JPH04121474U - Air cylinder stroke control device - Google Patents

Abstract

(57) [Summary] [Purpose] To easily and quickly perform variable adjustment of the stroke length of a piston by remote control, to improve workability, to accurately obtain a predetermined stroke length, and to be dust-proof and explosion-proof. It has excellent properties and is particularly effective in cases where cleanliness is desired, such as in the semiconductor manufacturing process field. [Structure] The piston 3 is located in the cylinder 1 to which working air is applied to both sides of the piston 3, and is used to operate the switching control means 11 that switches and operates the air applying means 10.
The stroke position detection means for detecting the stroke position of the piston 3 is operably connected to the piston 3 so as to convert the mechanical displacement amount accompanying the reciprocating movement of the piston 3 into an electrical displacement amount, and the switching control means 11 is connected to the piston 3 based on the electrical displacement amount. It consists of a displacement sensor 12 that operates the .

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is an engine that applies operating air to both sides of the piston to reciprocate the piston. The present invention relates to a stroke control device for an arc cylinder.

0002

[Conventional technology]

The stroke control device for this type of air cylinder is made on both sides of the piston. It is located in a cylinder with a partitioned movement chamber, and the working air is controlled by operating a directional control valve, etc. is applied to both working chambers to make the piston reciprocate, and the air cylinder Sensors such as microswitches are attached to both ends of the card, and this sensor allows the direction to be adjusted. Mechanically detects the piston stroke position for operating control valves, etc. In other words, there are conventionally known devices that operate directional control valves, etc. based on the detection signal. be.

0003 Also, instead of a sensor, a timer is used to set the pitch corresponding to the desired stroke length. A device that operates a directional control valve, etc. based on the time required for the stone to reciprocate. is also publicly known.

0004 An air cylinder equipped with such a stroke control device is, for example, made of semiconductor material. Dispensers used in the process of injecting photoresist in the manufacturing process field. It is used to drive a bellows pump known as a bellows pump. This dispenser is The bellows is integrally connected to the piston rod of the air cylinder piston. , it is possible to reciprocate and expand and contract, and the stroke length of the piston, that is, the tongue The flow rate corresponds to the stroke length of the bellows. The fluid that has entered the pump chamber is discharged from the discharge port.

[0005]

[Problem that the idea aims to solve]

By the way, in the conventional air cylinder stroke control device mentioned above, the microphone Adjust the stroke length of the piston if a sensor such as a rotor switch is installed. However, the sensor installation position must be changed each time, making the work time-consuming. There were problems such as being difficult, time consuming, and poor workability. .

[0006] In particular, in the field of semiconductor manufacturing processes, cleanliness is desired; It is desirable to avoid workers entering the area as much as possible, and to make it unmanned and automated. Dispensers used in this field are equipped with such a stroke control device. When using an air cylinder with a Adjustment of the rake length has no choice but to be carried out inside the clean area, and as a result of the work, There were problems with the cleanliness, such as the generation of dust.

[0007] In addition, with a timer, the volume of air changes due to changes in its pressure, temperature, etc. The volume of working air applied to both sides of the piston at a given time varies accordingly. becomes unstable, the desired stroke length cannot be obtained accurately, and the When using an air cylinder equipped with such a stroke control device, the flow There were problems such as deterioration in the quantitative nature of body supply.

[0008] In addition, an air cylinder is used to reciprocate the bellows in the dispenser. It is electrically driven using a stepping motor and based on pulse signals without using a motor. It is conceivable to have a bellows that expands and contracts by reciprocating with a desired stroke, but this According to When supplying solvent-based liquids, etc., because they are electrically driven, explosion-proof Since a bearing is required for the rotating part, dust is generated from this bearing part and There were other problems, such as impeding lean implementation.

[0009] The present invention was devised in view of the above problems, and its purpose is to Adjust the stroke length easily and quickly without remote control. It has good properties, accurately obtains the specified stroke length, and has excellent dust-proof and explosion-proof properties. , cleanliness is desired, such as in the semiconductor manufacturing process field, and Air cylinders are effective when unmanned or automated operations are required within the area. To provide a stroke control device for da.

