JPH04110167U - Surplus coating liquid recovery device for rotary processing equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent the inside of the tank storage container 20 from being contaminated by the surplus coating liquid Q dripping from the lower end of the cup drain pipe 11 when replacing the surplus coating liquid recovery tank 15. [Configuration] The lower end of the cup drain pipe 11 is connected to the tank storage container 20.
The surplus coating liquid collection tank 15 is slidably accommodated in the storage container 20, a slider 34 is provided in the gap near the back of the tank storage container 20, a droplet collection container 38 is placed on the slider 34, and the slider 34 is configured to be able to move forward and backward in conjunction with the operation of taking in and taking out the excess coating liquid recovery tank 15. When the slider 34 is in the forward position, the droplet collection container 38 is placed opposite the lower end of the cup drain pipe 11, and when the slider 34 is in the retracted position, the collection port 16 of the surplus coating liquid collection tank 15 is placed opposite the lower end of the cup drain pipe 11. When replacing the excess liquid recovery tank 15,
The slider 34 is moved back and forth in a state in which the lower end of the cup drain pipe 11 overlaps the recovery port 16 of the surplus coating liquid recovery tank 15 or the upper side of the droplet recovery container 38.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention relates to a surplus coating liquid recovery device for rotary processing equipment, and more specifically for semiconductors. Used for surface treatment of substrates to be processed (hereinafter simply referred to as substrates) such as substrates and glass substrates for LCDs. Used to collect waste photoresist solution, excess coating solution such as developer solution and cleaning solution. This invention relates to a surplus coating liquid recovery device for a rotary processing device.

0002

[Conventional technology]

This type of surplus coating liquid recovery device is conventionally known, for example, as shown in FIG. Ru. It includes a cup drain pipe 51 that communicates with the spin cup 5 of the rotary processing device 1, and Excess coating liquid recovery tank for recovering excess coating liquid Q flowing down from the cup drain pipe 51. 55 and a tank insertion port 61 that can be opened and closed, and accommodates the excess coating liquid recovery tank 55. The lower end of the cup drain pipe 51 is connected to the tank storage container 60. At the same time, the surplus coating liquid collection tank 55 is inserted into the tank storage container 60. It is constructed so that it can slide forward and backward freely, and the collection port 56 of the excess coating liquid collection tank 55 is connected to the cup. The surplus coating liquid Q is collected by facing the plunger lower end 52 of the liquid drain pipe 51, and the tank is An exhaust port 65 is provided in the tank storage container 60 to leak from the surplus coating liquid recovery tank 55. It is configured to forcibly exhaust excess coating liquid vapor G. In addition, the symbols in Figure 4 2 is a spin chuck that holds the substrate W by suction and rotates; 3 is a spin chuck that rotates the spin chuck 2; A drive motor rotates and 4 is a treatment liquid discharge nozzle. Also, in Spin Cup 5 is provided with a separate exhaust port (not shown) to remove excess coating liquid vapor in the spin cup 5. It is configured to forcefully exhaust the air separately.

0003

[Problem that the idea aims to solve]

In the above conventional example, when replacing the surplus coating liquid collection tank 55, the inside of the cup drain pipe 51 The remaining excess coating liquid Q drips from the lower end 52 of the cup drain pipe 51 and If the inside of the storage container 60 becomes dirty or the excess coating liquid solidifies, the surplus coating liquid collection tank 55 It becomes difficult to attach and detach the liquid, and sometimes the excess coating liquid collection tank 55 gets on top of the lump. The drain sensor malfunctions as if the collection tank 55 is full. There were some inconveniences such as The present invention was made taking these circumstances into consideration, and the surplus coating liquid collection tank 5 When replacing the cup drain pipe 51, excess coating liquid Q dripping from the lower end 52 of the cup drain pipe 51 The technology is designed to prevent the inside of the tank storage container 60 from becoming dirty and from causing the above-mentioned inconveniences. Take it as a challenge.

