JPH04103937A - Controlling method for air volume in clean room - Google Patents

Controlling method for air volume in clean room

Info

Publication number
JPH04103937A
JPH04103937A JP21981890A JP21981890A JPH04103937A JP H04103937 A JPH04103937 A JP H04103937A JP 21981890 A JP21981890 A JP 21981890A JP 21981890 A JP21981890 A JP 21981890A JP H04103937 A JPH04103937 A JP H04103937A
Authority
JP
Japan
Prior art keywords
ffus
air volume
fan
motor
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21981890A
Other languages
Japanese (ja)
Other versions
JP2673835B2 (en
Inventor
Atsushi Takahashi
Takaki Yoshida
Hiroshi Gomi
Satoru Chirifu
Katsutake Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP21981890A priority Critical patent/JP2673835B2/en
Publication of JPH04103937A publication Critical patent/JPH04103937A/en
Application granted granted Critical
Publication of JP2673835B2 publication Critical patent/JP2673835B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To enable energy-saved operation at a low equipment cost by controlling the number of fan filter units(FFUs) to be driven and blowing-off velocity by a remote control of an operation terminal which carries out ON-OFF operation and a tap switching operation of a fan motor of each of the FFUs.
CONSTITUTION: A fan 9 and a HEPA or ULPA filter 10 are arranged in a casing 8, and a single-phase motor 11 which changes the rotation number at multi-stages by tap switching is used as a fan motor for the FFUs. An operation terminal 12 which carries out ON-OFF operation and a tap switching operation of the motor 11 is mounted on each of the FFUs and transfer wiring 13 is provided for transferring operation commands to each of the operation terminals. On the other hand, a host computer 17 is provided with detected values of temperature, humidity, air volume, flow volume and the like of each clean room, number of persons, degree of cleanness, fire signal, gas alarm signal, damper switching signal and the like. The computer 17 calculates and determines based on the input values and commands the results to a local control- supervision board 16. Thus, as a control of the number of FFUs to be driven and an air volume control are carried out individually, energy saving and equipment saving can be realized.
COPYRIGHT: (C)1992,JPO&Japio
JP21981890A 1990-08-21 1990-08-21 Clean room air flow control method Expired - Fee Related JP2673835B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21981890A JP2673835B2 (en) 1990-08-21 1990-08-21 Clean room air flow control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21981890A JP2673835B2 (en) 1990-08-21 1990-08-21 Clean room air flow control method

Publications (2)

Publication Number Publication Date
JPH04103937A true JPH04103937A (en) 1992-04-06
JP2673835B2 JP2673835B2 (en) 1997-11-05

Family

ID=16741521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21981890A Expired - Fee Related JP2673835B2 (en) 1990-08-21 1990-08-21 Clean room air flow control method

Country Status (1)

Country Link
JP (1) JP2673835B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0967445A2 (en) 1998-06-25 1999-12-29 Nec Corporation Air conditioning apparatus with reducing pressure loss in air circulation
US6093229A (en) * 1997-12-08 2000-07-25 Samsung Electronics Co., Ltd. Drive checking system for fan filter units in clean room
EP1064503A1 (en) * 1998-03-16 2001-01-03 Asyst Technologies, Inc. Intelligent minienvironment
US6607435B2 (en) 2001-08-24 2003-08-19 Hitachi, Ltd. Fan filter unit control system and clean room provided with same
US8694175B2 (en) 2003-03-20 2014-04-08 Huntair, Inc. Fan array fan section in air-handling systems
CN104196701A (en) * 2014-09-05 2014-12-10 杨永坚 Detection cover applied to housing

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010039691A2 (en) * 2008-09-30 2010-04-08 Carrier Corporation Control of a conditioned air supply system
EP2886966B1 (en) * 2013-12-20 2020-04-15 Schilling Engineering GmbH Clean room system and method of operating the same
CN111649435A (en) * 2020-06-01 2020-09-11 武汉世纪白马系统工程有限公司 Air conditioner fresh air and clean unit modularization temperature and humidity separate control device and system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6093229A (en) * 1997-12-08 2000-07-25 Samsung Electronics Co., Ltd. Drive checking system for fan filter units in clean room
EP1064503A1 (en) * 1998-03-16 2001-01-03 Asyst Technologies, Inc. Intelligent minienvironment
EP1064503A4 (en) * 1998-03-16 2002-06-19 Asyst Technologies Intelligent minienvironment
US6473668B2 (en) 1998-03-16 2002-10-29 Asyst Technologies, Inc. Intelligent minienvironment
EP0967445A2 (en) 1998-06-25 1999-12-29 Nec Corporation Air conditioning apparatus with reducing pressure loss in air circulation
US6151903A (en) * 1998-06-25 2000-11-28 Nec Corporation Air conditioning apparatus and air conditioning method for reducing electric power consumption by reducing pressure loss in circulation air
US6607435B2 (en) 2001-08-24 2003-08-19 Hitachi, Ltd. Fan filter unit control system and clean room provided with same
US8694175B2 (en) 2003-03-20 2014-04-08 Huntair, Inc. Fan array fan section in air-handling systems
CN104196701A (en) * 2014-09-05 2014-12-10 杨永坚 Detection cover applied to housing

Also Published As

Publication number Publication date
JP2673835B2 (en) 1997-11-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees