JPH04307722A - Method and apparatus for detection of position using grid-shaped mark - Google Patents

Method and apparatus for detection of position using grid-shaped mark

Info

Publication number
JPH04307722A
JPH04307722A JP3099523A JP9952391A JPH04307722A JP H04307722 A JPH04307722 A JP H04307722A JP 3099523 A JP3099523 A JP 3099523A JP 9952391 A JP9952391 A JP 9952391A JP H04307722 A JPH04307722 A JP H04307722A
Authority
JP
Japan
Prior art keywords
mark
grid
shaped mark
shaped
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3099523A
Other languages
Japanese (ja)
Other versions
JP2819855B2 (en
Inventor
Makoto Sato
Masato Muraki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP3099523A priority Critical patent/JP2819855B2/en
Publication of JPH04307722A publication Critical patent/JPH04307722A/en
Application granted granted Critical
Publication of JP2819855B2 publication Critical patent/JP2819855B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a position-detection method and a position-detection apparatus which use a grid-shaped mark which can detect relative positions of both a reference mark and a grid-shaped mark on the face of a wafer with high accuracy from the same mark image even when the reference mark and the grid-shaped mark on the face of the wafer are dislocated relatively by 1/2 or more of the fundamental cycle of a mark image.
CONSTITUTION: A grid-shaped mark GW at a definite pitch is illuminated by using a light flux from a light-source means 2. By using a diffracted beam of light of a prescribed order out of reflected and diffracted beams of light from said grid-shaped mark GW, the image of said grid-shaped mark is formed on a prescribed face where the image of a reference mark GS has been formed. The spatial distribution of the contrast of the image of said grid-shaped mark is detected by using a contrast operation circuit 106; a specific mark in said grid-shaped mark is found; the position of said reference mark and that of the grid-shaped mark are detected by means of a position detection circuit 107 by utilizing said specific mark.
COPYRIGHT: (C)1992,JPO&Japio
JP3099523A 1991-04-04 1991-04-04 Position detecting method and position detecting device using lattice mark Expired - Fee Related JP2819855B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3099523A JP2819855B2 (en) 1991-04-04 1991-04-04 Position detecting method and position detecting device using lattice mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3099523A JP2819855B2 (en) 1991-04-04 1991-04-04 Position detecting method and position detecting device using lattice mark

Publications (2)

Publication Number Publication Date
JPH04307722A true JPH04307722A (en) 1992-10-29
JP2819855B2 JP2819855B2 (en) 1998-11-05

Family

ID=14249597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3099523A Expired - Fee Related JP2819855B2 (en) 1991-04-04 1991-04-04 Position detecting method and position detecting device using lattice mark

Country Status (1)

Country Link
JP (1) JP2819855B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005302970A (en) * 2004-04-09 2005-10-27 Nikon Corp Method for creating recipe, position detector, and misregistration detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005302970A (en) * 2004-04-09 2005-10-27 Nikon Corp Method for creating recipe, position detector, and misregistration detector

Also Published As

Publication number Publication date
JP2819855B2 (en) 1998-11-05

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