JPH0419674U - - Google Patents

Info

Publication number
JPH0419674U
JPH0419674U JP6095790U JP6095790U JPH0419674U JP H0419674 U JPH0419674 U JP H0419674U JP 6095790 U JP6095790 U JP 6095790U JP 6095790 U JP6095790 U JP 6095790U JP H0419674 U JPH0419674 U JP H0419674U
Authority
JP
Japan
Prior art keywords
valve
discharge
discharge valve
holder
valve holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6095790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6095790U priority Critical patent/JPH0419674U/ja
Publication of JPH0419674U publication Critical patent/JPH0419674U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Check Valves (AREA)
JP6095790U 1990-06-08 1990-06-08 Pending JPH0419674U (US07202987-20070410-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6095790U JPH0419674U (US07202987-20070410-C00007.png) 1990-06-08 1990-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6095790U JPH0419674U (US07202987-20070410-C00007.png) 1990-06-08 1990-06-08

Publications (1)

Publication Number Publication Date
JPH0419674U true JPH0419674U (US07202987-20070410-C00007.png) 1992-02-19

Family

ID=31588782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6095790U Pending JPH0419674U (US07202987-20070410-C00007.png) 1990-06-08 1990-06-08

Country Status (1)

Country Link
JP (1) JPH0419674U (US07202987-20070410-C00007.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007321986A (ja) * 2000-09-14 2007-12-13 Research Triangle Inst マイクロ電気機械システムバルブ及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007321986A (ja) * 2000-09-14 2007-12-13 Research Triangle Inst マイクロ電気機械システムバルブ及びその製造方法
JP4704398B2 (ja) * 2000-09-14 2011-06-15 リサーチ・トライアングル・インスティチュート マイクロ電気機械システムバルブ及びその製造方法

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