JPH0433360A - Semiconductor device cooler - Google Patents

Semiconductor device cooler

Info

Publication number
JPH0433360A
JPH0433360A JP2138189A JP13818990A JPH0433360A JP H0433360 A JPH0433360 A JP H0433360A JP 2138189 A JP2138189 A JP 2138189A JP 13818990 A JP13818990 A JP 13818990A JP H0433360 A JPH0433360 A JP H0433360A
Authority
JP
Japan
Prior art keywords
semiconductor device
fin
heat
radiation
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2138189A
Other languages
Japanese (ja)
Inventor
Koji Nakamura
功治 中村
Atsushi Honda
厚 本多
Takashi Miwa
孝志 三輪
Fujiaki Nose
藤明 野瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2138189A priority Critical patent/JPH0433360A/en
Publication of JPH0433360A publication Critical patent/JPH0433360A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap

Abstract

PURPOSE:To improve a heat diffusion efficiency and obtain a high heat radiation effect by a method wherein a rotary fin which has a plurality of rotary blades and is made to rotate by the application of an external wind pressure is provided on the radiation plane of a semiconductor device. CONSTITUTION:A radiation fin 7 having protrusions with certain intervals is attached to the surface of a heat transmitting plate 3. A shaft 8 is fixed to the center part of the radiation fin 7 with screws. A rotary fin 7 is supported by the shaft 8 with bearings 9 therebetween. A plurality of rotary blades are attached to the rotary fin 10 symmetrically and radially along its vertical direction. If an air flow is produced by the rotation of a fan 11, the rotary fin 10 is made to rotate by a wind pressure caused by the air flow. By the rotation of the rotary fin 10, the heat coming out of the radiation fins 10 is made to ascend and the heat is diffused. With this constitution, heat is radiated by the fan 11 not only along a horizontal direction but also along a vertical direction to improve a heat radiation efficiency. Therefore, the temperature rise of the air supplied to a semiconductor device provided behind the radiation fin can be reduced, so that the cooling efficiency can be improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体装置の冷却技術、特に、高密度実装の半
導体装置の冷却効率を向上させるために用いて効果のあ
る技術に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a technology for cooling semiconductor devices, and in particular to a technology that can be effectively used to improve the cooling efficiency of semiconductor devices that are mounted in high density.

〔従来の技術〕[Conventional technology]

例えば、大型コンビ二一夕に用いられる論理LSI(大
規模集積回路)は、高密度実装が行われているために発
熱が大きく、何らかの放熱手段が必要である。この放熱
手段として、例えば、「日経エレクトロニクス別冊J 
1984年6月11日発行136頁〜137頁に記載の
ように、放熱面に複数の放熱用ピンを立設し、放熱面積
を大きくしたものがある。この他、複数の突片が一定間
隔に立設した放熱器を取り付ける方法、更には、放熱部
に水を循環させる水冷冷却、または電動ファンによって
空気流を放熱部に吹き付ける強制空冷冷却などがある。
For example, logic LSIs (Large Scale Integrated Circuits) used in large-scale convenience stores generate a large amount of heat due to their high-density packaging, and require some kind of heat dissipation means. As this heat dissipation means, for example, "Nikkei Electronics Special Issue J
As described in pages 136 to 137 published on June 11, 1984, there is one in which a plurality of heat radiation pins are erected on the heat radiation surface to increase the heat radiation area. Other methods include installing a radiator with multiple protrusions set up at regular intervals, water-cooling that circulates water around the radiator, or forced air cooling that uses an electric fan to blow air onto the radiator. .

ところで、本発明者は、半導体装置の大型化及び多数の
半導体装置を用いた応用装置の冷却に伴う熱放散の効率
改善の問題について検討した。
By the way, the present inventor has studied the problem of improving the efficiency of heat dissipation due to the increase in the size of semiconductor devices and the cooling of applied devices using a large number of semiconductor devices.

以下は、本発明者によって検討された技術であり、その
概要は次の通りである。
The following are the techniques studied by the present inventor, and the outline thereof is as follows.