0004

[Means to solve the problem]

The present invention is configured as follows to solve the above problems. In other words, the cup drain pipe that communicates with the spin cup of the rotary processing device and the cup drain A surplus coating liquid recovery tank that collects surplus coating liquid flowing down from the liquid pipe, and a surplus coating liquid circulation tank. It consists of a tank storage container that accommodates a storage tank that can be taken in and out freely, and a cup drain pipe. Insert the lower end into the tank storage container and remove the excess coating liquid collection tank. It is constructed so that it can slide forward and backward into the storage container, and the collection port of the surplus coating liquid collection tank is cut into a container. A rotary treatment device configured to collect excess coating liquid in opposition to the plunger lower end of the liquid drainage pipe. In the surplus coating liquid recovery device of the process equipment, A slider is installed in the gap near the back of the tank storage container, and the slider is used to drain excess coating liquid. Can move forward and backward between the forward and backward positions in conjunction with the movement of the storage tank in and out. At the same time, a droplet collection container is removably placed on the slider. In the advanced position of the slider, the drop collection container faces the plunger lower end of the cup drain pipe, When the slider is in the retracted position, the collection port of the excess coating liquid collection tank is inserted into the cup drain pipe. The cup is configured to face the lower end, and when the slider moves forward and backward, the cup If the lower end of the drain pipe is connected to the collection port of the excess coating liquid collection tank or the top of the droplet collection container, It is characterized by being constructed so that it has a burlap structure.

[0005]

[Effect]

In this invention, a slider is provided in the gap near the back of the tank storage container, and the slider - moves between the forward position and the backward position in conjunction with the movement in and out of the surplus coating liquid collection tank. Move forward and backward. A droplet collection container is removably placed on the slider to remove excess liquid. When the liquid recovery tank is stored in the tank storage container, the slider collects excess coating liquid. It is pushed away by the recovery tank and is in the retracted position, and in this position excess coating liquid is collected. A collection port of the tank faces the plunger lower end of the cup drain pipe and collects excess coating liquid. In addition, if the surplus coating liquid collection tank is taken out of the tank storage container, the slurry The drainer is in the forward position, in which the drop collection container is located at the lower end of the cup drain. Collect excess coating liquid dripping from the cup drain pipe in a droplet collection container. . When the slider moves forward or backward when replacing the surplus coating liquid collection tank, the cover The lower end of the drop drain pipe is located above the collection port of the excess coating liquid collection tank or the droplet collection container. Move forward/backward while overlapping. This allows excess coating liquid to be collected and stored. There will be no spillage outside the container, and there will be no risk of contaminating the inside of the tank storage container.

[0006]

【Example】

Embodiments of the present invention will be described below based on the drawings. FIG. 1 is a longitudinal sectional view showing a first embodiment of a surplus coating liquid recovery device according to the present invention. , numeral 10 indicates the entire surplus coating liquid recovery device. This surplus coating liquid recovery device 10 is a spin cup of a rotary processing device 1 similar to that shown in FIG. A cup drain pipe 11 communicating with the cup drain pipe 11 and excess application flowing down from the cup drain pipe 11. It has a surplus coating liquid recovery tank 15 for recovering liquid Q and a tank insertion port 21 that can be opened and closed. a tank storage container 20 that accommodates the excess coating liquid recovery tank 15 in a manner that allows it to be taken in and out; A slider 34 provided in a gap near the back of the tank storage container 20 and a slider 34 and a droplet collection container 38 removably placed on top of the droplet collection container 34. In addition to collecting excess coating liquid Q in the tank 15, when replacing the tank, the cup drain pipe 1 The droplet collection container 38 collects the excess coating liquid Q dripping from the droplet collection container 38, An exhaust port 25 is provided in the tank storage container 20 to prevent leakage from the surplus coating liquid recovery tank 15. The coating liquid vapor G is forcibly evacuated.

[0007] The cup drain pipe 11 constitutes a drain pipe main body 11a and a lower end portion of the cup drain pipe 11. and an L-shaped communication member 12. This communication member 12 is connected to the tank storage container 20 A female communication port 12 is fixed to the upper rear side and formed at the upper end of the communication member 12. The lower end of the drain pipe main body 11a is fitted into the hole a, and the lower end of the drain pipe main body 11a is fitted into the The male communication port 12b is a collection port of the surplus coating liquid collection tank 15 in the tank storage container 20. It is now within 16.

