JPH04184208A - Thickness measuring apparatus - Google Patents

Abstract

PURPOSE:To prevent damage to an object to be measured by non-contact measurement by detecting a focusing point taking in an image of a measuring microscope with a CCD camera to read a Z axis linear scale at a focused position. CONSTITUTION:A Z axis moving device Z is made up of an upright Z axis fixing rail with a lower end of an X axis body fixed thereon, a Z shaft 70 which moves sliding vertically along the Z axis fixing rail and a Z axis linear scale 71 to measure a moving value of the Z shaft 70. A thickness measuring device 75 detects a focusing point utilizing a value (contrast) of a high frequency component contained in a video signal of an object to be measured taken in with a CCD color camera 23 through a measuring microscope 22 varies with the quantity of light in focus and a zero resetting is made on the scale 71 of the device Z at a focused position. Then, the scale 71 is read at the focused position obtained by refocusing made after the movement of at least one or both of a Y axis moving device Y and the X axis moving device X.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a thickness measuring device that non-contactly measures the thickness of a pattern or the like on a printed circuit board.

"Prior Art" Conventionally, the thickness of a pattern on a printed circuit board has been measured using a dial gauge or the like that brings a contact into contact with the pattern.

``Problem to be Solved by the Present Invention J'' Conventional thickness measurement using a dial gauge or the like had the drawback that the contact came into contact with the pattern, etc., causing scratches or damage to the pattern, etc.

In view of the above-mentioned conventional drawbacks, the present invention provides a thickness measuring device that can measure the thickness without touching the object to be measured and reliably prevent scratches or damage to the object to be measured. is intended to provide.

"Means for Achieving the Object" In order to achieve the above object, the present invention includes a table on which a measurement object attached to a machine frame is supported, an X-axis moving device that moves on the table in the front and back direction, A Z-axis comprising: an X-axis moving device that moves horizontally on the table attached to the X-axis moving device; and a Z-axis linear scale that moves vertically on the table attached to the X-axis moving device. a moving device; a measuring microscope attached to the Z-axis moving device capable of measuring the object to be measured on the table; a CCD camera attached to the measuring microscope that captures an image of the measuring microscope; The in-focus point is detected by utilizing the fact that the frequency of high-frequency components contained in the video signal captured by the camera changes depending on the amount of light at the focus, and the Z-axis of the two-axis moving device is detected at the in-focus position. Perform zero reset of the linear scale, move the Y-axis moving device,
A thickness measuring device is constituted by a thickness measuring device that reads the Z-axis linear scale at a focused position by refocusing after moving at least one or both of the axis moving devices.

``Function'' The thickness measuring device configured as described above positions the measuring microscope so that it can measure one position of the thickness of the object to be measured supported on the table, and focuses it with the CCD camera. , the Z-axis linear scale of the Z-axis moving device is reset to zero.

Next, operate and move at least one of the X-axis moving device and the X-axis moving device, position the measuring microscope so that it can measure the other position of the thickness you want to measure, and place it at the position where the CCD camera focuses. By reading the two-axis linear scale, eight thickness dimensions can be measured.

"Embodiments of the present invention" The present invention will be described in detail below with reference to embodiments shown in the drawings.

In the embodiment shown in FIGS. 1 to 18, reference numeral 1 denotes a machine frame to which casters 2.2.2.2 and level adjustment jacks 3.3.3.3 are attached to the four corners of the bottom surface.

Reference numerals 4.5 are tables fixed to the upper portions of both ends of the machine frame 1, and a side glass table 6 having built-in light table-type transmitted illumination is installed between the tables 4.5.

Y is an X-axis moving device that moves back and forth on the glass table 6; Y is a high-precision Y-axis main fixed rail 7 fixed on the table 4; Consisting of a fixed Y-axis rib fixing rail 8, a Y-axis 9 that slides in the front-rear direction along the Y-axis main fixing rail 7, and a Y-axis linear scale 67 that measures the amount of movement of this Y-axis 9. has been done.

As shown in FIGS. 4 and 5, the Y-axis 9 has a Y-axis main body 10 that slides in the front-rear direction along the Y-axis main fixed rail 7, and is fixed to one end of the Y-axis main fixed rail 7. The Y-axis servo motor 11 and the Y-axis main body 10 are rotated in forward and reverse directions.
and a Y-axis ball shaft 12 that slides in the front-back direction.

X is an X-axis moving device that moves in the left-right direction on the glass table 6 attached to the Y-axis moving device Y;
The axis moving device fiX includes a high-viscosity X-axis fixed rail 13 whose one end is fixed to the Y-axis 9 and whose other end is slidably attached to the Y-axis sub-fixed rail 8, and the X-axis fixed rail 13. It consists of an X-axis 14 that slides in the left-right direction along the X-axis, and an X-axis linear scale 68 that measures the amount of movement of the X-axis 14.

