JPH04194637A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH04194637A JPH04194637A JP2322280A JP32228090A JPH04194637A JP H04194637 A JPH04194637 A JP H04194637A JP 2322280 A JP2322280 A JP 2322280A JP 32228090 A JP32228090 A JP 32228090A JP H04194637 A JPH04194637 A JP H04194637A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure sensor
- case
- sensing part
- nipple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000002445 nipple Anatomy 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 claims description 15
- 239000012530 fluid Substances 0.000 claims description 8
- 238000002485 combustion reaction Methods 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000009835 boiling Methods 0.000 abstract description 4
- 239000003921 oil Substances 0.000 abstract 3
- 230000000630 rising effect Effects 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 7
- 229920002545 silicone oil Polymers 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005219 brazing Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧力検知部とダイアフラムとの間に圧力伝
達液が封入された圧力センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pressure sensor in which a pressure transmitting liquid is sealed between a pressure sensing portion and a diaphragm.
第２図は従来エンジンの燃焼室内の圧力を検出するため
に用いられた圧力センサの一例を示す縦断面図であり、
１はエンジンに取り付けられたステンレス製のケース、
２はケース１の下端部に設けられた金属製のダイアフラ
ム、３はケース１内に設けられた絶縁材からなるベース
、４はケース１にろう付溶接で溶着されたセラミ・ツク
製の台座、５は台座４に接着されたシリコン製の半導体
ストレンゲージからなる圧力検知部で、二の圧力検知部
５とダイアフラム２との間には圧力伝達液として高沸点
のシリコンオイル１０が封入されている。FIG. 2 is a longitudinal sectional view showing an example of a pressure sensor conventionally used to detect the pressure inside the combustion chamber of an engine.
1 is a stainless steel case attached to the engine,
2 is a metal diaphragm provided at the lower end of the case 1; 3 is a base made of an insulating material provided inside the case 1; 4 is a ceramic pedestal welded to the case 1 by brazing; Reference numeral 5 denotes a pressure detection section consisting of a silicon semiconductor strain gauge bonded to a pedestal 4, and high boiling point silicone oil 10 is sealed between the second pressure detection section 5 and the diaphragm 2 as a pressure transmission fluid. .
６はベース３に取り付けられた端子、７は端子６と圧力
検知部５とを接続するボンディングワイヤ、８はケース
１に嵌着されたプラグ、９はプラグ８を貫通して端子６
と接続された出力線である。6 is a terminal attached to the base 3, 7 is a bonding wire that connects the terminal 6 and the pressure sensing part 5, 8 is a plug fitted to the case 1, and 9 is a wire that passes through the plug 8 to connect the terminal 6.
This is the output line connected to.
上記のように構成された圧力センサにおいては、燃焼室
内の圧力上昇によりダイアフラム２が変形し、その変形
に伴いシリコンオイル１０内の圧力が上昇し、その上昇
圧力を圧力検知部５が検知する。In the pressure sensor configured as described above, the diaphragm 2 deforms due to the rise in pressure within the combustion chamber, and the pressure within the silicone oil 10 rises with the deformation, and the pressure detection section 5 detects the increased pressure.
この圧力検知部５では、その圧力変化に応じた電気信号
がボンディングワイヤ７、端子６および出力線９により
外部に出力され、燃焼室内の燃焼状態に応じて点火プラ
グの点火時期が制御される。In the pressure detection section 5, an electric signal corresponding to the pressure change is outputted to the outside through the bonding wire 7, the terminal 6, and the output line 9, and the ignition timing of the spark plug is controlled according to the combustion state in the combustion chamber.
上記のように構成された従来の圧力センサにおいては、
ケース１内に端子６の接着されたベース３および圧力検
知部５の接着された台座４をそれぞれ接合し、その後、
ワイヤボンディング作業を行い、圧力検知部５と端子６
とをボンディングワイヤ７を介して接続した後でないと
、圧力検知部５の生産時に生じた精度バラツキの補正を
行うことができず、場合によっては、圧力検知部５の精
度が使用範囲を超えた不良品であることが圧力検知部５
をケース１に組み込んだ後に判り、圧力センサの組み立
て作業が無駄になってしまうという課題があった。In the conventional pressure sensor configured as above,
The base 3 to which the terminal 6 is bonded and the pedestal 4 to which the pressure sensing portion 5 is bonded are respectively joined in the case 1, and then,
Perform wire bonding work to connect the pressure sensing part 5 and terminal 6.