0010

[Means to solve the problem]

In order to solve the above conventional problems, the present invention uses a piston to Air supply means for supplying working air to the working chamber of the cylinder divided on both sides of the cylinder. and is connected to the air supply means to switch and apply working air to both the working chambers. a switching control means operable to reciprocate the piston; Detecting the stroke position of the piston connected to operate the switching control means. A stroke control device for an air cylinder, comprising a stroke position detection means. In this, the stroke position detecting means is configured to detect mechanical force associated with reciprocating movement of the piston. operatively connected to the piston to convert the displacement into an electrical displacement; characterized by a configuration comprising a displacement sensor that operates the switching control means based on the amount. This paper proposes a stroke control device for an air cylinder.

[0011]

[Effect]

With the above configuration, in the air cylinder stroke control device according to the present invention, the front The stroke position detection means electrically detects the amount of mechanical displacement accompanying the reciprocating movement of the piston. is operatively connected to the piston to convert the electrical displacement into an electrical displacement. The stroke length of the piston is determined by the displacement sensor that operates the switching control means. When making variable adjustments to the sensor height, there is no need to change the sensor mounting position each time. Electricity that operates the switching control means at a timing that provides a stroke length of Just by changing the target displacement setting, adjustment work can be done easily and quickly by remote control. Good workability, regardless of air volume fluctuations caused by changes in pressure, temperature, etc. It can accurately obtain the specified stroke length, has excellent dustproof and explosion-proof properties, and is especially suitable for semiconductors. Cleanliness is desired, such as in the manufacturing process field, and within that clean area This is effective when unmanned or automated systems are required.

0012

【Example】 The following is a drawing showing an embodiment of the air cylinder stroke control device according to the present invention. This will be explained in detail with reference to the following.

[0013] Figure 1 shows the operating principle of an air cylinder that uses an air cylinder to drive the dispenser. It shows. 1 in the figure is a cylinder, inside which a piston 3 is housed. At the same time, working chambers 4 and 5 are defined on both sides by the piston 3. .

[0014] A working air source 7 is connected to a regulator 8 through a conduit 6 to the working chamber 4 on the left side of the figure. Working air reduced to a constant pressure is applied to the right working chamber 5 through the Working air is supplied through line 9 from a common working air source 7 via a directional control valve 10. The air supply means for supplying working air to the working chambers 4 and 5 is configured. It is designed to be completed.

[0015] The directional control valve 10 is electrically connected to a controller constituting a switching control means. It is controlled by rollers 11. The controller 11 controls the left side of the piston 3. When moving, the working air source 7 and the working chamber 5 on the right side are connected to each other, and air is supplied from the working chamber 4 on the left side. High-pressure working air is applied to the right working chamber 5, and air is applied to the right side of the piston 3. When moving, the right working chamber 5 is released to the atmosphere, and the right working chamber 4 is moved from the left working chamber 4 to the atmosphere. The directional control valve 10 is operated so that the pressure of The piston 3 is now reciprocated from side to side by being switched to the movement chambers 4 and 5 and applied. There is.

[0016] On the right side of the cylinder 1, there is a displacement sensor, for example, which constitutes the stroke position detection means. , a differential transformer 12 are provided. The differential transformer 12 includes a cylindrical coil 13 A rod-shaped core 14 reciprocates left and right inside, and the mechanical displacement of the core 14 and the coil 1 3 exhibits a proportional relationship with the amount of electrical displacement that occurs at the piston 3. At the right end of the stone rod 2, there is an electric variable that changes the amount of mechanical displacement caused by the reciprocating movement of the piston 3. The controller 1 is operatively connected to convert the electrical displacement into an electrical displacement. 1 is now operational. That is, in order to operate the controller 11 The stroke position of is detected by the amount of electrical displacement, and, for example, when the stroke position is When the directional control valve 10 is operated to communicate the dynamic air source 7 and the right working chamber 5, Both are directed so that the working air source 7 is opened to atmospheric pressure at the electrical displacement amount b. The controller 11 is operated in a manner that operates the control valve 10, and the electrical displacement amounts a and b are The piston 3 is moved back and forth with a stroke length corresponding to the mechanical displacement amount of the core 14 corresponding to It is possible to return to operation. Note that the displacement sensor is not limited to the differential transformer 12; A potentiometer or the like may be used instead.

