JPH04216914A - Replica and manufacture of stamper - Google Patents
Replica and manufacture of stamperInfo
- Publication number
- JPH04216914A JPH04216914A JP2411302A JP41130290A JPH04216914A JP H04216914 A JPH04216914 A JP H04216914A JP 2411302 A JP2411302 A JP 2411302A JP 41130290 A JP41130290 A JP 41130290A JP H04216914 A JPH04216914 A JP H04216914A
- Authority
- JP
- Japan
- Prior art keywords
- replica
- resin
- mold
- original mold
- elastic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000011347 resin Substances 0.000 claims abstract description 54
- 229920005989 resin Polymers 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 229920001296 polysiloxane Polymers 0.000 claims description 8
- 238000003892 spreading Methods 0.000 claims description 4
- 238000001125 extrusion Methods 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000000465 moulding Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 238000005323 electroforming Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明はフォトポリマー（以下２
Ｐと称す）樹脂を用いてオリジナル型のレプリカを作成
する２Ｐレプリカの製造方法に関し、またこの２Ｐレプ
リカ上に金属層が設けられたスタンパの製造方法に関す
る。[Industrial Application Field] The present invention relates to a photopolymer (hereinafter referred to as 2)
The present invention relates to a method for manufacturing a 2P replica in which a replica of an original type is created using a resin (referred to as P), and a method for manufacturing a stamper in which a metal layer is provided on the 2P replica.
【０００２】0002
【従来の技術】従来、光記録媒体用基板の製造方法とし
て、所望のパターンが形成されたオリジナル型から２Ｐ
樹脂を用いて２Ｐレプリカと呼ばれるオリジナル型の複
製（パターンは反転する）をとり、２Ｐレプリカのパタ
ーン上に電鋳によりニッケル等の層を設けてスタンパ原
盤とし、このスタンパ原盤を用いてコンプレッション法
、２Ｐ成形法、押し出し成形法などの成形法により、光
記録媒体用基板を作成するという方法が利用されている
。[Prior Art] Conventionally, as a manufacturing method for a substrate for an optical recording medium, a 2P
A replica of the original mold called a 2P replica (the pattern is reversed) is made using resin, and a layer of nickel or the like is applied by electroforming on the pattern of the 2P replica to form a stamper master. Using this stamper master, compression method, BACKGROUND ART A method of creating an optical recording medium substrate by a molding method such as a 2P molding method or an extrusion molding method is used.
【０００３】２Ｐレプリカを製造するには、例えば図５
に示すように、まず表面に光記録媒体用基板と反対の凹
凸を持つオリジナル型１を固定板２に固定し、オリジナ
ル型１上に所定量の２Ｐ樹脂４を配する。その上にガラ
スや樹脂からなる基板３を重ね合わせ、２Ｐ樹脂をオリ
ジナル型と基板の間の全面にのばし、基板側から紫外線
を照射して２Ｐ樹脂を硬化させる。その後硬化した樹脂
を基板と共にオリジナル型から剥離することにより２Ｐ
レプリカ５を作成する。[0003] In order to manufacture a 2P replica, for example, as shown in FIG.
As shown in FIG. 1, first, an original mold 1 having a surface with unevenness opposite to that of the optical recording medium substrate is fixed to a fixing plate 2, and a predetermined amount of 2P resin 4 is placed on the original mold 1. A substrate 3 made of glass or resin is placed on top of it, 2P resin is spread over the entire surface between the original mold and the substrate, and ultraviolet rays are irradiated from the substrate side to harden the 2P resin. After that, the cured resin is peeled off from the original mold along with the substrate to create a 2P
Create replica 5.
【０００４】0004
【発明が解決しようとする課題】しかしながら上記のよ
うに得られる２Ｐレプリカでは、図５（ｃ）に示される
ように外縁部に樹脂の突起が形成されてしまい、この部
分が欠けてゴミとなり、後の工程においてこのゴミが２
Ｐレプリカのパターン部に付着してとれなくなってしま
ったり、オリジナル型の端部に付着してオリジナル型の
突起となってしまうという問題があった。However, in the 2P replica obtained as described above, resin protrusions are formed on the outer edge as shown in FIG. 5(c), and this portion is chipped and becomes dust. In the later process, this garbage is
There was a problem that it adhered to the pattern part of the P replica and could not be removed, or it adhered to the edge of the original mold and became a protrusion of the original mold.