すなわち、大型コンピュータでは、論理LSIなどの多
数個の半導体装置が平面上に配設されている。そして、
その各半導体装置を冷却するに際しては、例えば、モー
タを駆動源とするファンによって風を放熱部に通流させ
ることにより行っている。
That is, in a large computer, a large number of semiconductor devices such as logic LSIs are arranged on a plane. and,
Each semiconductor device is cooled by, for example, blowing air through a heat radiating section using a fan driven by a motor.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、前記の如くファンによる空冷方式においては
、熱放散性を向上させる手段として、各半導体装置に取
り付ける放熱器を大型化し、或いはファンから遠くに位
置する半導体装置にも十分な風量が付与されるようにフ
ァン台数を増やすなどの対策がとられているが、装置の
大型化及びコストアップを招くという問題のあることが
本発明者によって見い出された。
However, in the air cooling method using a fan as described above, as a means to improve heat dissipation, the heat radiator attached to each semiconductor device is increased in size, or a sufficient air volume is provided to semiconductor devices located far from the fan. Although countermeasures such as increasing the number of fans have been taken, the inventor of the present invention has found that there is a problem in that this increases the size and cost of the device.

そこで、本発明の目的は、ファン及び放熱器を最小規模
にしながら十分な熱放散性を達成することのできる技術
を提供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a technology that can achieve sufficient heat dissipation while minimizing the size of the fan and radiator.

本発明の前記目的と新規な特徴は、本明細書の記述及び
添付図面から明らかになるであろう。
The above objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔課題を解決するたtの手段〕[Means to solve the problem]

本願において開示される発明のうち、代表的なものの概
要を簡単に説明すれば、以下の通りである。
A brief overview of typical inventions disclosed in this application is as follows.

すなわち、半導体装置の冷却を自然放置以外の冷却手段
によって行う冷却器であって、複数の回転翼を有すると
共に外部から与えられる風圧を受けて回転する回転フィ
ンを前記半導体装置の放熱面に設けている。
That is, a cooler that cools a semiconductor device by a cooling means other than leaving it in the air, and has a plurality of rotary blades and a rotating fin that rotates in response to wind pressure applied from the outside is provided on the heat dissipation surface of the semiconductor device. There is.

〔作用〕[Effect]

上記した手段によれば、外部から与えられる冷却用の風
を受けて回転するファンは、その風による水平方向の熱
拡散の他に、この方向に直交する熱拡散を生じさせる。
According to the above-described means, the fan that rotates in response to cooling air applied from the outside causes not only horizontal heat diffusion due to the wind, but also heat diffusion perpendicular to this direction.

これにより、熱拡散効率が向上し、高い放熱効果を得る
ことができる。
This improves heat diffusion efficiency and provides a high heat dissipation effect.

〔実施例1〕 第1図は本発明による半導体装置の冷却器の一実施例を
示す断面図、第2図及び第3図は第1図の実施例の使用
状態を示す正面図及び平面図である。
[Embodiment 1] Fig. 1 is a sectional view showing an embodiment of a cooler for a semiconductor device according to the present invention, and Figs. 2 and 3 are a front view and a plan view showing the usage state of the embodiment of Fig. 1. It is.

半導体装置1は、中央部に開口が形成された平板状のベ
ース2、このベース2の上面に接合されると共に前記開
口に散大可能な台座部を有した熱伝導板3、前記台座部
に取り付けられるベレット4、ベース2の周辺部に立設
された複数のリードビン5、ベレット4及びその周辺を
覆うようにしてベース2に接合されるキャップ6の各々
を備えて構成される。
The semiconductor device 1 includes a flat base 2 with an opening formed in the center, a heat conductive plate 3 bonded to the upper surface of the base 2 and having a pedestal part that can be expanded in the opening, and a heat conductive plate 3 attached to the pedestal part. It is configured to include a pellet 4 to be attached, a plurality of lead bins 5 erected around the periphery of the base 2, and a cap 6 joined to the base 2 so as to cover the pellet 4 and its periphery.

熱伝導板3の表面には、一定間隔に突片が設けられたア
ルミニウム材による放熱フィン7が取り付けられ、この
放熱フィン7の中央部には軸受8がねじ止めにより支承
されている。軸受8には、ベアリング9を介して回転フ
ィン10が軸支されている。
A heat dissipation fin 7 made of aluminum and having protrusions provided at regular intervals is attached to the surface of the heat conduction plate 3, and a bearing 8 is supported by a screw in the center of the heat dissipation fin 7. A rotary fin 10 is pivotally supported by the bearing 8 via a bearing 9.