[0017] A pump portion 15 of the dispenser is provided on the left side of the cylinder 1. Pon The pipe portion 15 communicates with the suction port 16 and the discharge port 17 and is formed within the bellows 19. The closed end of the bellows 19 is connected to the piston of the piston 3. By being directly connected to the left end of the piston rod 15, the bellows The pump 19 reciprocates and expands and contracts, and the fluid in the tank 21 is pumped from the suction port 16 to the pump chamber 2. 0, and the fluid entering the pump chamber 20 is drawn into the stroke length of the piston 3 The liquid is discharged from the discharge port 17 at a discharge amount corresponding to the discharge amount.

[0018] Note that an electropneumatic regulator is provided in the pipe line 9 between the working air source 7 and the directional control valve 10. A controller 22 is arranged, and based on the electrical signal set and input to the controller 11, and variably adjusts the pressure applied to the right working chamber 5 via the interface 23. However, the fluid can be discharged at a discharge speed or discharge time depending on the pressure.

[0019] With the above configuration, the stroke position detection means can be used as a mechanical operatively connected to the piston 3 to convert the amount of physical displacement into the amount of electrical displacement. It is composed of a differential transformer 12 that operates a controller 11 based on the amount of displacement. Therefore, when making variable adjustments to the stroke length of piston 3, it is necessary to install the sensor each time. Control at the timing to obtain the desired stroke length without having to change the stroke position. Adjustment work can be done simply by changing the setting of the amount of electrical displacement that activates the troller 11. Easily and quickly, by remote control, has good workability, and is resistant to changes in pressure, temperature, etc. Accurately obtain the desired stroke length regardless of the volume fluctuations of the working air caused by It also has excellent dust-proof and explosion-proof properties, especially in the clean semiconductor manufacturing process field. is desired, and unmanned and automated systems are required within the cleaned area. It is effective when

[0020] Although the present invention has been explained above with reference to embodiments, the present invention is not limited to the above embodiments. The present invention is not limited to the above, and various changes can be made without changing the gist of the present invention.

[0021]

[Effect of the idea]

As explained above, the air cylinder stroke control device according to the present invention If so, the stroke position detection means detects the mechanical displacement caused by the reciprocating movement of the piston. operatively connected to the piston to convert the amount into an electrical displacement; The displacement sensor operates the switching control means based on the piston stroke. When making variable adjustments to the rotor length, it is necessary to change the sensor mounting position each time. The switching control means is actuated at the timing when the desired stroke length is obtained. Adjustments can be easily and quickly performed remotely by simply changing the electrical displacement settings. It has excellent workability and is resistant to air volume fluctuations caused by changes in pressure, temperature, etc. Regardless of the situation, the specified stroke length can be obtained accurately, and the dustproof and explosion-proof properties are excellent. , cleanliness is desired, such as in the semiconductor manufacturing process field, and Various effects such as being effective when unmanned or automation is required within the area. play the fruit.

[Brief explanation of drawings]

FIG. 1 is an operational principle diagram showing an embodiment of an air cylinder stroke control device according to the present invention applied to a dispenser.

[Explanation of symbols]

1 cylinder 3 Piston 4 Left side working chamber 5 Right side working chamber 8 Regulator 10 Directional control valve 11 Controller 12 Differential transformer

──────────────────────────────────────────────── ─── Continued from front page (51) Int.Cl. ⁵ Identification code Internal reference number FI Technical display location G05D 7/06 Z 8811-3H

Claims (1)

[Scope of utility model registration request] 1. An air supply means for supplying working air to working chambers of a cylinder defined on both sides of the piston by a piston, and an air supply means connected to the air supply means for switching and supplying working air to both working chambers. a stroke position detection means connected to the switching control means and detecting the stroke position of a piston for operating the switching control means; In the control device, the stroke position detection means is operatively connected to the piston so as to convert the amount of mechanical displacement accompanying the reciprocation of the piston into an amount of electrical displacement, and operates the switching control means based on the amount of electrical displacement. 1. A stroke control device for an air cylinder, comprising a displacement sensor.