【０００５】このような問題を解決するためには、オリ
ジナル型及び基板端部に２Ｐ樹脂の剥離を容易にする剥
離剤を塗布したり、マスキング剤を利用して樹脂を硬化
させバリとなった樹脂を剥しとることが考えられるが、
剥されたバリは２Ｐレプリカやオリジナル型の型面に付
着し、欠陥となる可能性があり、やはり好ましくない。[0005] In order to solve these problems, it was necessary to apply a release agent to the original mold and the edge of the board to make it easier to peel off the 2P resin, or to use a masking agent to harden the resin and create burrs. It is possible to remove the resin, but
The peeled off burr may adhere to the mold surface of the 2P replica or original mold and cause defects, which is also undesirable.
【０００６】本発明は上記問題点を解決し、２Ｐ樹脂の
はみ出しによるバリの発生を抑え、２Ｐレプリカを良好
に製造できる方法を提供し、高品質なスタンパを提供す
ることを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems, to provide a method for producing a 2P replica in a good manner by suppressing the occurrence of burrs due to the protrusion of the 2P resin, and to provide a high-quality stamper.
【０００７】[0007]
【課題を解決するための手段】本発明は、オリジナル型
のパターンを有する型面上にフォトポリマー樹脂を配す
る工程、該型面に基板を重ねて該型面にフォトポリマー
樹脂を広げる工程、フォトポリマー樹脂を硬化させる工
程、及び硬化したフォトポリマー樹脂と基板とを一体的
にオリジナル型から剥離する工程を有するオリジナル型
のレプリカを得るレプリカの製造方法であって、オリジ
ナル型の外周に、該型面と連続しかつ該型面と同一面を
形成する面を有するように離型性弾性部材を配する工程
を、前記フォトポリマー樹脂を配する工程の前に有する
ことを特徴とするレプリカの製造方法である。[Means for Solving the Problems] The present invention includes a step of disposing a photopolymer resin on a mold surface having an original mold pattern, a step of stacking a substrate on the mold surface and spreading the photopolymer resin on the mold surface, A replica manufacturing method for obtaining a replica of an original mold, comprising a step of curing a photopolymer resin and a step of integrally peeling the hardened photopolymer resin and a substrate from the original mold, the method comprising: A replica characterized in that, before the step of disposing the photopolymer resin, a step of disposing a releasable elastic member so as to have a surface continuous with the mold surface and forming the same surface as the mold surface is provided. This is the manufacturing method.
【０００８】また本発明は上記のようにして得たレプリ
カのパターン面に金属層を設けるスタンパの製造方法で
ある。The present invention also provides a method for manufacturing a stamper, in which a metal layer is provided on the patterned surface of the replica obtained as described above.
【０００９】離型性弾性部材としては、硬化後の２Ｐ樹
脂と該部材との離型性を有するものを用いることができ
る。硬化した２Ｐ樹脂はオリジナル型外周に形成された
離型性弾性部材と離型する。[0009] As the releasable elastic member, one that has releasability between the 2P resin and the member after curing can be used. The cured 2P resin is released from the release elastic member formed around the outer periphery of the original mold.
【００１０】オリジナル型とレプリカとを剥離するため
に、剥離しようとする方向に基板に対して弾性部材を介
して力を加えるが、この際弾性部材は変形する。この変
形時に破壊せず、力を除いたときに元の形に戻ることが
できるように、離型性弾性部材は１０ｋｇｆ／ｃｍ以上
の引き裂き強度を有することが好ましい。引き裂き強度
が高いと剥離時に離型性弾性部材を破壊することがなく
、該部材を繰り返し使用できるので好ましい。[0010] In order to separate the original mold from the replica, force is applied to the substrate through the elastic member in the direction of separation, but at this time the elastic member is deformed. The releasable elastic member preferably has a tear strength of 10 kgf/cm or more so that it does not break during this deformation and can return to its original shape when the force is removed. A high tear strength is preferable because the releasable elastic member will not be destroyed during peeling and the member can be used repeatedly.