回転フィン10は、複数の回転翼が軸心に対して対称か
つ放射状にして縦方向に取り付けられている。回転フィ
ン10の材料には、比重の小さいもの、例えば、アルミ
ニウムなどの金属あるいはプラスチックなどの合成樹脂
材を用いることができる。
The rotary fin 10 has a plurality of rotary blades installed symmetrically and radially with respect to the axis in the vertical direction. The rotating fin 10 may be made of a material having a low specific gravity, such as a metal such as aluminum or a synthetic resin material such as plastic.

さらに、回転フィン10の各回転翼は、縦方向に傾斜を
設け(更に、必要に応じて捩じりを持たせ)で取り付け
られ、水平方向から付与される風力からの回転エネルギ
ーを受は易いようにしている。
Furthermore, each rotor blade of the rotary fin 10 is installed with an inclination in the vertical direction (furthermore, with a twist as necessary), so that it is easy to receive rotational energy from wind force applied from the horizontal direction. That's what I do.

以上の構成において、コンピュータなどの装置に配設さ
れた半導体装置に対し、第2図及び第3図に示す如く、
回転によって得られた冷却風が接触するように、ファン
11が筐体に取り付けられている。ファン11の回転に
よって図示のように空気流が生じると、この空気流によ
る風圧によって回転フィン10が回転する。
In the above configuration, as shown in FIGS. 2 and 3, for a semiconductor device installed in a device such as a computer,
A fan 11 is attached to the housing so that cooling air obtained by rotation comes into contact with the fan 11. When the rotation of the fan 11 generates an airflow as shown in the figure, the rotating fins 10 rotate due to the wind pressure caused by this airflow.

回転フィンlOが回転することにより、放熱フィン7か
ら発する熱は上昇し、熱放散が行われる。
As the rotating fins 1O rotate, the heat emitted from the heat radiation fins 7 rises, and heat is dissipated.

これにより、ファン11による水平方向からの熱放散に
加え、垂直方向の熱放散が行われることにより、熱放散
効果が増大する。
Thereby, in addition to the heat dissipation in the horizontal direction by the fan 11, heat dissipation is performed in the vertical direction, thereby increasing the heat dissipation effect.

また、従来は半導体装置より放散した熱は全て水平方向
へ流れ、後方に配設された半導体装置へ冷却風として供
給されていたため、空気流が後方に向かうにつれて温度
が上昇し、冷却効率を低下させていた。しかし、本発明
によれば、熱放散の一部が垂直方向へ分散されるため、
後方に配設された半導体装置へ供給される空気の温度上
昇を低減することができ、冷却効率を向上させることが
できる。
In addition, in the past, all the heat dissipated by semiconductor devices flowed horizontally and was supplied as cooling air to semiconductor devices placed at the rear, so as the airflow moved toward the rear, the temperature rose and the cooling efficiency decreased. I was letting it happen. However, according to the present invention, part of the heat dissipation is distributed in the vertical direction, so that
It is possible to reduce the temperature rise of the air supplied to the semiconductor device disposed at the rear, and it is possible to improve the cooling efficiency.

第4図は第1図の実施例の変形例を示すものである。本
実施例は、第1図の実施例が回転フィン10を水車形と
していたのに対し、シロッコファン12を用いる構成に
したところに特徴がある。
FIG. 4 shows a modification of the embodiment shown in FIG. This embodiment is characterized in that a sirocco fan 12 is used, whereas the rotating fin 10 of the embodiment shown in FIG. 1 is in the form of a water wheel.

この場合のシロッコファン12による熱放散は水平方向
になるが、放熱フィン7による熱空気流を攪乱し、或い
は放熱フィン7上の空気流速を速めるので従来構成に比
べ、熱放散効果を向上せることができる。
In this case, the heat dissipation by the sirocco fan 12 is in the horizontal direction, but it disturbs the hot air flow due to the heat radiation fins 7 or increases the air flow velocity on the heat radiation fins 7, so that the heat dissipation effect is improved compared to the conventional configuration. I can do it.

〔実施例2〕 第5図は本発明の他の実施例を示す断面図である。なお
、本実施例では第1図に用いたものと同一であるものに
は同一引用数字を用いたので、以下においては重複する
説明を省略する。
[Embodiment 2] FIG. 5 is a sectional view showing another embodiment of the present invention. Note that in this embodiment, the same reference numerals are used for the same parts as those used in FIG. 1, and therefore, redundant explanation will be omitted below.

