JPH0426016U - - Google Patents
Info
- Publication number
- JPH0426016U JPH0426016U JP6828390U JP6828390U JPH0426016U JP H0426016 U JPH0426016 U JP H0426016U JP 6828390 U JP6828390 U JP 6828390U JP 6828390 U JP6828390 U JP 6828390U JP H0426016 U JPH0426016 U JP H0426016U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- refrigerant
- immersed
- thermal conductivity
- good thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Filtering Materials (AREA)
- Drying Of Gases (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426016U true JPH0426016U (US07943777-20110517-C00090.png) | 1992-03-02 |
| JPH0733862Y2 JPH0733862Y2 (ja) | 1995-08-02 |
Family
ID=31602586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990068283U Expired - Lifetime JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733862Y2 (US07943777-20110517-C00090.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002066250A (ja) * | 2000-08-31 | 2002-03-05 | Ulvac Kuraio Kk | ドライエアー製造装置 |
| JP2010012373A (ja) * | 2008-07-01 | 2010-01-21 | Mitsubishi Heavy Ind Ltd | ドレインセパレータ及び冷却・除湿ユニット |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4735941U (US07943777-20110517-C00090.png) * | 1971-05-17 | 1972-12-21 | ||
| JPS5666685U (US07943777-20110517-C00090.png) * | 1979-10-23 | 1981-06-03 | ||
| JPS56108501A (en) * | 1980-01-31 | 1981-08-28 | Ckd Corp | Refrigerator for compressed air |
| JPS58170501A (ja) * | 1982-03-30 | 1983-10-07 | Mitsubishi Electric Corp | 蒸気除去装置 |
| JPS6042330U (ja) * | 1983-09-02 | 1985-03-25 | エスエムシ−株式会社 | 空気除湿機 |
-
1990
- 1990-06-27 JP JP1990068283U patent/JPH0733862Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4735941U (US07943777-20110517-C00090.png) * | 1971-05-17 | 1972-12-21 | ||
| JPS5666685U (US07943777-20110517-C00090.png) * | 1979-10-23 | 1981-06-03 | ||
| JPS56108501A (en) * | 1980-01-31 | 1981-08-28 | Ckd Corp | Refrigerator for compressed air |
| JPS58170501A (ja) * | 1982-03-30 | 1983-10-07 | Mitsubishi Electric Corp | 蒸気除去装置 |
| JPS6042330U (ja) * | 1983-09-02 | 1985-03-25 | エスエムシ−株式会社 | 空気除湿機 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002066250A (ja) * | 2000-08-31 | 2002-03-05 | Ulvac Kuraio Kk | ドライエアー製造装置 |
| JP4584428B2 (ja) * | 2000-08-31 | 2010-11-24 | アルバック・クライオ株式会社 | ドライエアー製造装置 |
| JP2010012373A (ja) * | 2008-07-01 | 2010-01-21 | Mitsubishi Heavy Ind Ltd | ドレインセパレータ及び冷却・除湿ユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733862Y2 (ja) | 1995-08-02 |
