JPH04178625A - Reflection type liquid crystal electrooptical device - Google Patents
Reflection type liquid crystal electrooptical deviceInfo
- Publication number
- JPH04178625A JPH04178625A JP2307836A JP30783690A JPH04178625A JP H04178625 A JPH04178625 A JP H04178625A JP 2307836 A JP2307836 A JP 2307836A JP 30783690 A JP30783690 A JP 30783690A JP H04178625 A JPH04178625 A JP H04178625A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- dielectric mirror
- voltage
- electrodes
- impressed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000002834 transmittance Methods 0.000 claims 1
- 239000011159 matrix material Substances 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052782 aluminium Inorganic materials 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 2
- 238000003487 electrochemical reaction Methods 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は反射型液晶電気光学装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a reflective liquid crystal electro-optical device.
[従来の技術]
従来の反射型液晶電気光学装置は、日経エレクトロニク
ス(1981)2月16日号p、164記載のように、
液晶駆動電極を反射面とするものであった。[Prior Art] A conventional reflective liquid crystal electro-optical device is as described in Nikkei Electronics (1981) February 16 issue, p. 164.
The liquid crystal drive electrode was used as a reflective surface.
[発明が解決しようとする課題及び目的コしかし、従来
の反射型液晶電気光学装置には、反射面に使う液晶駆動
電極に反射率の高い材料を使う必要があるため、電極に
使用できる材料が限られており(アルミニウムと銀)、
装置設計上の制約が大きいという問題があった。本発明
は、このような問題点を解決するものであって、その目
的は、高性能な反射型液晶電気光学装置を提供するとこ
ろにある。[Problems and Objectives to be Solved by the Invention] However, in conventional reflective liquid crystal electro-optical devices, it is necessary to use a material with high reflectivity for the liquid crystal drive electrode used for the reflective surface, so there are limited materials that can be used for the electrode. limited (aluminum and silver);
There was a problem in that there were large restrictions on device design. The present invention is intended to solve these problems, and its purpose is to provide a high-performance reflective liquid crystal electro-optical device.
[課題を解決するための手段]
本発明の反射型液晶電気光学装置は、反射率の高い側に
ある電極と液晶の間に誘電体ミラーを備えて成ることを
特徴とする。[Means for Solving the Problems] A reflective liquid crystal electro-optical device of the present invention is characterized in that a dielectric mirror is provided between an electrode on the side with a higher reflectance and a liquid crystal.
[実施例] 以下、実施例により本発明の詳細を示す。[Example] Hereinafter, the details of the present invention will be shown by examples.
第1図に本発明の反射型液晶電気光学装置の構成を示す
。これは本発明をTN(ツイステッドネマティク)モー
ドのアクティブマトリックス方式の反射型液晶表示装置
に応用したものである。FIG. 1 shows the configuration of a reflective liquid crystal electro-optical device of the present invention. This is an application of the present invention to a TN (twisted nematic) mode active matrix reflective liquid crystal display device.
シリコン基板110上にトランジスタ型のアクテイブ集
子111とマトリックス電極108を形成し、絶縁性材
料109で充填した後、表面をエツチングし、平坦面を
得た。その上に誘電体ミラー107を蒸着、形成した。A transistor-type active collector 111 and a matrix electrode 108 were formed on a silicon substrate 110 and filled with an insulating material 109, and then the surface was etched to obtain a flat surface. A dielectric mirror 107 was deposited and formed thereon.
次に誘電体ミラー107の表面に斜め蒸着をおこない配
向面106を形成した。さらにこの配向面106を有す
る誘電体ミラー107と、透明な対向電極103が形成
されたガラス基板102との間に液晶105を封入した
。またガラス基板102の外側には偏光板101を配置
した。Next, diagonal vapor deposition was performed on the surface of the dielectric mirror 107 to form an orientation surface 106. Further, a liquid crystal 105 was sealed between the dielectric mirror 107 having the alignment surface 106 and the glass substrate 102 on which the transparent counter electrode 103 was formed. Further, a polarizing plate 101 was arranged outside the glass substrate 102.
ここで本装置による表示原理について説明する。Here, the display principle of this device will be explained.
ガラス基板102の側から入射した光は、誘電体ミラー
107で反射され、入射したときと逆に光路をたどって
ガラス基板102の側から出射する。The light incident from the glass substrate 102 side is reflected by the dielectric mirror 107, follows the optical path in the opposite direction to that of the incident light, and exits from the glass substrate 102 side.
