種類
については特に制限はなく、たとえば永久磁石、電磁石
等とすることができる。
Typically, by using a pair of equal quadrupole magnetic fields (4a) (4b), the charged particle beam can be focused both vertically and horizontally across its cross section. The type of magnet (5) that generates the quadrupole magnetic fields (4a) (4b) is not particularly limited, and may be, for example, a permanent magnet, an electromagnet, or the like.

またこの例においては、隣接する電極孔(1)内の四重
極磁場が互いに逆の極性となるように、隣接する磁石<
5A)(5B)をその極性を逆にして配設してもいる。
In this example, adjacent magnets <
5A) and (5B) are also arranged with their polarities reversed.

この第1図に示した例の場合には、荷電粒子ビームか下
流側の四重極磁場(4A)に入射する時に、そのビーム
のエネルギーはこれより下流側の時よりも増大している
ため、上流側の四重極磁場(4B)の強度を四重極磁場
(4A)よりも強くすることによって、水平方向にも垂
直方向にも収束した荷電粒−rし−ムとすることかでき
る。
In the case of the example shown in Figure 1, when the charged particle beam enters the quadrupole magnetic field (4A) downstream, the energy of the beam increases compared to when it is downstream. By making the strength of the upstream quadrupole magnetic field (4B) stronger than the quadrupole magnetic field (4A), it is possible to form a charged particle beam that is focused both in the horizontal and vertical directions. .

第2図(a)(b)は、この発明の別の例を模式的に示
した要部断面図および要部正面図である。
FIGS. 2(a) and 2(b) are a sectional view and a front view of a main part schematically showing another example of the present invention.

この例においては、一つの加3!!ffi@!(3)に
互いに極性の逆の一対の磁石(5a)(5b)を配設し
ている。また、第1図(a)に示した例と同様に、隣接
する1社−の電極孔(1)内の四重極磁場の極性をも圧
いに逆となるように、磁石(5)をその極性を逆にして
配設してもいる。
In this example, one addition 3! ! ffi@! A pair of magnets (5a) and (5b) having opposite polarities are disposed at (3). In addition, as in the example shown in FIG. 1(a), the magnet (5) is placed so that the polarity of the quadrupole magnetic field in the electrode hole (1) of one adjacent company is also strongly reversed. They are also arranged with their polarities reversed.

この第2図に示した例の場合には、第1図の例とは異な
って、各電極(3)間の四重極磁場相互の間での荷電粒
子ビームのエネルギー増大は起こらないために、各電極
(3)の磁場強度を電極孔(1)を通過するビームのエ
ネルギーに応じて増大させる必要はない。
In the case of the example shown in Fig. 2, unlike the example shown in Fig. 1, the energy of the charged particle beam does not increase between the quadrupole magnetic fields between the electrodes (3). , it is not necessary to increase the magnetic field strength of each electrode (3) in accordance with the energy of the beam passing through the electrode hole (1).

第3図は、この発明のまた別の例を模式的に示した要部
正面図である。
FIG. 3 is a front view of main parts schematically showing still another example of the present invention.

加速電極(3)に形成した多孔状の電極孔(1)の隣接
する電極孔(1)内に、互いに極性が逆の四重極磁場を
発生させる磁石(5)を配設し、この多孔状の電極孔く
1)に荷電粒子ビームを通過させて加速する。この第3
図に示した例の場合には、磁石(5)により発生ずる磁
場か加速電極(3)外に洩れることはないために、イオ
ン源に悪影響を及ぼさずにすむという利点がある。
Magnets (5) that generate quadrupole magnetic fields with opposite polarities are arranged in adjacent electrode holes (1) of the porous electrode holes (1) formed in the accelerating electrode (3). A charged particle beam is passed through the shaped electrode hole 1) and accelerated. This third
In the case of the example shown in the figure, since the magnetic field generated by the magnet (5) does not leak out of the accelerating electrode (3), there is an advantage that it does not adversely affect the ion source.

たとえは以上のように例示することのできるこの発明の
静電加速器による荷電粒子ビームの加速作用について例
示したものか第4図(a)(b)および第5図である。
FIGS. 4(a), 5(b) and 5 are examples of the acceleration action of a charged particle beam by the electrostatic accelerator of the present invention, which can be illustrated as above.

第4図(a)(b)に示したように、荷電粒子ビーム(
6)は、加速電極(3)の電極孔(1)を通過する毎に
、一対の四重極磁場(4a)(4b)により第5図に示
したようにビーム断面の垂直方向および水平方向に収束
作用(7)と発散作用(8)とを交互に繰り返し受け、
強収束の原理により最終的に収束性の良好なビームとな
る。
As shown in FIGS. 4(a) and 4(b), a charged particle beam (
6) As shown in Fig. 5, each time the beam passes through the electrode hole (1) of the accelerating electrode (3), a pair of quadrupole magnetic fields (4a) (4b) causes the beam to move in the vertical and horizontal directions of the cross section. is repeatedly subjected to convergence action (7) and divergence action (8) alternately,
The principle of strong convergence ultimately results in a beam with good convergence.

