JPH0426534U - - Google Patents
Info
- Publication number
- JPH0426534U JPH0426534U JP6787690U JP6787690U JPH0426534U JP H0426534 U JPH0426534 U JP H0426534U JP 6787690 U JP6787690 U JP 6787690U JP 6787690 U JP6787690 U JP 6787690U JP H0426534 U JPH0426534 U JP H0426534U
- Authority
- JP
- Japan
- Prior art keywords
- argon
- argon ion
- wafer surface
- wiring film
- aluminum wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 9
- 229910052786 argon Inorganic materials 0.000 claims 7
- -1 argon ion Chemical class 0.000 claims 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6787690U JPH0426534U (cs) | 1990-06-28 | 1990-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6787690U JPH0426534U (cs) | 1990-06-28 | 1990-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426534U true JPH0426534U (cs) | 1992-03-03 |
Family
ID=31601843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6787690U Pending JPH0426534U (cs) | 1990-06-28 | 1990-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426534U (cs) |
-
1990
- 1990-06-28 JP JP6787690U patent/JPH0426534U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0426534U (cs) | ||
| RU94036035A (ru) | Способ профилактики и лечения тромбогеморрагического синдрома (тгс) - синдром мачабели и устройство для его осуществления "лапка мачабели" | |
| JPS63170468U (cs) | ||
| JPH02129660U (cs) | ||
| JPS6169824U (cs) | ||
| JP2505603Y2 (ja) | 舞台のスモ―ク処理装置 | |
| JPH0292658U (cs) | ||
| JPS6367237U (cs) | ||
| JPS5845533U (ja) | 照度分布測定装置 | |
| JPH0273728U (cs) | ||
| JPH0229151U (cs) | ||
| JPH01155251U (cs) | ||
| JPS62136569U (cs) | ||
| JPH0444361U (cs) | ||
| JPS6212943U (cs) | ||
| JPS5242378A (en) | Etching processor | |
| JPH0399762U (cs) | ||
| JPS62188138U (cs) | ||
| JPS6311558U (cs) | ||
| JPH03100352U (cs) | ||
| JPS526460A (en) | Manufacturing method of field emission type negative electrode | |
| JPH0470279U (cs) | ||
| JPH0311055U (cs) | ||
| JPS6319565U (cs) | ||
| JPS5923732U (ja) | 回転式イオン注入装置に於けるウエハ取付装置 |