JPH0418669U - - Google Patents
Info
- Publication number
- JPH0418669U JPH0418669U JP5769790U JP5769790U JPH0418669U JP H0418669 U JPH0418669 U JP H0418669U JP 5769790 U JP5769790 U JP 5769790U JP 5769790 U JP5769790 U JP 5769790U JP H0418669 U JPH0418669 U JP H0418669U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- particle sensor
- heating chamber
- sensor section
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5769790U JPH0418669U (enrdf_load_stackoverflow) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5769790U JPH0418669U (enrdf_load_stackoverflow) | 1990-05-30 | 1990-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418669U true JPH0418669U (enrdf_load_stackoverflow) | 1992-02-17 |
Family
ID=31582644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5769790U Pending JPH0418669U (enrdf_load_stackoverflow) | 1990-05-30 | 1990-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418669U (enrdf_load_stackoverflow) |
-
1990
- 1990-05-30 JP JP5769790U patent/JPH0418669U/ja active Pending
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