[0008] On the front side of the tank storage container 20, there is an insertion slot for inserting and removing the excess coating liquid recovery tank 15. A mouth 21 is open, and an opening/closing lid 22 is hinged to this insertion opening 21. So At the bottom of the tank storage container 20, there is a mounting stand 30 for the excess coating liquid recovery tank 15. Surplus coating liquid recovery tank 1 is provided so as to be slidable via a slide rail 31. 5 is configured to be slid in and out. Note that the reference numeral 24 in Figure 1 26 is one tank holder fixed to the opening/closing lid 22, and 26 is the rear of the tank storage container 20. The other tank holder 27 fixed to the wall indicates the presence or absence of the excess coating liquid recovery tank 15. It is a sensor that detects.

[0009] On the other hand, the recovery port 16 of the surplus coating liquid recovery tank 15 is connected to the male part of the cup drain pipe 11. It is formed to face the communication port (hereinafter referred to as the plunger lower end portion) 12b. In other words, The sliding direction of the plunger lower end 12b of the liquid drain pipe 11 and the surplus coating liquid recovery tank 15 (arrow A), and place the surplus coating liquid collection tank 15 into the tank storage container 20. By sliding it inward, the plunger lower end 12b will be able to drain excess coating liquid. It is configured to fit loosely into the excess coating liquid collection port 16 of the collection tank 15. There is.

0010 The slider 34 is provided in a gap near the back inside the tank storage container 20. -34 is fixed to the back wall 20a of the tank storage container 20, as shown in FIGS. 1 and 2. The slide support 35 is provided so as to be slidable on the slide support 35. the slide body 36 and the biasing force that biases the slide body 36 toward the tank insertion port 21 side. A spring 37 and a stopper (not shown) that restricts the slide body 36 to the forward position. The slide body 36 moves in and out of the excess coating liquid recovery tank 15. between the forward position shown by the solid line in Figure 2 and the backward position shown by the solid line in Figure 1. It is configured to move forward and backward.

[0011] The droplet collection container 38 is removably arranged on the slide body 36 to collect excess coating liquid. When the tank 15 is stored in the tank storage container 20, the slide body 36 is It is pushed away by the surplus coating liquid collection tank 15 and is in the retracted position, and the cup drain pipe 1 The protruding lower end 12b of 1 fits into the recovery port 16 of the excess coating liquid recovery tank 15, It is configured to collect the surplus coating liquid Q, and in this state, the surplus coating liquid recovery tank 1 5 so that the tip of the collection port 16 overlaps the top of the droplet collection container 38. It is configured.

0012 In addition, when taking out the excess coating liquid recovery tank 15 outside the tank storage container 20, The slide body 36 is urged toward the tank insertion port 21 side by the urging means 37 and moved to the forward position. In this advanced position, as shown in FIG. 1, and drips from the lower plunge end 12b of the cup drain pipe. The droplet collection container 38 is configured to collect the excess coating liquid that falls. and s When moving the ride main body 36 from the backward position to the forward position and from the forward position to the backward position When moving, the tip of the recovery port 16 of the surplus coating liquid recovery tank 15 is used as a droplet recovery container. The drop collection container 38 is configured to move forward in a state where it overlaps the upper side of the container 38. It is. That is, the lower end of the cup drain pipe 11 collects the surplus coating liquid collection tank 15. This will overlap the top of the spout 16 or the drop collection container 38. to this Therefore, when replacing the surplus coating liquid collection tank 15, the surplus coating liquid Q leaked out of the collection container 38. The inside of the tank storage container 20 will not be contaminated by dripping or falling.

