JPH0418654U - - Google Patents

Info

Publication number
JPH0418654U
JPH0418654U JP6052290U JP6052290U JPH0418654U JP H0418654 U JPH0418654 U JP H0418654U JP 6052290 U JP6052290 U JP 6052290U JP 6052290 U JP6052290 U JP 6052290U JP H0418654 U JPH0418654 U JP H0418654U
Authority
JP
Japan
Prior art keywords
heating filament
electrode
vacuum evaporation
flat part
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6052290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6052290U priority Critical patent/JPH0418654U/ja
Publication of JPH0418654U publication Critical patent/JPH0418654U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6052290U 1990-06-07 1990-06-07 Pending JPH0418654U (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6052290U JPH0418654U (US06534493-20030318-C00166.png) 1990-06-07 1990-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6052290U JPH0418654U (US06534493-20030318-C00166.png) 1990-06-07 1990-06-07

Publications (1)

Publication Number Publication Date
JPH0418654U true JPH0418654U (US06534493-20030318-C00166.png) 1992-02-17

Family

ID=31587958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6052290U Pending JPH0418654U (US06534493-20030318-C00166.png) 1990-06-07 1990-06-07

Country Status (1)

Country Link
JP (1) JPH0418654U (US06534493-20030318-C00166.png)

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