JPH0399439U - - Google Patents

Info

Publication number
JPH0399439U
JPH0399439U JP790890U JP790890U JPH0399439U JP H0399439 U JPH0399439 U JP H0399439U JP 790890 U JP790890 U JP 790890U JP 790890 U JP790890 U JP 790890U JP H0399439 U JPH0399439 U JP H0399439U
Authority
JP
Japan
Prior art keywords
wafer
handling arm
arm
contact surfaces
vacuum suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP790890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP790890U priority Critical patent/JPH0399439U/ja
Publication of JPH0399439U publication Critical patent/JPH0399439U/ja
Pending legal-status Critical Current

Links

JP790890U 1990-01-29 1990-01-29 Pending JPH0399439U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP790890U JPH0399439U (US20030204162A1-20031030-M00001.png) 1990-01-29 1990-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP790890U JPH0399439U (US20030204162A1-20031030-M00001.png) 1990-01-29 1990-01-29

Publications (1)

Publication Number Publication Date
JPH0399439U true JPH0399439U (US20030204162A1-20031030-M00001.png) 1991-10-17

Family

ID=31511557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP790890U Pending JPH0399439U (US20030204162A1-20031030-M00001.png) 1990-01-29 1990-01-29

Country Status (1)

Country Link
JP (1) JPH0399439U (US20030204162A1-20031030-M00001.png)

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