JPH0412649U - - Google Patents

Info

Publication number
JPH0412649U
JPH0412649U JP5248690U JP5248690U JPH0412649U JP H0412649 U JPH0412649 U JP H0412649U JP 5248690 U JP5248690 U JP 5248690U JP 5248690 U JP5248690 U JP 5248690U JP H0412649 U JPH0412649 U JP H0412649U
Authority
JP
Japan
Prior art keywords
main body
lid
wafer container
protrusion
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5248690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5248690U priority Critical patent/JPH0412649U/ja
Publication of JPH0412649U publication Critical patent/JPH0412649U/ja
Pending legal-status Critical Current

Links

JP5248690U 1990-05-18 1990-05-18 Pending JPH0412649U (US08066781-20111129-C00013.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5248690U JPH0412649U (US08066781-20111129-C00013.png) 1990-05-18 1990-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5248690U JPH0412649U (US08066781-20111129-C00013.png) 1990-05-18 1990-05-18

Publications (1)

Publication Number Publication Date
JPH0412649U true JPH0412649U (US08066781-20111129-C00013.png) 1992-01-31

Family

ID=31572830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5248690U Pending JPH0412649U (US08066781-20111129-C00013.png) 1990-05-18 1990-05-18

Country Status (1)

Country Link
JP (1) JPH0412649U (US08066781-20111129-C00013.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780440B2 (en) 2004-10-19 2010-08-24 Canon Anelva Corporation Substrate supporting/transferring tray

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780440B2 (en) 2004-10-19 2010-08-24 Canon Anelva Corporation Substrate supporting/transferring tray

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