以上の実施例においては、別途設けたファン11によっ
て回転フィン10を回転させるものとしたが、本実施例
は、回転フィン10をモータ13によって直接回転させ
るようにしたものである。
In the embodiments described above, the rotary fins 10 are rotated by the separately provided fan 11, but in this embodiment, the rotary fins 10 are directly rotated by the motor 13.

この構成では、軸受8及びベアリング9が不要となり、
これらに代えてモータ13を配設することになる。そし
て、回転フィン10の保持部が、モータ13の回転軸に
ビス止めなどによって固定される。
In this configuration, the bearing 8 and the bearing 9 are unnecessary,
A motor 13 will be provided in place of these. Then, the holding portion of the rotating fin 10 is fixed to the rotating shaft of the motor 13 with screws or the like.

モータ13は、超小型直流モータを用いることにより、
電圧を変えるのみで容易に回転数を変化させることがで
き、これにより任意の発生風量を得ることができる。
The motor 13 uses an ultra-compact DC motor.
The number of revolutions can be easily changed by simply changing the voltage, thereby making it possible to obtain any amount of generated air.

本実施例は、ファン11を併用することも、モータ13
のみによる冷却も可能である。モータ13のみによる場
合、適用する半導体装置の消費電力(すなわち発熱量)
に応じて回転フィン10のサイズあるいはモータ回転数
を設定することにより対処する。
In this embodiment, the fan 11 can also be used together with the motor 13.
Cooling by chisel is also possible. When using only the motor 13, the power consumption (i.e. heat generation amount) of the applied semiconductor device
This can be dealt with by setting the size of the rotating fin 10 or the rotational speed of the motor accordingly.

また、ファン11を併用する場合には、このファン11
から与えられる風量による熱放散に対し、不足する熱放
散分を回転フィン10によって補うようにすればよい。
In addition, when using the fan 11 together, this fan 11
The rotating fins 10 may be used to compensate for the insufficient heat dissipation due to the air volume given by the rotary fins 10.

第5図の実施例は、ファン形状が横長になることから、
半導体装置の形状が長方形であるものに最適である。
In the embodiment shown in FIG. 5, since the fan shape is horizontally long,
It is most suitable for semiconductor devices having a rectangular shape.

以上、本発明者によってなされた発明を実施例に基づき
具体的に説明したが、本発明は前記実施例に限定される
ものではなく、その要旨を逸脱しない範囲で種々変更可
能であることは言うまでもない。
Above, the invention made by the present inventor has been specifically explained based on Examples, but it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. stomach.

例えば、上記実施例では、半導体装置1が放熱フィン7
を有するものとしたが、熱伝導板3に直接取り付けるよ
うにしてもよい。
For example, in the above embodiment, the semiconductor device 1 has the heat radiation fin 7
However, it may be attached directly to the heat conductive plate 3.

また、回転フィン10が1個の例を示したが、半導体装
置のサイズに応じて複数個を設けることも可能である。
Further, although an example in which the number of rotating fins 10 is one is shown, it is also possible to provide a plurality of rotating fins depending on the size of the semiconductor device.

以上の説明では、主として本発明者によってなされた発
明をその利用分野であるLSIに適用した場合について
説明したが、これに限定されるものではなく、例えば、
他の半導体装置(パワートランジスタ、サイリスク、ダ
イオードなど)や映写ランプなどに適用することもでき
る。
In the above description, the invention made by the present inventor was mainly applied to LSI, which is its field of use, but the invention is not limited to this, for example,
It can also be applied to other semiconductor devices (power transistors, silices, diodes, etc.) and projection lamps.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち、代表的なものによ
って得られる効果を簡単に説明すれば、下記の通りであ
る。
Among the inventions disclosed in this application, the effects obtained by typical ones are as follows.