【００１１】離型性弾性部材としては例えばゴムコンパ
ウンドを特に制限なく使用できる。なかでもシリコーン
ＲＴＶゴムは離型性弾性部材として好ましい。なぜなら
ばシリコーンＲＴＶゴムは容易に成形加工でき、２Ｐ樹
脂との離型性に優れ、また引き裂き強度も十分（２０〜
２５ｋｇｆ／ｃｍ程度）であるからである。[0011] As the releasable elastic member, for example, a rubber compound can be used without any particular restriction. Among these, silicone RTV rubber is preferable as the releasable elastic member. This is because silicone RTV rubber can be easily molded, has excellent mold releasability from 2P resin, and has sufficient tear strength (20~
25 kgf/cm).
【００１２】オリジナル型の外周に離型性弾性部材を配
する方法としては、特に制限はないが、例えばオリジナ
ル型の周囲に囲みを作り、その中に該部材を流し込んで
硬化させ、オリジナル型に該部材を密着させて成形すれ
ば良い。[0012] There are no particular restrictions on the method of disposing the releasable elastic member around the outer periphery of the original mold. The members may be molded in close contact with each other.
【００１３】本発明で用いるオリジナル型、２Ｐ樹脂や
基板には従来から２Ｐレプリカの製造に用いられている
ものを特に制限なく用いることができる。また２Ｐ樹脂
をオリジナル型のパターンを有する面上に配し、のばし
広げる方法や樹脂を硬化させる方法についても特に制限
なく公知の技術を適用できる。[0013] As the original mold, 2P resin, and substrate used in the present invention, those conventionally used for manufacturing 2P replicas can be used without particular restriction. Also, known techniques can be applied without any particular restrictions regarding the method of disposing the 2P resin on the surface having the original pattern, spreading it out, and curing the resin.
【００１４】このようにして得た２Ｐレプリカからスタ
ンパを得るには公知の方法を適宜採用すれば良い。例え
ばレプリカの表面に導電化膜を形成し、その上に電鋳法
により金属膜を形成し、研磨した後、導電化膜及び金属
膜を一体としてレプリカから剥離すればスタンパーを製
造できる。導電化膜は真空中での金属の蒸着やスパッタ
リング等で成膜出来る。この金属としては例えば銀やニ
ッケルが用いられる。より詳しい例を挙げれば、レプリ
カのトラッキング用溝や情報用ピット等の凹凸パターン
の上に、スパッタリングによりニッケル膜を５００〜１
０００オングストローム成膜し、このレプリカをホルダ
ーで保持して２０〜３０ｒｐｍで回転させながらスルフ
ァミン酸ニッケル電鋳液中で通電して導電化膜上にニッ
ケル金属を析出させ、その後２Ｐレプリカからニッケル
金属層を剥離すればスタンパが得られる。[0014] In order to obtain a stamper from the 2P replica thus obtained, any known method may be adopted as appropriate. For example, a stamper can be manufactured by forming a conductive film on the surface of a replica, forming a metal film thereon by electroforming, polishing, and then peeling the conductive film and metal film together from the replica. The conductive film can be formed by metal vapor deposition or sputtering in a vacuum. For example, silver or nickel is used as this metal. To give a more detailed example, a nickel film of 500 to 100% is deposited by sputtering on the uneven patterns such as tracking grooves and information pits of the replica.
000 angstrom film is formed, and this replica is held in a holder and rotated at 20 to 30 rpm while electricity is applied in a nickel sulfamate electroforming solution to deposit nickel metal on the conductive film, and then a nickel metal layer is formed from the 2P replica. A stamper can be obtained by peeling off the stamper.
【００１５】本発明によれば表面にバリや突起のない２
Ｐレプリカを製造でき、従って高品質なスタンパを得る
ことができる。その結果このスタンパで成形して製造し
た光記録媒体等の製品も高品質なものとなる。According to the present invention, there is no burr or protrusion on the surface 2
P replicas can be manufactured, and therefore a high quality stamper can be obtained. As a result, products such as optical recording media produced by molding with this stamper also have high quality.
