JPH0420229U - - Google Patents

Info

Publication number
JPH0420229U
JPH0420229U JP6205190U JP6205190U JPH0420229U JP H0420229 U JPH0420229 U JP H0420229U JP 6205190 U JP6205190 U JP 6205190U JP 6205190 U JP6205190 U JP 6205190U JP H0420229 U JPH0420229 U JP H0420229U
Authority
JP
Japan
Prior art keywords
lid
cleaning device
processing tank
tank
blocking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6205190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6205190U priority Critical patent/JPH0420229U/ja
Publication of JPH0420229U publication Critical patent/JPH0420229U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP6205190U 1990-06-12 1990-06-12 Pending JPH0420229U (US06649357-20031118-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6205190U JPH0420229U (US06649357-20031118-C00005.png) 1990-06-12 1990-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6205190U JPH0420229U (US06649357-20031118-C00005.png) 1990-06-12 1990-06-12

Publications (1)

Publication Number Publication Date
JPH0420229U true JPH0420229U (US06649357-20031118-C00005.png) 1992-02-20

Family

ID=31590851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6205190U Pending JPH0420229U (US06649357-20031118-C00005.png) 1990-06-12 1990-06-12

Country Status (1)

Country Link
JP (1) JPH0420229U (US06649357-20031118-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100344092B1 (ko) * 1998-12-29 2002-11-23 주식회사 에스아이테크 반도체 장비의 덮개 구조

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100344092B1 (ko) * 1998-12-29 2002-11-23 주식회사 에스아이테크 반도체 장비의 덮개 구조

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