加速な極(3)間に印加する電界強度を強くしなくとも
、すなわち静電レンズの強度を強くしなくても、収束性
の良好な大電流ビームを生成することかできる。
A large current beam with good convergence can be generated without increasing the electric field strength applied between the accelerating poles (3), that is, without increasing the strength of the electrostatic lens.

加′S電極(3)間において、ビーム粒子と周囲のカス
との衝突によって生ずる二次電子は、荷電粒子に比べて
質量がl/1800程度と小さいために、四重枠磁場(
4a)(4b)によって大きく偏向し、第4図(a)に
示した軌道(9)を描いて電極(3)に衝突する。一方
、ビーム粒子とカス分子との衝突によって生ずる二次イ
オンは、電極孔(1)を通過するまでに得るエネルギー
が小さいことから、二次電子と同様に、四重極磁場〈4
a)(4,b )により偏向し、軌道(9)を描いて電
極(3)に衝突する。このために、二次電子や二次イオ
ンコクの二次粒子が、加速電極(3)の上流側に洩れて
さらにエネルギーを得ることは不可能となり、加速器の
耐電特性を劣化させるX線や二次電子の電極(3)表面
からの発生を抑制することができる。また、二次粒子の
高エネルギーへの加速を大幅に減少できることから、加
速電極(3)の熱負荷を著しく低減させることもできる
The secondary electrons generated by the collision between the beam particles and the surrounding debris between the charging electrodes (3) have a small mass of about 1/1800 compared to charged particles, so they are affected by the quadruple frame magnetic field (
4a) and (4b), and collides with the electrode (3), following the trajectory (9) shown in FIG. 4(a). On the other hand, secondary ions generated by collisions between beam particles and waste molecules obtain less energy before passing through the electrode hole (1).
a) It is deflected by (4,b) and collides with the electrode (3) while tracing a trajectory (9). For this reason, it becomes impossible for secondary particles such as secondary electrons and secondary ions to leak to the upstream side of the accelerating electrode (3) and to obtain further energy. Generation of electrons from the surface of the electrode (3) can be suppressed. Furthermore, since the acceleration of secondary particles to high energy can be significantly reduced, the thermal load on the accelerating electrode (3) can also be significantly reduced.

もちろんこの発明は、以上の例によって限定されるもの
ではない。加速電極の横道および構成、磁石の種類やそ
の配置構成等の細部については様々な態様が可能である
ことはいうまでもない。
Of course, the invention is not limited to the above examples. It goes without saying that various embodiments are possible with respect to details such as the crossroads and configuration of the accelerating electrodes, the type of magnets, and their arrangement.

