JPH04231853A - Apparatus for inspecting surface flaw - Google Patents

Apparatus for inspecting surface flaw

Info

Publication number
JPH04231853A
JPH04231853A JP13409391A JP13409391A JPH04231853A JP H04231853 A JPH04231853 A JP H04231853A JP 13409391 A JP13409391 A JP 13409391A JP 13409391 A JP13409391 A JP 13409391A JP H04231853 A JPH04231853 A JP H04231853A
Authority
JP
Japan
Prior art keywords
light
inspected
image
luminous intensity
intensity distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13409391A
Other languages
English (en)
Other versions
JP3054227B2 (ja
Inventor
Kazumoto Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mazda Motor Corp
Original Assignee
Mazda Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP17245790 priority Critical
Priority to JP2-172457 priority
Application filed by Mazda Motor Corp filed Critical Mazda Motor Corp
Priority to JP3134093A priority patent/JP3054227B2/ja
Priority claimed from KR1019910011074A external-priority patent/KR920001190A/ko
Priority claimed from US07/723,174 external-priority patent/US5237404A/en
Publication of JPH04231853A publication Critical patent/JPH04231853A/ja
Application granted granted Critical
Publication of JP3054227B2 publication Critical patent/JP3054227B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP3134093A 1990-06-28 1991-06-05 表面欠陥検査装置 Expired - Fee Related JP3054227B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP17245790 1990-06-28
JP2-172457 1990-06-28
JP3134093A JP3054227B2 (ja) 1990-06-28 1991-06-05 表面欠陥検査装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP3134093A JP3054227B2 (ja) 1990-06-28 1991-06-05 表面欠陥検査装置
KR1019910011074A KR920001190A (ko) 1990-06-28 1991-06-28 표면결함 검사장치
US07/723,174 US5237404A (en) 1990-06-28 1991-06-28 Inspection apparatus with improved detection of surface defects over large and curved surfaces
DE4121464A DE4121464A1 (de) 1990-06-28 1991-06-28 Vorrichtung zur feststellung von oberflaechendefekten

Publications (2)

Publication Number Publication Date
JPH04231853A true JPH04231853A (en) 1992-08-20
JP3054227B2 JP3054227B2 (ja) 2000-06-19

Family

ID=26468283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3134093A Expired - Fee Related JP3054227B2 (ja) 1990-06-28 1991-06-05 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JP3054227B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516470A (ja) * 2002-11-19 2006-07-06 マクギール、デニス ロボット塗料/表面被覆除去装置
JP2010243496A (ja) * 2009-04-03 2010-10-28 Carl Zeiss Oim Gmbh 物体の少なくとも部分的に反射する表面を光学的に検査するための方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516470A (ja) * 2002-11-19 2006-07-06 マクギール、デニス ロボット塗料/表面被覆除去装置
JP2010243496A (ja) * 2009-04-03 2010-10-28 Carl Zeiss Oim Gmbh 物体の少なくとも部分的に反射する表面を光学的に検査するための方法および装置

Also Published As

Publication number Publication date
JP3054227B2 (ja) 2000-06-19

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20000313

LAPS Cancellation because of no payment of annual fees