JPH0413876U - - Google Patents

Info

Publication number

JPH0413876U

JPH0413876U JP5434890U JP5434890U JPH0413876U JP H0413876 U JPH0413876 U JP H0413876U JP 5434890 U JP5434890 U JP 5434890U JP 5434890 U JP5434890 U JP 5434890U JP H0413876 U JPH0413876 U JP H0413876U

Authority

JP

Japan

Prior art keywords

chamber

diaphragm

pressure regulating

inlet

outlet

Prior art date

1990-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000001105 regulatory effect Effects 0.000 claims description 4
• 239000012530 fluid Substances 0.000 claims description 2
• 238000006073 displacement reaction Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000001914 filtration Methods 0.000 description 2