It is not possible to correct the accuracy variation that occurred during the production of the pressure sensing part 5 until after the pressure sensing part 5 is connected via the bonding wire 7, and in some cases, the accuracy of the pressure sensing part 5 exceeds the usage range. The pressure detection unit 5 indicates that the product is defective.
This was discovered after the pressure sensor was assembled into the case 1, and there was a problem in that the assembly work of the pressure sensor was wasted.
この発明は、かかる課題を解消するためになされたもの
で、ケースに組み込む前に圧力検知部のバラツキ補正を
行うことができるとともに、組み立て作業が無駄になる
ようなことのない圧力センサを得ることを目的とする。This invention has been made to solve this problem, and provides a pressure sensor that can correct for variations in the pressure detection section before being assembled into a case, and that does not waste assembly work. With the goal.
この発明の圧力センサの圧力センサ部は、導通孔に指向
し圧力伝達液を圧力検知部に導くニップル部を有するも
のである。The pressure sensor section of the pressure sensor of the present invention has a nipple section that faces the conduction hole and guides the pressure transmission liquid to the pressure detection section.
この発明においては、圧力センサ部は、ケース内にわざ
わざ組み入れることなく、ニップル部内に圧力伝達液を
圧入口、圧力検知部に印加して圧力検知部の生産時の精
度バラツキに伴う補正をすることができる。In this invention, the pressure sensor part can be corrected due to accuracy variations during production of the pressure sensing part by applying pressure transmission fluid to the pressure inlet and the pressure sensing part in the nipple part without taking the trouble of incorporating it into the case. I can do it.
以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例を示すもので、第２図と同
一または相当部分は同一符号を付し、その説明は省略す
る。FIG. 1 shows an embodiment of the present invention, and the same or corresponding parts as in FIG. 2 are designated by the same reference numerals, and the explanation thereof will be omitted.
図において、 ２０はエンジンにねじ部２０ａて取り付
けられるステンレス製のケース、２１は軸線方向に沿っ
て形成された導通孔２０ｂを有するケース２０の下端部
に設けられた金属製のダイアフラム、２２はねじ２３に
よりケース２０に固着されたカバーである。In the figure, 20 is a stainless steel case that is attached to the engine with a threaded portion 20a, 21 is a metal diaphragm provided at the lower end of the case 20 and has a through hole 20b formed along the axial direction, and 22 is a screw. This is a cover fixed to the case 20 by 23.
２４はケース２０内に収納された缶型圧力センサ部、２
５は頭部、２６は頭部２５に連設されたんニップル部、
２７はセラミック製の台座２８に接着されたシリコン製
の半導体ストレンゲージからなる圧力検知部で、この圧
力検知部２７とダイアフラム２１との間には圧力伝達液
として高沸点のシリコンオイル２９が封入されている、
３０は基板、３１は基板３０に固着されたプレート、３
２はプレート３１に貫通装着され先端が圧力検知部２７
に接続されたリード線、３３はプレート３１の端部には
んだ付けで溶着された出力線、３４は缶型圧力センサ部
２４をケース２０、カバー２２内に保持するためのホル
ダ、３５．３６はケース２０とニップル部２６との間に
配設されたＯリング、バックアップリングである。24 is a can-shaped pressure sensor section housed in the case 20;
5 is a head, 26 is a nipple part connected to the head 25,
Reference numeral 27 denotes a pressure sensing section consisting of a silicon semiconductor strain gauge bonded to a ceramic pedestal 28. High boiling point silicone oil 29 is sealed between the pressure sensing section 27 and the diaphragm 21 as a pressure transmission fluid. 30 is a substrate, 31 is a plate fixed to the substrate 30, 3
2 is installed through the plate 31 and has a pressure sensing portion 27 at the tip.