[0013] FIG. 3 is a vertical cross-sectional view of the main parts showing a second embodiment of the surplus coating liquid recovery device according to the present invention. It is. In this embodiment, the lower end 11b of the cup drain pipe 11 is connected to the tank storage container 2. 0 vertically, forming the recovery port 16 of the surplus coating liquid recovery tank 15 upward. Then, insert the funnel 16A into the collection port 16 and remove the excess paint flowing down from the cup drain pipe 11. It is configured to collect the cloth liquid Q. In this case, the funnel 16A is used to collect excess coating liquid. It constitutes a part of the recovery port 16 of the collection tank 15. In addition, slider 34 and other The configuration is similar to that of the first embodiment.

[0014] In each of the above embodiments 1 and 2, the slider 34 is connected to the slide support 35. It is composed of a ride body 36, a biasing spring 37, and a stopper (not shown). However, the present invention is not limited to this and may be implemented with appropriate changes. I can do that. In other words, it has a structure that slides in conjunction with the excess coating liquid collection tank. It's good to have. Also, slide the excess coating liquid collection tank 15 into the tank storage container. The configuration for loading and unloading can also be implemented with appropriate changes.

[0015]

[Effect of the idea]

As is clear from the above explanation, in the present invention, there is a slot in the gap at the back of the tank storage container. A slider is installed, and the slider is moved forward in conjunction with the movement of taking in and out of the excess coating liquid collection tank. It is configured to move forward and backward between the forward and backward positions, and the droplets are stored on the slider. The container is removably arranged, and the bottom end of the cup drain pipe is the collection port of the excess coating liquid collection tank. Or the droplet collection container moves forward or backward while overlapping the top of the droplet collection container. Since the configuration is configured to No more dripping outside the container and contaminating the inside of the tank storage container. This allows you to It becomes difficult to attach and remove the excess coating liquid collection tank, and the excess coating liquid collection tank becomes stuck due to the lump of coating liquid. This eliminates inconveniences such as the drain sensor malfunctioning due to the tank riding up and tilting. Wear.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of a surplus coating liquid recovery device according to the present invention.

FIG. 2 is an explanatory diagram of the operation of the slider according to the present invention.

FIG. 3 is an operation explanatory diagram showing another embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view of a conventional surplus coating liquid recovery device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1...Rotation processing device, 5...Spin cup, 10...Excess coating liquid collection device, 11...Cup drain pipe, 12b...Plunging lower end of cup drain pipe, 15...
Surplus coating liquid recovery tank, 16... Recovery port of surplus coating liquid recovery tank, 20... Tank storage container, 21... Tank insertion port of tank storage container, 34... Slider, 38... Droplet recovery container, Q... Surplus coating liquid, W …substrate.

──────────────────────────────────────────────── ─── Continued from front page (51) Int.Cl. ⁵ Identification code Internal reference number FI Technical display location H01L 21/304 341 S 8831-4M 21/308 Z 7342-4M

Claims (1)

[Scope of utility model registration request] [Claim 1] A cup drain pipe communicating with a spin cup of a rotary processing device, a surplus coating liquid collection tank for collecting surplus coating liquid flowing down from the cup drainage pipe, and a surplus coating liquid collection tank that can be freely inserted and removed. The lower end of the cup drain pipe protrudes into the tank storage container, and the excess coating liquid collection tank is configured to be able to slide forward and backward into the tank storage container, and the excess coating liquid collection tank is In a surplus coating liquid recovery device of a rotary processing device configured to collect surplus coating liquid by arranging the recovery port to face the plunger lower end of the cup drain pipe, a slider is provided in a gap near the back of the tank storage container, and the slider It is constructed so that it can be moved forward and backward between forward and backward positions in conjunction with the movement of taking in and out of the surplus coating liquid collection tank, and a droplet collection container is removably arranged on the slider, and the droplet collection container is configured to be removable when the slider is in the forward position. The container faces the plunger lower end of the cup drain pipe,
When the slider is in the retracted position, the collection port of the surplus coating liquid collection tank is configured to face the plunger lower end of the cup drain pipe, and when the slider moves forward and backward, the lower end of the cup drain pipe collects excess coating liquid. A surplus coating liquid recovery device for a rotary processing device, characterized in that it is configured to overlap the top of a recovery port of a tank or a droplet recovery container.