このあいだに、印加電圧により配向制御された液晶10
5によって、光の偏光状態が変化する。マトリックス電
極108に電圧を印加すると、対向電極103との間に
発生する電場のために液晶分子の配向が変わり、それに
よって出射光の偏光状態が変化する。During this time, the liquid crystal 10 whose alignment is controlled by the applied voltage
5 changes the polarization state of the light. When a voltage is applied to the matrix electrode 108, the orientation of the liquid crystal molecules changes due to the electric field generated between the matrix electrode 108 and the counter electrode 103, thereby changing the polarization state of the emitted light.
本実施例ではマトリックス電極108にアルミニウムを
用いた。アルミニウムを電極に用いる59合は電気化学
反応を防ぐために、従来保護膜を必要としたが、誘電体
ミラーを配置したことにより。In this example, aluminum was used for the matrix electrode 108. 59 cases that use aluminum for electrodes conventionally required a protective film to prevent electrochemical reactions, but now a dielectric mirror has been placed.
その必要がなくなった。There is no longer a need for that.
また、継ぎ目のない誘電体ミラーを配置したことにより
電圧を印加しない状態で均質な表示状態が得られ、電圧
を印加した場合でも従来より継ぎ目の少ない高品位な表
示が得られた。Furthermore, by arranging seamless dielectric mirrors, a homogeneous display state can be obtained even when no voltage is applied, and even when a voltage is applied, a high-quality display with fewer seams than before can be obtained.
第2の実施例も第1図とまったく同じ構成である。但し
、マトリックス電極108にはクロムを用いた。従来反
射率が低いために使用できなかったクロムを電極として
用いたため、電極の電気化学的安定性が向上した。The second embodiment also has exactly the same configuration as FIG. 1. However, chromium was used for the matrix electrode 108. The electrochemical stability of the electrode was improved because chromium, which could not be used in the past due to its low reflectance, was used for the electrode.
上記ふたつの実施例における誘電体ミラーは、電子ビー
ム蒸着により5in2とアモルファスシリコンの薄膜を
交互に積み重で形成され、中心波長では90%以上の反
射率を有している。The dielectric mirrors in the above two embodiments are formed by stacking 5 in 2 and amorphous silicon thin films alternately by electron beam evaporation, and have a reflectance of 90% or more at the center wavelength.
液晶の配向に使った斜め蒸着法は、基板の法線方向に対
して斜めに成長した結晶によって液晶の配向を行うもの
である。本実施例では、斜め蒸着の際に基板法線方向に
対し基板を85度傾けてセットして、SiO2を蒸着し
た。The oblique evaporation method used to align the liquid crystal aligns the liquid crystal using crystals grown obliquely to the normal direction of the substrate. In this example, during oblique vapor deposition, the substrate was set at an angle of 85 degrees with respect to the normal direction of the substrate, and SiO2 was vapor deposited.
なお、誘電体ミラー上に配向膜をつけたのち、ラビング
法によって液晶分子の配向を行うことも可能である。こ
の時は反射率が低下することのないように、配向膜の厚
さや屈折率を考慮にいれて誘電体ミラーを設計する。Note that it is also possible to align the liquid crystal molecules by a rubbing method after applying an alignment film on the dielectric mirror. At this time, the dielectric mirror is designed taking into consideration the thickness and refractive index of the alignment film so that the reflectance does not decrease.
以上本発明の実施例について述べてきたが、本発明はこ
のほかにも、広く液晶表示装置、液晶空間変調器などに
応用が可能である。Although the embodiments of the present invention have been described above, the present invention can be widely applied to other applications such as liquid crystal display devices and liquid crystal spatial modulators.
[発明の効果コ 本発明によれば、以下の効果が得られる。[Effects of invention According to the present invention, the following effects can be obtained.
■液晶駆動電極の上に形成された誘電体ミラーを反射板
として用いることにより、液晶駆動電極の反射率を考慮
する必要がなくなる。このため電極に使える材料が多岐
にわたって考えられ、装置設計の自由度が広がる。(2) By using a dielectric mirror formed on the liquid crystal drive electrode as a reflector, there is no need to consider the reflectance of the liquid crystal drive electrode. Therefore, a wide variety of materials can be used for the electrodes, increasing the degree of freedom in device design.
■M誘電体ミラー電極の保護膜の働きをするので、電気
化学的安定性の低い材料が電極に使えるようになり、装
置設計の自由度が広がる。(M) Since it acts as a protective film for the dielectric mirror electrode, materials with low electrochemical stability can be used for the electrode, increasing the degree of freedom in device design.