As shown in FIGS. 6 and 7, the X axis 14 is
The X-axis main body 15 slides left and right along the shaft fixing rail 13, and the front &l! Consists of an X-axis servo motor 16 fixed to one end of the X-axis fixed rail 13, and an X-wheel ball shaft 17 that slides the X-axis main body 15 in the left and right direction by forward and reverse rotation of the X-axis servo motor 16. has been done.

Z is a Z-axis moving device that moves vertically on the glass table 6 attached to the X-axis moving device
The axis moving device Z includes an upright Z-axis fixed rail 69 whose lower end is fixed to the X-axis main body 15, and this Z-axis fixed rail 6.
9, and a Z-axis linear scale 71 that measures the amount of movement of these two axes 70.
It is composed of.

The two axes 10 are connected to the Z axis as shown in FIGS. 8 and 9.
A Z-axis main body 72 that slides vertically along a shaft fixing rail 69, a Z-axis servo motor 73 fixed to the Z-axis main body 72, and a Z-axis main body 72 that rotates in the forward and reverse directions of the Z-axis servo motor 73. 72 and a Z-axis ball shaft 74 that slides the shaft 72 in the vertical direction.

Reference numeral 22 denotes a measuring microscope such as a high-resolution measuring microscope or a high-magnification zoom microscope attached to the upper part of the 7-axis main body 72 of the Z-axis moving device eZ.

23 is a CCD camera that captures an image of the measurement microscope ti22 attached to the measurement microscope #R22.

Reference numeral 18 denotes a free-standing monitor stand placed on the rear side of the machine frame 1. On this stand-alone monitor stand 18, there is a color monitor television 19, and the amount of movement on the Y axis, the amount of movement on the X axis, and the movement on the Z axis. Digital counter that can display the amount 20.
A display 21 equipped with 20A and 20B is arranged.

Reference numeral 75 denotes a thickness measuring device, and in this thickness measuring device 75, the amount of high frequency components (contrast) included in the video signal captured by the CCD camera 23 via the measuring microscope 22 changes depending on the amount of light in focus. The in-focus point is detected by utilizing this fact, and the Z axis of the Z-axis moving device iZ is moved at the in-focus position.
The axis linear scale 71 is reset to zero, and the Y
The Z-axis linear scale 71 is read at the focused position by refocusing after the movement of at least one or both of the axis moving device Y and the X-axis movement @Mx.

24 is an operation panel fixed to the machine frame 1 so as to protrude forward from the measurement glass table 6;
includes a controller 25 for the CCD color camera 23 with built-in auto white balance, a main unit operation for turning the main power on and off, a light control 26 for the measurement glass table 6, and adjusting the focus and magnification of the measurement order 111122. A panel 27, a digital electronic line controller 28 that displays the dotted lines on the color monitor TV 19, and a digital electronic line controller 28 that receives mechanical coordinate values from the digital counter 20 to perform alignment settings and various data. The three-dimensional data processing bag u29 to be processed, the X-axis coarse movement knob 30 and the Y-axis coarse movement knob 31 that are rotated forward and backward, respectively, on the left and right parts of the center of the body, and the X-axis coarse movement knob 30 and Y-axis coarse movement knob 31 X-axis fine adjustment knobs 32 rotatably attached to the center of each adjustment knob 31
and a Y-axis fine adjustment knob 33 are installed.

