JPH0416722B2 - - Google Patents

Info

Publication number
JPH0416722B2
JPH0416722B2 JP7602286A JP7602286A JPH0416722B2 JP H0416722 B2 JPH0416722 B2 JP H0416722B2 JP 7602286 A JP7602286 A JP 7602286A JP 7602286 A JP7602286 A JP 7602286A JP H0416722 B2 JPH0416722 B2 JP H0416722B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7602286A
Other versions
JPS62232506A (en
Inventor
Masanori Shintani
Original Assignee
Chugai Ro Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Kogyo Kaisha Ltd filed Critical Chugai Ro Kogyo Kaisha Ltd
Priority to JP7602286A priority Critical patent/JPH0416722B2/ja
Publication of JPS62232506A publication Critical patent/JPS62232506A/ja
Publication of JPH0416722B2 publication Critical patent/JPH0416722B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/32Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing
    • E06B3/34Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing with only one kind of movement
    • E06B3/42Sliding wings; Details of frames with respect to guiding
    • E06B3/46Horizontally-sliding wings
    • E06B3/4681Horizontally-sliding wings made of glass panes without frames
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B7/00Special arrangements or measures in connection with doors or windows
    • E06B7/26Rain or draught deflectors, e.g. under sliding wings also protection against light for doors
JP7602286A 1986-04-01 1986-04-01 Expired - Lifetime JPH0416722B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7602286A JPH0416722B2 (ja) 1986-04-01 1986-04-01

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP7602286A JPH0416722B2 (ja) 1986-04-01 1986-04-01
US07/033,109 US4745291A (en) 1986-04-01 1987-03-31 Apparatus for measuring thickness of layer on substance
GB8707639A GB2189882B (en) 1986-04-01 1987-03-31 Apparatus for measuring the thickness of a surface layer
FR8704573A FR2596509B1 (fr) 1986-04-01 1987-04-01 Appareil pour mesurer l'epaisseur d'une couche sur une surface, d'une couche de peinture par exemple
KR1019870003086A KR900005641B1 (ko) 1986-04-01 1987-04-01 표층두께 측정장치
DE19873710825 DE3710825C2 (ja) 1986-04-01 1987-04-01

Publications (2)

Publication Number Publication Date
JPS62232506A JPS62232506A (en) 1987-10-13
JPH0416722B2 true JPH0416722B2 (ja) 1992-03-25

Family

ID=13593198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7602286A Expired - Lifetime JPH0416722B2 (ja) 1986-04-01 1986-04-01

Country Status (6)

Country Link
US (1) US4745291A (ja)
JP (1) JPH0416722B2 (ja)
KR (1) KR900005641B1 (ja)
DE (1) DE3710825C2 (ja)
FR (1) FR2596509B1 (ja)
GB (1) GB2189882B (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4873430A (en) * 1988-10-25 1989-10-10 International Business Machines Corporation Method and apparatus for optically measuring characteristics of a thin film by directing a P-polarized beam through an integrating sphere at the brewster's angle of the film
US5769540A (en) * 1990-04-10 1998-06-23 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5310260A (en) * 1990-04-10 1994-05-10 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5154512A (en) * 1990-04-10 1992-10-13 Luxtron Corporation Non-contact techniques for measuring temperature or radiation-heated objects
US5258824A (en) * 1990-08-09 1993-11-02 Applied Materials, Inc. In-situ measurement of a thin film deposited on a wafer
DE4030801C2 (de) * 1990-09-28 1998-02-05 Siemens Ag Meßanordnung zur berührungslosen Bestimmung der Dicke und/oder thermischen Eigenschaften von Folien und dünnen Oberflächenbeschichtungen
US5091647A (en) * 1990-12-24 1992-02-25 Ford Motor Company Method and apparatus for measuring the thickness of a layer on a substrate
US5166080A (en) * 1991-04-29 1992-11-24 Luxtron Corporation Techniques for measuring the thickness of a film formed on a substrate
US5155555A (en) * 1991-07-08 1992-10-13 Nalco Chemical Company Monitoring of film formers
US5308161A (en) * 1993-02-11 1994-05-03 Quantum Logic Corporation Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers
US5898181A (en) * 1995-06-30 1999-04-27 Hdi Instrumentation Thin film optical measurement system
US5726455A (en) * 1995-06-30 1998-03-10 Stormedia, Inc. Disk film optical measurement system
DE19542534C1 (de) * 1995-11-15 1997-02-27 Phototherm Dr Petry Gmbh Vorrichtung zum Erzeugen und Erfassen von induzierter Wärmestrahlung
EP1643209B1 (de) * 2004-09-30 2020-11-04 Ansaldo Energia IP UK Limited Messverfahren zum Messen einer Dicke einer Beschichtung
AT506109B1 (de) * 2007-11-20 2010-06-15 Palfinger Systems Gmbh Verfahren zur untersuchung der oberflächenbeschaffenheit von flächigen strukturen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3433052A (en) * 1965-07-26 1969-03-18 Automation Ind Inc Material tester
GB1380725A (en) * 1971-05-10 1975-01-15 Infrared Eng Ltd Optical gauging systems
US3973122A (en) * 1974-06-17 1976-08-03 Ixcon Inc. Measuring apparatus
US3994586A (en) * 1975-10-30 1976-11-30 Aluminum Company Of America Simultaneous determination of film uniformity and thickness
US4027161A (en) * 1976-04-05 1977-05-31 Industrial Nucleonics Corporation Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation
FR2356909B1 (ja) * 1976-06-30 1982-03-05 Irgon Inc
JPS6217167B2 (ja) * 1981-12-29 1987-04-16 Chugai Ro Kogyo Kk
JPS61155804A (en) * 1984-12-28 1986-07-15 Toshiba Electron Syst Kk Optical water film thickness gauge

Also Published As

Publication number Publication date
GB2189882A (en) 1987-11-04
KR900005641B1 (ko) 1990-08-01
DE3710825A1 (de) 1987-10-15
FR2596509A1 (fr) 1987-10-02
KR870010384A (ko) 1987-11-30
JPS62232506A (en) 1987-10-13
FR2596509B1 (fr) 1992-09-18
GB8707639D0 (en) 1987-05-07
DE3710825C2 (ja) 1992-07-23
GB2189882B (en) 1989-11-29
US4745291A (en) 1988-05-17

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