すなわち、半導体装置の冷却を自然放置以外の冷却手段
によって行う冷却器であって、複数の回転翼を有すると
共に外部から与えられる風圧を受けて回転する回転フィ
ンを前記半導体装置の放熱面に設けるようにしたので、
熱放散効率の向上が可能になる。また、設置スペースの
縮小化、冷却用電動ファン小型化などを図ることが可能
になる。
That is, a cooler that cools a semiconductor device by a cooling means other than leaving it in the air, and has a plurality of rotary blades and a rotating fin that rotates in response to wind pressure applied from the outside is provided on the heat dissipation surface of the semiconductor device. So,
It becomes possible to improve heat dissipation efficiency. Furthermore, it is possible to reduce the installation space and downsize the electric cooling fan.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による半導体装置の冷却器の一実施例を
示す断面図、 第2図は第1図の実施例の使用状態を示す正面図、 第3図は第2図に対する平面図、 第4図は第1図の実施例の変形例を示す断面図、第5図
は本発明の他の実施例を示す断面図である。 1・・・半導体装置、2・・・ベース、3・・・熱伝導
板、4・・・ベレット、5・・・リードビン、6・・・
キャップ、7・・・放熱フィン、8・・・軸受、9・・
・ベアリング、10・・・回転フィン、11・・・ファ
ン、12・・・シロッコファン、13・・・モータ。 代理人  弁理士 小 川 勝 男 第 図 第 図 7:放熱フィン 13:モータ 6:キャップ 11:フ7ン
FIG. 1 is a sectional view showing an embodiment of a cooler for a semiconductor device according to the present invention, FIG. 2 is a front view showing the usage state of the embodiment of FIG. 1, and FIG. 3 is a plan view of FIG. FIG. 4 is a sectional view showing a modification of the embodiment shown in FIG. 1, and FIG. 5 is a sectional view showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Semiconductor device, 2...Base, 3...Heat conductive plate, 4...Bellet, 5...Lead bin, 6...
Cap, 7...Radiation fin, 8...Bearing, 9...
・Bearing, 10...Rotating fin, 11...Fan, 12...Sirocco fan, 13...Motor. Agent: Patent Attorney Masaru Ogawa Figure 7: Radiation fin 13: Motor 6: Cap 11: Fan 7

Claims (1)

【特許請求の範囲】 1、半導体装置の冷却を自然放置以外の冷却手段によっ
て行う冷却器であって、複数の回転翼を有すると共に外
部から与えられる風圧を受けて回転する回転フィンを前
記半導体装置の放熱面に設けたことを特徴とする半導体
装置の冷却器。 2、前記回転フィンは、前記放熱面に固定される軸受と
、該軸受に前記回転翼を回転自在に支承するベアリング
とからなることを特徴とする請求項1記載の半導体装置
の冷却器。 3、半導体装置の冷却を自然放置以外の冷却手段によっ
て行う冷却器であって、前記半導体装置の放熱面に設置
され、或いは放熱面の近傍に配設されるモータと、前記
モータを駆動源として回転する複数の回転翼を備えた回
転フィンとを具備することを特徴とする半導体装置の冷
却器。
[Scope of Claims] 1. A cooler that cools a semiconductor device by a cooling means other than leaving it to stand, the semiconductor device having a plurality of rotary blades and a rotating fin that rotates under wind pressure applied from the outside. A cooler for a semiconductor device, characterized in that the cooler is provided on a heat radiation surface of the semiconductor device. 2. The cooler for a semiconductor device according to claim 1, wherein the rotating fin comprises a bearing fixed to the heat radiation surface and a bearing rotatably supporting the rotor blade on the bearing. 3. A cooler that cools a semiconductor device by a cooling means other than leaving it naturally, which includes a motor installed on or near the heat radiation surface of the semiconductor device, and the motor as a drive source. A cooler for a semiconductor device, comprising: a rotating fin having a plurality of rotating rotor blades.
JP2138189A 1990-05-30 1990-05-30 Semiconductor device cooler Pending JPH0433360A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2138189A JPH0433360A (en) 1990-05-30 1990-05-30 Semiconductor device cooler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2138189A JPH0433360A (en) 1990-05-30 1990-05-30 Semiconductor device cooler

Publications (1)

Publication Number Publication Date
JPH0433360A true JPH0433360A (en) 1992-02-04

Family

ID=15216157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2138189A Pending JPH0433360A (en) 1990-05-30 1990-05-30 Semiconductor device cooler

Country Status (1)

Country Link
JP (1) JPH0433360A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056132A3 (en) * 1992-08-06 2002-01-30 Pfu Limited Heat-generating element cooling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1056132A3 (en) * 1992-08-06 2002-01-30 Pfu Limited Heat-generating element cooling device
EP1056131A3 (en) * 1992-08-06 2002-01-30 Pfu Limited Heat-generating element cooling device

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