33 is an output wire welded to the end of the plate 31 by soldering, 34 is a holder for holding the can-shaped pressure sensor section 24 inside the case 20 and the cover 22, 35.36 is a This is an O-ring and a backup ring disposed between the case 20 and the nipple portion 26.
上記のように構成された圧力センサにおいては、燃焼室
内の圧力上昇によりダイアフラム２１が変形し、その変
形に伴いシリコンオイル２９内の圧力が上昇し、その上
昇圧力を圧力検知部２７が検知する。In the pressure sensor configured as described above, the diaphragm 21 is deformed due to an increase in pressure within the combustion chamber, and the pressure within the silicone oil 29 increases with the deformation, and the pressure detection section 27 detects the increased pressure.
この圧力検知部２７では、その圧力変化に応じた電気信
号がリード線３２、プレート３１を介して出力線３３に
より外部に出力され、燃焼室内の燃焼状態に応じて点火
プラグの点火時期が制御される。In this pressure detection section 27, an electric signal corresponding to the pressure change is outputted to the outside via an output line 33 via a lead wire 32 and a plate 31, and the ignition timing of the spark plug is controlled according to the combustion state in the combustion chamber. Ru.
ところで、缶型圧力センサ部２４は、ケース２０内にわ
ざわざ組み入れることなく、ニップル部２６的にシリコ
ンオイルを圧入し、圧力検知部２７に印加して圧力検知
部２７の生産時の精度バラツキに伴う補正をすることが
できる。By the way, the can-shaped pressure sensor part 24 does not have to be assembled into the case 20, but silicone oil is press-fitted into the nipple part 26 and applied to the pressure detection part 27, thereby eliminating the need to incorporate it into the case 20 due to variations in accuracy during production of the pressure detection part 27. Corrections can be made.
なお、上記実施例ではエンジンの燃焼室内の圧力を検知
するための圧力センサについて説明したが、この発明の
圧力センサはその他にも適用することができることは勿
論である。ｔた、圧力伝達液としてシリコンオイル２９
を用いたが、高沸点の他の液体であってもよい。In the above embodiment, a pressure sensor for detecting the pressure inside the combustion chamber of an engine has been described, but it goes without saying that the pressure sensor of the present invention can be applied to other applications. Also, silicone oil 29 is used as a pressure transmission fluid.
was used, but other liquids with high boiling points may be used.
以上説明したように、この発明の圧力センサによれば、
圧力検知部を有する圧力センサ部に、導通孔に指向し圧
力伝達液を圧力検知部に導くニップル部を備えたことに
より、圧力センサ部を単品として取り扱うことができ、
圧力センサ部をケース内にわざわざ組み入れることなく
、圧力検知部の生産時に生じた精度バラツキに伴う補正
をすることができるとともに、圧力検知部が不良品であ
ることが圧力センサの組み立て作業前に判るという効果
がある。As explained above, according to the pressure sensor of the present invention,
By equipping the pressure sensor section with the pressure detection section with a nipple section that directs the pressure transmission fluid toward the conduction hole and guides the pressure transmission fluid to the pressure detection section, the pressure sensor section can be handled as a single item.
It is possible to correct variations in accuracy that occur during production of the pressure sensor without having to take the trouble to incorporate the pressure sensor into the case, and it is also possible to determine whether the pressure sensor is a defective product before assembling the pressure sensor. There is an effect.
