JPH0413954A - Defect inspecting device for web - Google Patents

Defect inspecting device for web

Info

Publication number
JPH0413954A
JPH0413954A JP11629090A JP11629090A JPH0413954A JP H0413954 A JPH0413954 A JP H0413954A JP 11629090 A JP11629090 A JP 11629090A JP 11629090 A JP11629090 A JP 11629090A JP H0413954 A JPH0413954 A JP H0413954A
Authority
JP
Japan
Prior art keywords
defect
web
light
foreign matter
emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11629090A
Other languages
Japanese (ja)
Inventor
Tatsuo Takase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP11629090A priority Critical patent/JPH0413954A/en
Publication of JPH0413954A publication Critical patent/JPH0413954A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To automatically quantitatively detect the positions and sizes of a defect and a foreign matter by simultaneously detecting the defect on a material to be inspected and the matter on the material to be detected by separate light sources, correcting one as a bright pattern image, and collecting the other as a dark pattern image.
CONSTITUTION: The upper surface of a web is emitted obliquely with an illumination light, the lower surface of the web is simultaneously emitted with a weak transmission light, and scattered lights and transmitted lights at this time are imaged by a CCD camera through an objective lens 14. A defect 11A generated on the web protrudes on the surface like a lens. Thus, the weak transmission light is emitted and hence most light passed through the defect is refracted, and its optical axis is deviated out of the direction of the lens 14. Accordingly, only the defect becomes a low intensity. A foreign matter 11B adhered to the web generates a scattered light by strong obliquely projected illumination high intensity. If one visual field of the material to be inspected is observed by the camera in this principle, the foreign matter is glared brightly, and the defect is observed to be dark and is discriminated.
COPYRIGHT: (C)1992,JPO&Japio
JP11629090A 1990-05-03 1990-05-03 Defect inspecting device for web Pending JPH0413954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11629090A JPH0413954A (en) 1990-05-03 1990-05-03 Defect inspecting device for web

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11629090A JPH0413954A (en) 1990-05-03 1990-05-03 Defect inspecting device for web

Publications (1)

Publication Number Publication Date
JPH0413954A true JPH0413954A (en) 1992-01-17

Family

ID=14683389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11629090A Pending JPH0413954A (en) 1990-05-03 1990-05-03 Defect inspecting device for web

Country Status (1)

Country Link
JP (1) JPH0413954A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001311693A (en) * 2000-04-28 2001-11-09 Nitto Kogyo Co Ltd Inspection apparatus
WO2017104575A1 (en) * 2015-12-16 2017-06-22 株式会社リコー Testing system and testing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001311693A (en) * 2000-04-28 2001-11-09 Nitto Kogyo Co Ltd Inspection apparatus
WO2017104575A1 (en) * 2015-12-16 2017-06-22 株式会社リコー Testing system and testing method

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