JPH0411227A - Thin film two-terminal element - Google Patents

Thin film two-terminal element

Info

Publication number
JPH0411227A
JPH0411227A JP11486790A JP11486790A JPH0411227A JP H0411227 A JPH0411227 A JP H0411227A JP 11486790 A JP11486790 A JP 11486790A JP 11486790 A JP11486790 A JP 11486790A JP H0411227 A JPH0411227 A JP H0411227A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
etc
film
patterned
deposited
obtain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11486790A
Inventor
Kenji Kameyama
Yuji Kimura
Hitoshi Kondo
Hidekazu Ota
Masayoshi Takahashi
Katsuyuki Yamada
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To design a device over a wide range and to eliminate variance in element characteristics by using an insulating film (hard carbon film) which has superior film controllability and mechanical strength and also has a low dielectric constant.
CONSTITUTION: On the transparent insulating substrate 11 of glass, plastic, etc., a conductive thin film of Al, Ta, etc., is deposited by vapor deposition method, sputtering method, etc., and patterned to obtain a lower conductor 12. Then the hard carbon film is deposited by a plasma CVD method, etc., and patterned by dry etching to obtain an insulating film 13. Then zinc oxide ZnO is deposited by the sputtering method and patterned to obtain an upper conductor 14, which serves also as a pixel electrode. Consequently, the degree of freedom of wide-range device design is increased and the uniformity of the element characteristics can be improved.
COPYRIGHT: (C)1992,JPO&Japio
JP11486790A 1990-04-27 1990-04-27 Thin film two-terminal element Pending JPH0411227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11486790A JPH0411227A (en) 1990-04-27 1990-04-27 Thin film two-terminal element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11486790A JPH0411227A (en) 1990-04-27 1990-04-27 Thin film two-terminal element

Publications (1)

Publication Number Publication Date
JPH0411227A true true JPH0411227A (en) 1992-01-16

Family

ID=14648680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11486790A Pending JPH0411227A (en) 1990-04-27 1990-04-27 Thin film two-terminal element

Country Status (1)

Country Link
JP (1) JPH0411227A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7897972B2 (en) 1992-12-09 2011-03-01 Semiconductor Energy Laboratory Co., Ltd. Electronic circuit
JP5285438B2 (en) * 2007-02-16 2013-09-11 株式会社カネカ With a transparent conductive film substrate and a manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7897972B2 (en) 1992-12-09 2011-03-01 Semiconductor Energy Laboratory Co., Ltd. Electronic circuit
US8294152B2 (en) 1992-12-09 2012-10-23 Semiconductor Energy Laboratory Co., Ltd. Electronic circuit including pixel electrode comprising conductive film
JP5285438B2 (en) * 2007-02-16 2013-09-11 株式会社カネカ With a transparent conductive film substrate and a manufacturing method thereof

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