JPH0418432U - - Google Patents

Info

Publication number
JPH0418432U
JPH0418432U JP5992490U JP5992490U JPH0418432U JP H0418432 U JPH0418432 U JP H0418432U JP 5992490 U JP5992490 U JP 5992490U JP 5992490 U JP5992490 U JP 5992490U JP H0418432 U JPH0418432 U JP H0418432U
Authority
JP
Japan
Prior art keywords
carrier
semiconductor wafer
rollers
heat diffusion
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5992490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5992490U priority Critical patent/JPH0418432U/ja
Publication of JPH0418432U publication Critical patent/JPH0418432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5992490U 1990-06-05 1990-06-05 Pending JPH0418432U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5992490U JPH0418432U (US06653308-20031125-C00199.png) 1990-06-05 1990-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5992490U JPH0418432U (US06653308-20031125-C00199.png) 1990-06-05 1990-06-05

Publications (1)

Publication Number Publication Date
JPH0418432U true JPH0418432U (US06653308-20031125-C00199.png) 1992-02-17

Family

ID=31586854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5992490U Pending JPH0418432U (US06653308-20031125-C00199.png) 1990-06-05 1990-06-05

Country Status (1)

Country Link
JP (1) JPH0418432U (US06653308-20031125-C00199.png)

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