JPH0421815B2 - - Google Patents

Info

Publication number
JPH0421815B2
JPH0421815B2 JP58015658A JP1565883A JPH0421815B2 JP H0421815 B2 JPH0421815 B2 JP H0421815B2 JP 58015658 A JP58015658 A JP 58015658A JP 1565883 A JP1565883 A JP 1565883A JP H0421815 B2 JPH0421815 B2 JP H0421815B2
Authority
JP
Japan
Prior art keywords
ion
sensitive
gate
insulating film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58015658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59142453A (ja
Inventor
Hiromitsu Shiraki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58015658A priority Critical patent/JPS59142453A/ja
Publication of JPS59142453A publication Critical patent/JPS59142453A/ja
Publication of JPH0421815B2 publication Critical patent/JPH0421815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP58015658A 1983-02-02 1983-02-02 イオンセンサ Granted JPS59142453A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58015658A JPS59142453A (ja) 1983-02-02 1983-02-02 イオンセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58015658A JPS59142453A (ja) 1983-02-02 1983-02-02 イオンセンサ

Publications (2)

Publication Number Publication Date
JPS59142453A JPS59142453A (ja) 1984-08-15
JPH0421815B2 true JPH0421815B2 (pm) 1992-04-14

Family

ID=11894828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58015658A Granted JPS59142453A (ja) 1983-02-02 1983-02-02 イオンセンサ

Country Status (1)

Country Link
JP (1) JPS59142453A (pm)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186749A (ja) * 1984-03-05 1985-09-24 Agency Of Ind Science & Technol イオン選択性電界効果トランジスタ
JPH03127252U (pm) * 1990-04-02 1991-12-20
JP2006242900A (ja) * 2005-03-07 2006-09-14 Mitsubishi Chemicals Corp センサユニット及び反応場セルユニット並びに分析装置
WO2006134942A1 (ja) 2005-06-14 2006-12-21 Mitsumi Electric Co., Ltd. 電界効果トランジスタ、それを具備するバイオセンサ、および検出方法

Also Published As

Publication number Publication date
JPS59142453A (ja) 1984-08-15

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