■継ぎ目のない誘電体ミラーを配置したことにより、電
極に電圧を印加しない状態では均質な表示状態が得られ
、電圧を印加した場合でも従来より継ぎ目の少ない高品
位な表示が得られる。■By arranging seamless dielectric mirrors, a homogeneous display can be obtained when no voltage is applied to the electrodes, and even when voltage is applied, a high-quality display with fewer seams than before can be obtained.
■液晶駆動電極の上に反射膜があるので電極の間の隙間
に遮光などの特別な処理を必要としない。■Since there is a reflective film on the liquid crystal drive electrode, no special treatment such as light shielding is required in the gap between the electrodes.
第1図は、本発明の反射型液晶電気光学装置の構成を示
す断面図。
第2図は、従来の反射型液晶電気光学装置の構成を示す
断面図。
101 ・・・ 偏光板
102 ・・・ ガラス基板
103 ・・・ 対向電極
104 ・・・ 配向膜
105 ・・・ 液晶
106 ・・・ 配向面
107 ・・・ 誘電体ミラー
]08 ・・ マトリックス電極
109 ・・・ 絶縁性材料
11、0 ・・・ シリコン基板
111 ・・・ アクティブ素子
112 ・・・ 5i02
201 ・・・ 配向膜
202 ・・・ 保護膜
203 ・・・ アルミニウム電極
以 上
出願人 セイコーエプソン株式会社
代理人 弁理士 鈴木喜三部(f!′!!1名)’+2
SrQよ
第1図
麓2図FIG. 1 is a sectional view showing the configuration of a reflective liquid crystal electro-optical device of the present invention. FIG. 2 is a sectional view showing the configuration of a conventional reflective liquid crystal electro-optical device. 101 ... polarizing plate 102 ... glass substrate 103 ... counter electrode 104 ... alignment film 105 ... liquid crystal 106 ... alignment surface 107 ... dielectric mirror] 08 ... matrix electrode 109 ... Insulating material 11,0 ... Silicon substrate 111 ... Active element 112 ... 5i02 201 ... Alignment film 202 ... Protective film 203 ... Aluminum electrode and above Applicant Seiko Epson Corporation Agent Patent Attorney Kizobe Suzuki (f!'!! 1 person)'+2
SrQ, Figure 1, Bottom of Figure 2
Claims (1)
くとも一方の側に、複数の分離された電極を有する反射
型液晶電気光学装置に関し、高反射率基板側の電極と液
晶の間に誘電体ミラーを備えて成ることを特徴とする反
射型液晶電気光学装置。Regarding a reflective liquid crystal electro-optical device having a liquid crystal sandwiched between a high transmittance substrate and a high reflectance substrate, and a plurality of separated electrodes on at least one side, the electrode on the high reflectance substrate side and the liquid crystal A reflective liquid crystal electro-optical device comprising: a dielectric mirror;
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2307836A JPH04178625A (en) | 1990-11-14 | 1990-11-14 | Reflection type liquid crystal electrooptical device |
EP91105263A EP0451681B1 (en) | 1990-04-05 | 1991-04-03 | Optical apparatus |
DE69128103T DE69128103T2 (en) | 1990-04-05 | 1991-04-03 | Optical device |
US08/359,713 US5497254A (en) | 1990-04-05 | 1994-12-20 | Optical apparatus including a liquid crystal modulator |
US08/571,417 US5682214A (en) | 1990-04-05 | 1995-12-13 | Optical apparatus for controlling the wavefront of a coherent light |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2307836A JPH04178625A (en) | 1990-11-14 | 1990-11-14 | Reflection type liquid crystal electrooptical device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04178625A true JPH04178625A (en) | 1992-06-25 |
Family
ID=17973787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2307836A Pending JPH04178625A (en) | 1990-04-05 | 1990-11-14 | Reflection type liquid crystal electrooptical device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04178625A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6493052B1 (en) | 1998-06-02 | 2002-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal electro-optical device and electronic appliance |
KR100720427B1 (en) * | 2003-01-28 | 2007-05-22 | 엘지.필립스 엘시디 주식회사 | Active Matrix Liquid Crystal Display with High Cell Gap Tolerance And LCD Projector with the Active Matrix LCD |
-
1990
- 1990-11-14 JP JP2307836A patent/JPH04178625A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6493052B1 (en) | 1998-06-02 | 2002-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal electro-optical device and electronic appliance |
US6750931B2 (en) | 1998-06-02 | 2004-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal electro-optical device and electronic appliance |
KR100720427B1 (en) * | 2003-01-28 | 2007-05-22 | 엘지.필립스 엘시디 주식회사 | Active Matrix Liquid Crystal Display with High Cell Gap Tolerance And LCD Projector with the Active Matrix LCD |
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