As shown in FIGS. 10 to 14, the X-axis coarse adjustment knob 30 includes a cylindrical X-axis coarse adjustment knob body 34 rotatably attached to the panel 24a of the operation panel 24, and a A cam 38 is fixed to the lower surface of the moving knob body 34 with a plurality of bolts 35 and has a right cam 36 on the right side and a left cam 37 on the left side, and one end that always urges the cam 38 to the zero point position is attached. It is attached to the cam 38, and the other end is attached to the panel 24a.
When the biasing spring 39 fixed to the X-axis coarse adjustment knob body 34 is rotated approximately 30 degrees toward the stone side, the ON state is established, and the X-axis pulse transmitter 40 is connected to the X-axis servo motor 16.
A signal of 10,000 pulses per second is output from the X-axis main body 1.
Right low speed micro switch 4 that moves 5 10m to the right side
1, when the X-axis coarse adjustment knob body 34 is turned to the right by approximately 50 degrees, it becomes ON, and the X-axis servo motor 16 is turned on.
a right medium-speed microswitch 42 that outputs a signal of 50,000 pulses per second from an X-axis pulse transmitter 40 and moves the X-axis main body 15 to the right by 50 degrees; and the X-axis coarse adjustment knob main body 3.
4 to the right about 70', it becomes ON, and the X-axis pulse transmitter 40 outputs a signal of 100,000 pulses per second to the X-axis homotor 16, and the X-axis main body 15
When the right high-speed microswitch 43 is moved to the right by 100 degrees and the X-axis rough adjustment knob body 34 is turned to the left by about 30 degrees, it becomes ON, and the X-axis pulse transmitter 40 causes the X-axis servo motor 16 to The left low-speed micro switch 44 outputs a signal of 10,000 pulses per second and moves the X-axis main body 15 to the left by 10 feet, and when the X-axis coarse movement knob main body 34 is rotated about 50' to the left, it becomes ON. , an X-axis pulse transmitter 40 is connected to the X-axis servo motor 16.
A signal of 50,000 pulses per second is output from the X-axis main body 1.
5 on the left side 50. Left medium speed micro switch to be moved 4
5, when the X-axis coarse adjustment knob main body 34 is turned to the left by about 70 degrees, it is turned on, and the X-axis servo motor 16 is turned on.
The X-axis pulse transmitter 40 outputs a signal of 100,000 pulses per second to move the X-axis main body 15 to the left by 100 #I.

The X-axis fine adjustment knob 32 has an X-axis rotation knob 47 rotatably attached to the X-axis coarse adjustment knob main body 34 of the X-axis coarse adjustment knob 30, and a rotation of the X-axis rotation knob 47 to the right. The X-axis pulse transmitter 40 outputs a signal of 1000 pulses, and the X-axis main body 15 can be moved to the right by 11IR, and one rotation to the left causes the X-axis pulse transmitter 40 to move 11IR.
The X-axis controller 48 outputs a signal of 000 pulses and controls the X-axis main body 15 so that it can be moved one foot to the left.

The Y-axis coarse movement knob 31 is shown in FIGS.
As shown in FIG. 7, there is a cylindrical Y-axis coarse adjustment knob body 49 rotatably attached to the panel 24a of the operation panel 24, and a plurality of bolts 50 are attached to the lower surface of this Y-axis coarse adjustment knob body 49. A cam 53 having a fixed right side cam 51 and a left side cam 52 formed on the left side, one end that always urges this cam 53 to the O point position is attached to the cam 53, and the other end is attached to the panel 24a. The fixed biasing spring 54 and the Y
Turns on by rotating the shaft coarse adjustment knob body 49 approximately 30 degrees to the right.
state, the Y-axis pulse transmitter 55 outputs a signal of 10,000 pulses per second to the Y-axis servo motor 11, and the right low-speed microswitch 56 moves the Y-axis main body 10 to the right by 10 Im, and the Y-axis rough The moving knob body 49 is about 50
°When turned to the right, it becomes ON, and the Y-axis pulse transmitter 55 outputs a signal of 50,000 pulses per second to the Y-axis servo motor 11, causing the Y-axis main body 10 to move 50a to the right.
When the right medium-speed micro switch 57 is moved by m and the Y-axis rough adjustment knob body 49 is turned to the right by about 10 degrees, it becomes ON, and the Y-axis pulse generator 55 sends a signal to the Y-axis servo motor 11 for one second. A right high-speed microswitch 58 outputs a signal of 100,000 pulses and moves the Y-axis main body 10 to the right by 100 m, and the Y-axis coarse adjustment knob main body 49 is moved by about 300 m.
When it is rotated to the left by 0 degrees, it becomes ON, and the Y-axis pulse transmitter 55 outputs 1 pulse per second to the Y-axis servo motor 11.
A signal of 10,000 pulses is output, and the Y-axis main body 10 is moved to the left by 10,000 pulses.
m+ the left low-speed microswitch 59 to be moved, and the Y
Turns on by rotating the shaft coarse adjustment knob body 49 approximately 50 degrees to the left.
state, the Y-axis pulse transmitter 55 outputs a signal of 50,000 pulses per second to the Y-axis servo motor 11, and the left medium-speed microswitch 60 moves the Y-axis main body 10 to the left by 50 m. Coarse movement knob body 49 approximately 70°
When turned to the left, it becomes ON, and the Y-axis pulse transmitter 55 outputs a signal of 100,000 pulses per second to the Y-axis servo motor 11, causing the Y-axis main body 10 to move 100,000 pulses to the left.
It consists of a left high-speed microswitch 61 that moves m.

