JPH0426529U - - Google Patents

Info

Publication number
JPH0426529U
JPH0426529U JP6811290U JP6811290U JPH0426529U JP H0426529 U JPH0426529 U JP H0426529U JP 6811290 U JP6811290 U JP 6811290U JP 6811290 U JP6811290 U JP 6811290U JP H0426529 U JPH0426529 U JP H0426529U
Authority
JP
Japan
Prior art keywords
susceptor
nozzle
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6811290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6811290U priority Critical patent/JPH0426529U/ja
Publication of JPH0426529U publication Critical patent/JPH0426529U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6811290U 1990-06-27 1990-06-27 Pending JPH0426529U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6811290U JPH0426529U (US06653308-20031125-C00199.png) 1990-06-27 1990-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6811290U JPH0426529U (US06653308-20031125-C00199.png) 1990-06-27 1990-06-27

Publications (1)

Publication Number Publication Date
JPH0426529U true JPH0426529U (US06653308-20031125-C00199.png) 1992-03-03

Family

ID=31602271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6811290U Pending JPH0426529U (US06653308-20031125-C00199.png) 1990-06-27 1990-06-27

Country Status (1)

Country Link
JP (1) JPH0426529U (US06653308-20031125-C00199.png)

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