【００１６】図１を参照して本発明の一態様について説
明する。One embodiment of the present invention will be explained with reference to FIG.
【００１７】図１（ａ）に示すように、型面成形枠８に
、固定板２で補強されたオリジナル型１を、その型面１
１が図中下になるようにして設置する。オリジナル型の
型面と型面成形枠８の内面とは当接するようにする。
またこのとき固定板を図中上から押さえることによりオ
リジナル型を固定してもよい。As shown in FIG. 1(a), the original mold 1 reinforced with the fixing plate 2 is placed in the mold surface forming frame 8.
Install it so that 1 is at the bottom in the diagram. The mold surface of the original mold and the inner surface of the mold surface forming frame 8 are brought into contact with each other. Further, at this time, the original mold may be fixed by pressing the fixing plate from above in the figure.
【００１８】次にオリジナル型と型面成形枠との間に離
型性弾性部材６をシリンジ等により注入し、成形補助板
７を設置した後、離型性弾性部材を硬化させる。そして
成形補助板、型面成形枠、及び余分な離型性弾性部材を
取り去ると、図１（ｂ）に示すような、オリジナル型の
外周に型面１１と連続しかつ型面１１と同一面を形成す
る面１２を有する離型性弾性部材を成形できる。Next, a releasable elastic member 6 is injected between the original mold and the mold surface molding frame using a syringe or the like, and after a molding auxiliary plate 7 is installed, the releasable elastic member is hardened. Then, when the molding auxiliary plate, the mold surface molding frame, and the excess mold releasable elastic member are removed, the outer periphery of the original mold is continuous with and flush with the mold surface 11, as shown in FIG. 1(b). It is possible to mold a releasable elastic member having a surface 12 that forms a mold.
【００１９】このオリジナル型面１１上に２Ｐ樹脂を適
量載せ、図２に示すように、その上に基板３を重ね合わ
せてオリジナル型全面に２Ｐ樹脂を広げる。このとき基
板端部から樹脂が多量にはみ出す場合にはそれを拭き取
っても良いが、樹脂量を適正な量にしておくことにより
、過剰な樹脂のはみ出しを防ぐことができる。An appropriate amount of 2P resin is placed on the original mold surface 11, and as shown in FIG. 2, the substrate 3 is placed on top of it, and the 2P resin is spread over the entire surface of the original mold. If a large amount of resin protrudes from the edge of the substrate at this time, it may be wiped off, but by keeping the amount of resin at an appropriate level, excessive protrusion of resin can be prevented.
【００２０】このとき少なくとも一部においてオリジナ
ル型１の外縁より基板３の外縁が外にあるようにすると
よい。その部分で基板とオリジナル型とを容易に剥離で
きる。またこの部分のうちの少なくとも一部において基
板３の外縁より離型性弾性部材６の面１２の外縁が外に
あるようにしておくと剥離をより容易に行うことが出来
て好ましい。基板と離型性弾性樹脂との重なりは特に制
限はなく剥離が容易に行い得る程度にすれば良く、例え
ば幅５ｍｍ以上２０ｍｍ以下程度とすれば良い。At this time, it is preferable that the outer edge of the substrate 3 is located outside the outer edge of the original mold 1 at least in part. The substrate and the original mold can be easily separated at that part. Further, it is preferable that the outer edge of the surface 12 of the releasable elastic member 6 is located outside the outer edge of the substrate 3 in at least a part of this portion, since this allows easier peeling. The overlap between the substrate and the releasable elastic resin is not particularly limited, and may be set to such an extent that peeling can be easily performed, for example, the width may be approximately 5 mm or more and 20 mm or less.
【００２１】次に基板側から紫外光１０を照射して２Ｐ
樹脂を硬化させ、オリジナル型と基板を剥離して、２Ｐ
レプリカ５を得る。剥離の際には例えば図３に示すよう
な剥離治具９を２Ｐレプリカ５と離型性弾性体の間に挿
入し固定板２をテコの支点にして剥離治具の爪部分を上
に持ち上げ、２Ｐレプリカとオリジナル型とを機械的に
剥離すると簡便で好ましい。Next, 2P is irradiated with ultraviolet light 10 from the substrate side.