Before&! The Y-axis fine adjustment knob 33 has a Y-axis rotation knob 62 rotatably attached to the Y-axis coarse adjustment knob main body 49 of the Y-axis coarse adjustment knob 31, and one rotation of the Y-axis rotation knob 62 to the right. The Y-axis pulse transmitter 55 outputs a signal of 1000 pulses, and the Y-axis main body 10 can be moved 1jwI to the right every time, and the Y-axis pulse transmitter 55 outputs a signal of 1000 pulses for each rotation to the left. The Y-axis controller 63 controls the Y-axis main body 10 so that it can be moved 11 meters to the left.

The digital precision length measuring machine having the above configuration can coarsely move the X-axis 14 in the left-right direction by rotating the X-axis coarse-movement knob main body 34 of the X-axis coarse-movement knob 30 in the left-right direction.

Furthermore, by releasing the hand rotating the X-axis coarse adjustment knob body 34, the biasing spring 39 automatically returns the X-axis coarse adjustment knob body 34 to the zero point position.

In addition, the X-axis fine adjustment knob 32 can also be operated using the X-axis coarse adjustment knob body 34.
With the fingertips that were pinching the
The shaft 14 can be moved slightly in the left and right direction.

Furthermore, by releasing the hand that rotates the Y-axis relative movement knob body 49, the Y-axis coarse movement knob body 49 automatically returns to the zero point position by the biasing spring 54.

In addition, the Y-axis fine adjustment knob 33 can also be operated using the Y-axis coarse adjustment knob body 49.
The Y-axis fine movement knob 33 can be pinched and rotated in the left-right direction to slightly move the Y-axis 9 in the front-back direction without visually confirming the fingertip.

Next, when measuring the thickness of the object supported on the measurement glass table 6, the measurement microscope R22 is positioned so that one position of the thickness can be measured, and the CCD camera 23 is focused. The Z-axis linear scale 67 of the axis moving device Z is reset to zero.

Next, operate and move at least one of the Y-axis moving device Y and the X-axis moving device VTMX, position the measuring microscope M22 so that it can measure the other position of the thickness to be measured, and focus it with the CCD camera 23. By reading the Z-axis linear scale 67 at this position, the thickness dimension can be measured.

In the embodiment of the present invention, the cam 53 of the Y-axis coarse adjustment knob body 49 is always urged to the 0-point position by the urging spring 54, but the present invention is not limited to this. As shown in the figure, a flat portion 64 is formed on the cam 53, and a pressing plate 66 that is constantly biased by a biasing spring 65 is provided on the flat portion 64 to release the Y-axis coarse adjustment knob body 49 from the operated state. A structure that can automatically stop at the O point position may also be adopted.

Naturally, the above structure can be similarly adopted for the X-axis coarse movement knob main body 34.

"Effects of the Present Invention" As is clear from the above description, the present invention provides the following effects.

(1) A table attached to the machine frame on which the object to be measured is supported, a Y-axis moving device that moves back and forth on this table, and a Y-axis moving device that moves left and right on the table attached to this Y-axis moving device. an X-axis moving device that moves in the vertical direction on the table attached to the X-axis moving device;
A Z-axis moving device equipped with an axis linear scale, a measuring microscope attached to the Z-axis moving device capable of measuring the object to be measured on the table, and an image of the measuring microscope attached to the measuring microscope. The in-focus point is detected by using a CCD camera that focuses on the camera and the amount of high-frequency components contained in the video signal captured by this CCD camera changes depending on the amount of light at the focus. Zero-reset the two-axis linear scale of the Z-axis moving device, and adjust the Y-axis! It consists of a thickness measuring device that reads the Z-axis linear scale at the focused position by refocusing after moving at least one or both of the LJ device and the Thickness can be measured without contact.

Therefore, it is possible to reliably prevent printed circuit board patterns and the like from being scratched or scratched by contacts as in the conventional case.

(2) According to (1) above, it is only necessary to focus the measuring microscope at the reference point and the measuring point, so it can be easily carried out.

(3) According to (1) above, the thickness can be measured simply by focusing, so even non-experts can accurately measure the thickness.

(4) Claim 2 also provides the same effects as in (1) to (3) above.

