JPH041341U - - Google Patents

Info

Publication number
JPH041341U
JPH041341U JP4052290U JP4052290U JPH041341U JP H041341 U JPH041341 U JP H041341U JP 4052290 U JP4052290 U JP 4052290U JP 4052290 U JP4052290 U JP 4052290U JP H041341 U JPH041341 U JP H041341U
Authority
JP
Japan
Prior art keywords
clean room
exhaust
air
blower
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4052290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4052290U priority Critical patent/JPH041341U/ja
Publication of JPH041341U publication Critical patent/JPH041341U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP4052290U 1990-04-16 1990-04-16 Pending JPH041341U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4052290U JPH041341U (US07534539-20090519-C00280.png) 1990-04-16 1990-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4052290U JPH041341U (US07534539-20090519-C00280.png) 1990-04-16 1990-04-16

Publications (1)

Publication Number Publication Date
JPH041341U true JPH041341U (US07534539-20090519-C00280.png) 1992-01-08

Family

ID=31550383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4052290U Pending JPH041341U (US07534539-20090519-C00280.png) 1990-04-16 1990-04-16

Country Status (1)

Country Link
JP (1) JPH041341U (US07534539-20090519-C00280.png)

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