JPH0397138U - - Google Patents

Info

Publication number
JPH0397138U
JPH0397138U JP347890U JP347890U JPH0397138U JP H0397138 U JPH0397138 U JP H0397138U JP 347890 U JP347890 U JP 347890U JP 347890 U JP347890 U JP 347890U JP H0397138 U JPH0397138 U JP H0397138U
Authority
JP
Japan
Prior art keywords
clean room
flow path
air flow
path structure
floor surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP347890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2512775Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990003478U priority Critical patent/JP2512775Y2/ja
Publication of JPH0397138U publication Critical patent/JPH0397138U/ja
Application granted granted Critical
Publication of JP2512775Y2 publication Critical patent/JP2512775Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1990003478U 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造 Expired - Lifetime JP2512775Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990003478U JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990003478U JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Publications (2)

Publication Number Publication Date
JPH0397138U true JPH0397138U (US20080094685A1-20080424-C00004.png) 1991-10-04
JP2512775Y2 JP2512775Y2 (ja) 1996-10-02

Family

ID=31507296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990003478U Expired - Lifetime JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Country Status (1)

Country Link
JP (1) JP2512775Y2 (US20080094685A1-20080424-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217286U (US20080094685A1-20080424-C00004.png) * 1988-07-18 1990-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217286U (US20080094685A1-20080424-C00004.png) * 1988-07-18 1990-02-05

Also Published As

Publication number Publication date
JP2512775Y2 (ja) 1996-10-02

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