Let the resin harden, peel off the original mold and the board, and create 2P
Obtain Replica 5. When peeling, for example, insert a peeling jig 9 as shown in FIG. It is convenient and preferable to mechanically separate the 2P replica from the original mold.
【００２２】[0022]
【実施例】実施例１
５インチ（１２７ｍｍ）角、厚さ５ｍｍのオリジナル型
を、６インチ（１５２．４ｍｍ）角、厚さ１０ｍｍ、ガ
ラス製の固定板で補強し、オリジナル型外周にシリコー
ンＲＴＶゴム（東芝シリコーン株式会社製、ＴＳＥ−３
４５３）を配して成形し、常温、２４時間で硬化させた
。次にオリジナル型面上に２Ｐ樹脂（日本化薬社製、Ｉ
ＮＣ１１８）をディスペンスし、ガラスの基板を重ねて
樹脂をスプレッドした後紫外光により硬化させ、図３に
示した剥離治具でオリジナル型とパターンが転写された
２Ｐ樹脂層を有する基板とを剥離して、２Ｐレプリカを
得た。[Example] Example 1 A 5 inch (127 mm) square, 5 mm thick original mold is reinforced with a 6 inch (152.4 mm) square, 10 mm thick glass fixing plate, and a silicone RTV is placed around the outer periphery of the original mold. Rubber (manufactured by Toshiba Silicone Corporation, TSE-3
453), and was molded and cured at room temperature for 24 hours. Next, 2P resin (manufactured by Nippon Kayaku Co., Ltd., I
After dispensing NC118) and stacking glass substrates and spreading the resin, it was cured with ultraviolet light, and the original mold and the substrate with the 2P resin layer with the pattern transferred were peeled off using the peeling jig shown in Figure 3. A 2P replica was obtained.
【００２３】剥離は容易に行うことができ、また２Ｐ樹
脂のはみ出しや突起などのバリはなく、２Ｐレプリカも
オリジナル型も良好な状態が保たれていた。Peeling was easy, and there were no burrs such as protrusion or protrusions of the 2P resin, and both the 2P replica and the original mold were maintained in good condition.
【００２４】実施例２
５インチ（１２７ｍｍ）角、厚さ５ｍｍのオリジナル型
に、６インチ（１５２．４ｍｍ）角、厚さ１０ｍｍ、ガ
ラスの固定板を、ＵＶ接着剤（東芝シリコーン株式会社
製、ＸＥ１７−３０５３）で接着して補強した。このオ
リジナル型外周にシリコーンＲＴＶゴム（東芝シリコー
ン株式会社製、ＴＳＥ−３４５３）を配して図４（ａ）
のように成形し、常温、２４時間で硬化させた。次にオ
リジナル型面上に２Ｐ樹脂（日本化薬社製、ＩＮＣ１１
８）を０．５ｇディスペンスし、５．５インチ（１３９
．７ｍｍ）のガラスの基板を重ねて樹脂をスプレッドし
、１６０Ｗの紫外光を５秒間照射して硬化させ、Ｌ型剥
離治具９で、オリジナル型と、パターンが転写された２
Ｐ樹脂層を有する基板とを図４（ｂ）に示したように剥
離して、２Ｐレプリカを得た。剥離は容易に行うことが
でき、また２Ｐ樹脂のはみ出しや突起などのバリはなく
、２Ｐレプリカもオリジナル型も良好な状態が保たれて
いた。Example 2 A 6 inch (152.4 mm) square, 10 mm thick glass fixing plate was attached to an original mold of 5 inch (127 mm) square and 5 mm thick using UV adhesive (manufactured by Toshiba Silicone Corporation). XE17-3053) was bonded and reinforced. Silicone RTV rubber (manufactured by Toshiba Silicone Corporation, TSE-3453) was placed around the outer periphery of this original mold, as shown in Figure 4(a).
It was molded as follows and cured at room temperature for 24 hours. Next, apply 2P resin (Nippon Kayaku Co., Ltd., INC11) on the original mold surface.