第１図はこの発明の一実施例を示す縦断面図、第２図は
従来の圧力センサの一例を示す縦断面図である。
図において、 ２０はケース、２０ｂは導通孔、２１は
ダイアフラム、２４は缶型圧力センサ部、２６はニップ
ル部、２７は圧力検知部、２９はシリコンオイルである
。
なお、各図中、同一符号は同一または相当部分を示すも
のである。FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing an example of a conventional pressure sensor. In the figure, 20 is a case, 20b is a through hole, 21 is a diaphragm, 24 is a can-shaped pressure sensor section, 26 is a nipple section, 27 is a pressure detection section, and 29 is silicone oil. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
形成され前記ダイアフラムに指向した導通孔と、前記ケ
ース内に前記導通孔に指向して設けられ圧力を検知する
圧力検知部を有する圧力センサ部とを備え、前記ダイア
フラムと前記圧力検知部との間に圧力伝達液が封入され
た圧力センサにおいて、前記圧力センサ部は、前記導通
孔に指向し前記圧力伝達液を前記圧力検知部に導くニッ
プル部を有することを特徴とする圧力センサ。A diaphragm provided in a case, a conduction hole formed in the case and directed to the diaphragm, and a pressure sensor section provided in the case and directed to the conduction hole and having a pressure detection part for detecting pressure. The pressure sensor includes a pressure transmitting fluid sealed between the diaphragm and the pressure sensing portion, wherein the pressure sensing portion includes a nipple portion that is directed toward the through hole and guides the pressure transmitting fluid to the pressure sensing portion. A pressure sensor comprising:
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2322280A JPH04194637A (en) | 1990-11-28 | 1990-11-28 | Pressure sensor |
| KR1019910021097A KR950005891B1 (en) | 1990-11-28 | 1991-11-25 | Pressure sensor |
| US07/798,588 US5222397A (en) | 1990-11-28 | 1991-11-26 | Pressure sensor |
| DE4139147A DE4139147C2 (en) | 1990-11-28 | 1991-11-28 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2322280A JPH04194637A (en) | 1990-11-28 | 1990-11-28 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04194637A true JPH04194637A (en) | 1992-07-14 |
Family
ID=18141880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2322280A Pending JPH04194637A (en) | 1990-11-28 | 1990-11-28 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04194637A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764263A (en) * | 1996-02-05 | 1998-06-09 | Xerox Corporation | Printing process, apparatus, and materials for the reduction of paper curl |
| JP2011099678A (en) * | 2009-11-03 | 2011-05-19 | Ngk Spark Plug Co Ltd | Pressure detection device |
-
1990
- 1990-11-28 JP JP2322280A patent/JPH04194637A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5764263A (en) * | 1996-02-05 | 1998-06-09 | Xerox Corporation | Printing process, apparatus, and materials for the reduction of paper curl |
| JP2011099678A (en) * | 2009-11-03 | 2011-05-19 | Ngk Spark Plug Co Ltd | Pressure detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR950005891B1 (en) | Pressure sensor | |
| KR930011091B1 (en) | Pressure sensor | |
| US5209121A (en) | Pressure sensor | |
| US6227055B1 (en) | Pressure sensor assembly with direct backside sensing | |
| US5142914A (en) | Piezoelectric pressure sensor | |
| JP2763518B2 (en) | Pressure sensor | |
| EP2827117B1 (en) | Internal combustion engine fitted with combustion pressure detection device | |
| JPH03293534A (en) | Mounting apparatus for pressure sensor | |
| EA004581B1 (en) | Pressure measuring arrangement | |
| US7856890B2 (en) | Pressure detector and method of manufacturing the same | |
| US5537883A (en) | Piezoelectric pressure sensor and method of manufacturing the same | |
| US6538366B1 (en) | Sparking plug equipped with a pressure sensor, and combustion engine equipped with such sparking plugs | |
| JPH0254637B2 (en) | ||
| US5138885A (en) | Piezoelectric-type pressure sensor | |
| JPH04194637A (en) | Pressure sensor | |
| US7428844B2 (en) | Pressure sensor | |
| US4400682A (en) | Pressure sensor | |
| JPH04194638A (en) | Pressure sensor | |
| JPH01109230A (en) | Pressure detector | |
| JP2020176856A (en) | Manufacturing method of pressure sensor | |
| JPH03185326A (en) | Piezoelectric pressure sensor | |
| JPH01250732A (en) | Pressure sensor | |
| JPS60247129A (en) | High pressure detector | |
| JPS62291533A (en) | Pressure detector | |
| JP2010096656A (en) | Pressure sensor |