JPH04274208A - Multichannel laser exposure device - Google Patents

Multichannel laser exposure device

Info

Publication number
JPH04274208A
JPH04274208A JP5942391A JP5942391A JPH04274208A JP H04274208 A JPH04274208 A JP H04274208A JP 5942391 A JP5942391 A JP 5942391A JP 5942391 A JP5942391 A JP 5942391A JP H04274208 A JPH04274208 A JP H04274208A
Authority
JP
Japan
Prior art keywords
exposure surface
laser beams
laser
pitch
exposure device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5942391A
Other languages
Japanese (ja)
Inventor
Masahide Okazaki
Kenji Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP5942391A priority Critical patent/JPH04274208A/en
Publication of JPH04274208A publication Critical patent/JPH04274208A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To accurately and easily adjust the pitch of a plural number of laser beams radiated to an exposure surface and position the beam waist of those laser beams on the exposure surface or on any required plane parallel to the exposure surface.
CONSTITUTION: A plural number of optical blocks 10a and 10b are arranged in succession in an X direction. The relative distance between the optical blocks 10a and 10b is made variable by a drive unit (moving means) to adjust the beam pitch P'. Collector lenses 12a and 12b are arranged respectively on the beam paths of divided laser beams LBa and LBb produced by reflecting a part of the laser beam LB from a laser light source so that the position of beam waist is adjusted independently of each other per divided laser beam.
COPYRIGHT: (C)1992,JPO&Japio
JP5942391A 1991-02-28 1991-02-28 Multichannel laser exposure device Pending JPH04274208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5942391A JPH04274208A (en) 1991-02-28 1991-02-28 Multichannel laser exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5942391A JPH04274208A (en) 1991-02-28 1991-02-28 Multichannel laser exposure device

Publications (1)

Publication Number Publication Date
JPH04274208A true JPH04274208A (en) 1992-09-30

Family

ID=13112843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5942391A Pending JPH04274208A (en) 1991-02-28 1991-02-28 Multichannel laser exposure device

Country Status (1)

Country Link
JP (1) JPH04274208A (en)

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