Dispense 0.5g of 8) to 5.5 inches (139
．． 7mm) glass substrates were stacked and the resin was spread, and the resin was cured by irradiating it with 160W ultraviolet light for 5 seconds.Then, the original mold and the pattern-transferred 2.
The substrate having the P resin layer was peeled off as shown in FIG. 4(b) to obtain a 2P replica. Peeling was easy, and there were no burrs such as protrusion or protrusions of the 2P resin, and both the 2P replica and the original model remained in good condition.
【００２５】ここでは、離型性弾性部材の一部に、Ｌ型
剥離治具を挿入できるスペースを予め作っておき、そこ
にＬ型剥離治具を挿入して、テコの要領で基板を持ち上
げることができ、剥離時に２Ｐ樹脂面に治具９が直接接
触しないため、２Ｐ樹脂面を傷つける虞が全くないので
好ましい。[0025] Here, a space into which an L-shaped peeling jig can be inserted is created in advance in a part of the releasable elastic member, and the L-shaped peeling jig is inserted there and the substrate is lifted up like a lever. Since the jig 9 does not come into direct contact with the 2P resin surface during peeling, there is no risk of damaging the 2P resin surface, which is preferable.
【００２６】[0026]
【発明の効果】本発明のようにオリジナル型外周に離型
性弾性部材を配することにより、次のような効果が得ら
れる。１．２Ｐ樹脂のはみ出しによる突起やバリの発生
を防ぐことができる。２．離型性弾性部材を介して機械
的な方法により２Ｐレプリカとオリジナル型を剥離する
ことができ、剥離時に発生する欠陥を少なくすることが
できる。３．２Ｐレプリカとオリジナル型との剥離性が
良好になり、小さな力で剥離することが可能である。こ
れはバリがないために剥離が容易になるためであり、ま
た剥離面の２Ｐ樹脂の一部が剥離作業前にすでに剥がれ
ているためと考えられる。Effects of the Invention By arranging the releasable elastic member around the outer periphery of the original mold as in the present invention, the following effects can be obtained. 1.It is possible to prevent the occurrence of protrusions and burrs due to the protrusion of the 2P resin. 2. The 2P replica and the original mold can be separated by a mechanical method via the releasable elastic member, and defects that occur during separation can be reduced. 3. The peelability between the 2P replica and the original mold is improved, and it is possible to peel them off with a small force. This is thought to be because the absence of burrs makes peeling easier, and also because a portion of the 2P resin on the peeling surface has already peeled off before the peeling operation.
【図１】本発明の離型性弾性部材を形成する工程の例を
説明するための模式図である。FIG. 1 is a schematic diagram for explaining an example of a step of forming a releasable elastic member of the present invention.
【図２】本発明の２Ｐ成形工程の例を説明するための模
式図である。FIG. 2 is a schematic diagram for explaining an example of the 2P molding process of the present invention.
【図３】本発明の剥離工程の例を説明するための模式図
である。FIG. 3 is a schematic diagram for explaining an example of a peeling process of the present invention.
【図４】本発明の剥離工程の例を説明するための模式図
である。FIG. 4 is a schematic diagram for explaining an example of a peeling process of the present invention.
【図５】従来の２Ｐレプリカの製造方法を説明するため
の模式図である。FIG. 5 is a schematic diagram for explaining a conventional 2P replica manufacturing method.