(発明の効果) 以上詳しく説明した通り、この発明によって、収束性の
良好な大電流ビームを生成することができる。また、静
電加速器の耐電圧特性を向」ユさせることがてき、しか
も加速電極の熱負荷を低減させることもできる。この発
明の静電加速器は、イオン注入用または表面処理・表面
改質用の数100に、 e Vから数MeV領域の大電
流イオン加速器、核融合実験装置のプラズマ加熱・電流
駆動用の大電流負イオン加速器、耐中性子材料開発用の
強力中性r源あるいは月利試験用の大強度イオン加速器
等に用いることかできる。
(Effects of the Invention) As explained in detail above, according to the present invention, a large current beam with good convergence can be generated. Further, the withstand voltage characteristics of the electrostatic accelerator can be improved, and the thermal load on the accelerating electrode can also be reduced. The electrostatic accelerator of the present invention is a large current ion accelerator for ion implantation or surface treatment/modification, a large current ion accelerator in the eV to several MeV range, and a large current for plasma heating/current driving in nuclear fusion experimental equipment. It can be used in negative ion accelerators, strong neutral r sources for developing neutron-resistant materials, high-intensity ion accelerators for monthly utilization tests, etc.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(21)(b)は、各々、この発明の静電加速器
の一実施例を模式的に示した要部断面図および要部正面
図である。 第2図(a)(b)は、各々、この発明の別の例を模式
的に示した要部断面図および要部正面図である。 第3図は、この発明のまた別の例を模式的に示した要部
正面図である。 第4図(a)(b)および第5図は、各々、この発明の
静電加速器による荷電粒子ビームの加速作用について模
式的に示した要部断面図、要部正面図および進行方向と
ビーム幅との相関図である。 第5図および第6図は、各々、従来の静電加速器とその
動作状態を模式的に示した断面図である。 1・・・電極孔 2・・・静電加速系 3・・・加速電極 4、a、4b、4A、4B−−−四重極磁用5 、5 
a 、 5 b 、 5 A 、 5 B−−−磁石6
・・・荷電粒子ビーム 7・・・収束作用 8・・・発散作用 9・・・軌道 代理人 弁理士  西  澤  利 第 [−「] []r] 「]「] 「薯「] 「薯「] 手粘V有口正書(方 平成2年 9月26目 7、補正の内容 明細書第11頁第16行から17行の「第5図・・・断
面図である。1の記載を[第6図および第7図は、各々
、従来の静電加速器とその動作状態を模式的1て示した
断面図である。」にFTI正いたします。 事件の表示 平成 2部将 許 願第1.43809号発明の名称 静電加速器 3、補正をする者 事件との関係  特許出願人 住所  東京都千代田区内幸町二丁目2番2号名称 1
]本原子力研究所 理事長 伊原義徳 4、代 理 人 (郵便番号150) 東京都渋谷区宇田川町2−1 渋谷ポームズ423 平成 2年 8月13日(発送日:平成 2年 8月28日)
FIG. 1(21)(b) is a sectional view and a front view of a main part, respectively, schematically showing an embodiment of an electrostatic accelerator of the present invention. FIGS. 2(a) and 2(b) are a sectional view and a front view of a main part, respectively, schematically showing another example of the present invention. FIG. 3 is a front view of main parts schematically showing still another example of the present invention. FIGS. 4(a), 5(b) and 5 are a sectional view of a main part, a front view of a main part, a traveling direction and a beam, respectively, schematically showing the acceleration action of a charged particle beam by the electrostatic accelerator of the present invention. It is a correlation diagram with width. FIGS. 5 and 6 are cross-sectional views schematically showing a conventional electrostatic accelerator and its operating state. 1... Electrode hole 2... Electrostatic acceleration system 3... Acceleration electrode 4, a, 4b, 4A, 4B --- Quadrupole magnet 5, 5
a, 5 b, 5 A, 5 B---Magnet 6
... Charged particle beam 7 ... Convergence action 8 ... Divergence action 9 ... Orbital agent Patent attorney Toshida Nishizawa [-"] []r] "]"] "薯"] "薯" ] Tekoku V Orthographic Book (September 26, 1990, No. 7, Specification of Contents of Amendment, page 11, lines 16 to 17, "Figure 5... is a cross-sectional view. [FIGS. 6 and 7 are cross-sectional views each schematically showing a conventional electrostatic accelerator and its operating state." FTI corrects the incident. 1. Name of the invention No. 43809 Electrostatic accelerator 3, Relationship to the amended case Patent applicant address 2-2-2 Uchisaiwai-cho, Chiyoda-ku, Tokyo Name 1
] Chairman Yoshinori Ihara 4, Atomic Energy Research Institute Representative (zip code 150) Shibuya Poms 423, 2-1 Udagawa-cho, Shibuya-ku, Tokyo August 13, 1990 (Delivery date: August 28, 1990)

Claims (4)

【特許請求の範囲】[Claims] (1)加速電極の電極孔周辺に複数の磁石を配設し、こ
の電極孔内に磁気四重極磁場を発生させてなることを特
徴とする静電加速器。
(1) An electrostatic accelerator characterized in that a plurality of magnets are arranged around an electrode hole of an accelerating electrode, and a magnetic quadrupole magnetic field is generated within the electrode hole.
(2)電極板を多段配置した加速電極からなる請求項(
1)記載の静電加速器。
(2) Claim consisting of an accelerating electrode in which electrode plates are arranged in multiple stages (
1) The electrostatic accelerator described above.
(3)隣接する電極孔内に互いに極性の逆の四重極磁場
を発生させる請求項(1)記載の静電加速器。
(3) The electrostatic accelerator according to claim (1), wherein quadrupole magnetic fields having opposite polarities are generated in adjacent electrode holes.
(4)格子状の電極孔を有する多孔型加速電極の電極孔
周辺に複数の磁石を配設してなる請求項(1)記載の静
電加速器。
(4) The electrostatic accelerator according to claim (1), wherein a plurality of magnets are arranged around the electrode holes of a porous accelerating electrode having grid-like electrode holes.
JP2143809A 1990-06-01 1990-06-01 Electrostatic accelerator Expired - Fee Related JP3067784B2 (en)

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Application Number Priority Date Filing Date Title
JP2143809A JP3067784B2 (en) 1990-06-01 1990-06-01 Electrostatic accelerator

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JP3067784B2 JP3067784B2 (en) 2000-07-24

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Cited By (6)

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WO2015137150A1 (en) * 2014-03-12 2015-09-17 株式会社アルバック Ion radiation device and ion radiaiton method
KR20150121016A (en) * 2014-03-12 2015-10-28 울박, 인크 Ion irradiation device and ion irradiation method
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