JPH04301503A - Detecting apparatus for center of wafer - Google Patents

Detecting apparatus for center of wafer

Info

Publication number
JPH04301503A
JPH04301503A JP9126691A JP9126691A JPH04301503A JP H04301503 A JPH04301503 A JP H04301503A JP 9126691 A JP9126691 A JP 9126691A JP 9126691 A JP9126691 A JP 9126691A JP H04301503 A JPH04301503 A JP H04301503A
Authority
JP
Japan
Prior art keywords
wafer
moving
center
detecting apparatus
calculating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9126691A
Other languages
Japanese (ja)
Other versions
JP2988594B2 (en
Inventor
Naoyuki Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidek Co Ltd
Original Assignee
Nidek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidek Co Ltd filed Critical Nidek Co Ltd
Priority to JP9126691A priority Critical patent/JP2988594B2/en
Publication of JPH04301503A publication Critical patent/JPH04301503A/en
Application granted granted Critical
Publication of JP2988594B2 publication Critical patent/JP2988594B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a detecting apparatus which can detect the position of the center of a wafer accurately by a simple mechanism.
CONSTITUTION: This apparatus is provided with a moving means 2 for moving a wafer 1 in a predetermined direction, light projecting means 3, 4 for illuminating a predetermined position of the moving plane of the wafer 1, at least four photodetecting means 5 arranged at positions of different distances from the moving axis of the moving means, an outer periphery measuring means for obtaining the position of an outer peripheral point of the wafer 1 with the predetermined position as an origin based on the moving data of the wafer 1 and outputs of the photodetecting means, and a calculating means for calculating the center of the wafer from the position of the center peripheral point of the wafer.
COPYRIGHT: (C)1992,JPO&Japio
JP9126691A 1991-03-28 1991-03-28 Wafer center detection device Expired - Fee Related JP2988594B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9126691A JP2988594B2 (en) 1991-03-28 1991-03-28 Wafer center detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9126691A JP2988594B2 (en) 1991-03-28 1991-03-28 Wafer center detection device

Publications (2)

Publication Number Publication Date
JPH04301503A true JPH04301503A (en) 1992-10-26
JP2988594B2 JP2988594B2 (en) 1999-12-13

Family

ID=14021629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9126691A Expired - Fee Related JP2988594B2 (en) 1991-03-28 1991-03-28 Wafer center detection device

Country Status (1)

Country Link
JP (1) JP2988594B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015111483A (en) * 2013-11-11 2015-06-18 三菱電機株式会社 Lens position detection method and device, lens position adjustment method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015111483A (en) * 2013-11-11 2015-06-18 三菱電機株式会社 Lens position detection method and device, lens position adjustment method and device

Also Published As

Publication number Publication date
JP2988594B2 (en) 1999-12-13

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