[Brief explanation of drawings]

1 and 2 are front and side views showing one embodiment of the present invention, FIG. 3 is a schematic block diagram of one embodiment of the present invention, and FIGS. 4 and 5 are Y-axis explanatory diagrams. , FIGS. 6 and 7 are explanatory diagrams of the X axis, FIGS. 8 and 9 are explanatory diagrams of the Z axis, and FIG. 10 is a block diagram showing the operations of the X and Y axes.
Figures 11 to 14 are explanatory diagrams of the X-axis coarse adjustment knob and the X-axis fine adjustment knob, Figures 15 to 17 are explanatory diagrams of the Y-axis coarse adjustment knob and the Y-axis fine adjustment knob, and Figure 18 is an explanatory diagram of the Y-axis coarse adjustment knob and the Y-axis fine adjustment knob. FIG. 6 is an explanatory diagram of different biasing states of the cam. 1: Machine frame, 2: Casters, 3 Double-level adjustment jacks, 4: Table, 5: Table, 6: Measuring glass table, Y: Y-axis moving device, 7: Y-axis main fixing rail, 8: Y-axis rib fixation Rail, 9: Y-axis, 10: Y-axis main body, 11: Y-axis servo motor, 12: Y-axis ball axis, x: X-axis moving device, 13: X
Axis fixing rail, 14: x-axis, 15: X-axis body, 16: x
Axis servo motor, 17: x-axis ball axis, 18: Freestanding monitor stand, 1
9: Monitor TV, 20: Digital counter, 2
1: Display, 22: Measuring microscope, 23: CC
D color camera, 24: Operation panel, 25: Controller, 26:
Light control, 27: Main unit operation panel, 28: Controller, 29:
Two-dimensional data processing equipment, 30: 'XX-axis moving device 31: Y-axis coarse movement knob, 32
: x-axis fine adjustment knob, 33: Y-axis fine adjustment knob, 34: x-axis coarse adjustment knob body, 35: bolt, 36: right cam,
37: Left cam, 38: Cam, 39: Biasing spring, 40: x-axis pulse transmitter, 41: Right low speed micro switch, 42: Medium speed micro switch, 43: Right high speed micro switch, 44: Left low speed micro switch Switch, 45: Left medium speed microswitch, 46: Left high speed microswitch, 47: x-axis rotation, 48: x-axis controller, 49: Y
Shaft coarse adjustment knob body, 50: Bolt, 51: Right cam,
52: Left cam, 53: Cam, 54:
Biasing spring, 55: Y-axis pulse transmitter, 56: Right low-speed microswitch, 57: Right medium-speed microswitch, 58: Right high-speed microswitch, 59: Left low-speed microswitch, 60: Left medium-speed microswitch, 61 : Left high-speed micro switch, 62: Y-axis rotation knob, 63: Y-axis controller, 64: Flat part, 65: Biasing spring, 66: Pressing plate, 67: Y-axis linear scale, 68: X-axis linear scale , Z: Z-axis moving device, 69: Z-axis fixed rail, 70:
Z axis, 71: Z axis linear scale, 72:
Z-axis main body, 73: Z-axis servo motor, 74:
Z-axis ball axis, 75: Thickness measuring device. Patent application: Tokyo Process Service Co., Ltd. No. 4, No. 51! ! Figure 6 – Saddle

Claims (1)

[Scope of Claims] 1) A table on which a measured object is supported, which is attached to a machine frame, a Y-axis moving device that moves back and forth on this table, and a top of the table attached to this Y-axis moving device. an X-axis moving device that moves the table in the left-right direction; a Z-axis moving device that includes a Z-axis linear scale that moves vertically on the table that is attached to the X-axis moving device; A measuring microscope capable of measuring the object on the table, a CCD camera attached to the measuring microscope that captures the image of the measuring microscope, and a video signal included in the image signal captured by the CCD camera. Detecting a focused point using the fact that the amount of high frequency components changes depending on the amount of light at the focus, and zero-resetting the Z-axis linear scale of the Z-axis moving device at the focused position;
A thickness measuring device that reads the Z-axis linear scale at a focused position by refocusing after moving at least one or both of the Y-axis moving device and the X-axis moving device. Device. 2) A table attached to the machine frame on which the object to be measured is supported, a Y-axis moving device including a Y-axis linear scale that moves back and forth on this table, and a top of the table attached to this Y-axis moving device. an X-axis moving device equipped with an X-axis linear scale that moves the scale horizontally, and a Z-axis moving device that moves vertically on the table attached to the X-axis moving device.
A Z-axis moving device equipped with an axis linear scale, a measuring microscope attached to the Z-axis moving device capable of measuring the object to be measured on the table, and an image of the measuring microscope attached to the measuring microscope. The in-focus point is detected by using a CCD camera that focuses on the camera and the amount of high-frequency components contained in the video signal captured by this CCD camera changes depending on the amount of light at the focus. The Z-axis scale of the Z-axis moving device is reset to zero, and the Z-axis scale is read at the focused position by refocusing after moving at least one or both of the Y-axis moving device and the X-axis moving device. A thickness measuring device comprising: a thickness measuring device.