１ オリジナル型 ２ 固定板 ３ 基板 ４ ２Ｐ樹脂 ５ ２Ｐレプリカ ６ 離型性弾性部材 ７ 成形補助板 ８ 型面成形枠 ９ 剥離治具 １０ 紫外光 １１ 型面 1 Original type 2 Fixed plate 3 Board 4 2P resin 5 2P replica 6 Releaseable elastic member 7 Molding auxiliary plate 8 Mold surface forming frame 9 Peeling jig 10 Ultraviolet light 11 Mold surface
Claims (4)
上にフォトポリマー樹脂を配する工程、該型面に基板を
重ねて該型面にフォトポリマー樹脂を広げる工程、フォ
トポリマー樹脂を硬化させる工程、及び硬化したフォト
ポリマー樹脂と基板とを一体的にオリジナル型から剥離
する工程を有するオリジナル型のレプリカを得るレプリ
カの製造方法であって、オリジナル型の外周に、該型面
と連続しかつ該型面と同一面を形成する面を有するよう
に離型性弾性部材を配する工程を、前記フォトポリマー
樹脂を配する工程の前に有することを特徴とするレプリ
カの製造方法。1. A step of disposing a photopolymer resin on a mold surface having an original mold pattern, a step of stacking a substrate on the mold surface and spreading the photopolymer resin on the mold surface, a step of curing the photopolymer resin, and a method of manufacturing a replica for obtaining a replica of an original mold, which comprises the steps of integrally peeling the cured photopolymer resin and the substrate from the original mold, the method comprising the steps of: A method for manufacturing a replica, comprising a step of arranging a releasable elastic member so as to have a surface that is flush with the surface, before the step of arranging the photopolymer resin.
度が１０ｋｇｆ／ｃｍ以上のシリコーンＲＴＶゴムを用
いる請求項１の方法。2. The method according to claim 1, wherein silicone RTV rubber having a tear strength of 10 kgf/cm or more is used as the releasable elastic member.
具を差し込むためのスペースを設け、このスペースに剥
離治具を差し込んでレプリカを機械的に剥離する請求項
１の方法。3. The method according to claim 1, wherein a space for inserting a peeling jig is provided on the outer periphery of the releasable elastic member, and the replica is mechanically peeled off by inserting the peeling jig into the space.
ーンを有する面に金属層を設けてスタンパ原盤を得るス
タンパの製造方法。4. A method for manufacturing a stamper, comprising providing a metal layer on the patterned surface of the replica obtained according to claim 1 to obtain a stamper master.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2411302A JPH04216914A (en) | 1990-12-18 | 1990-12-18 | Replica and manufacture of stamper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2411302A JPH04216914A (en) | 1990-12-18 | 1990-12-18 | Replica and manufacture of stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04216914A true JPH04216914A (en) | 1992-08-07 |
Family
ID=18520320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2411302A Pending JPH04216914A (en) | 1990-12-18 | 1990-12-18 | Replica and manufacture of stamper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04216914A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003096331A1 (en) * | 2002-05-09 | 2003-11-20 | Tdk Corporation | Method and device for separating stamper, and multi-layered recording medium |
| WO2003096333A1 (en) * | 2002-05-09 | 2003-11-20 | Tdk Corporation | Multi-layer recording medium forming method and device, and multi-layer recording medium |
| JP2015104481A (en) * | 2013-11-29 | 2015-06-08 | 凸版印刷株式会社 | Method and apparatus for manufacturing needle-like body |
| JP2019519108A (en) * | 2016-07-08 | 2019-07-04 | ギガレーン カンパニー リミテッドＧｉｇａｌａｎｅ Ｃｏ．， Ｌｔｄ． | Replica mold for nanoimprint, method for manufacturing the same, and replica mold manufacturing apparatus for nanoimprint |
-
1990
- 1990-12-18 JP JP2411302A patent/JPH04216914A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003096331A1 (en) * | 2002-05-09 | 2003-11-20 | Tdk Corporation | Method and device for separating stamper, and multi-layered recording medium |
| WO2003096333A1 (en) * | 2002-05-09 | 2003-11-20 | Tdk Corporation | Multi-layer recording medium forming method and device, and multi-layer recording medium |
| CN1317703C (en) * | 2002-05-09 | 2007-05-23 | Tdk株式会社 | Method and device for separating stamper, and multi-layered recording medium |
| JP2015104481A (en) * | 2013-11-29 | 2015-06-08 | 凸版印刷株式会社 | Method and apparatus for manufacturing needle-like body |
| JP2019519108A (en) * | 2016-07-08 | 2019-07-04 | ギガレーン カンパニー リミテッドＧｉｇａｌａｎｅ Ｃｏ．， Ｌｔｄ． | Replica mold for nanoimprint, method for manufacturing the same, and replica mold manufacturing apparatus for nanoimprint |
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