JPH0394915U - - Google Patents

Info

Publication number
JPH0394915U
JPH0394915U JP297190U JP297190U JPH0394915U JP H0394915 U JPH0394915 U JP H0394915U JP 297190 U JP297190 U JP 297190U JP 297190 U JP297190 U JP 297190U JP H0394915 U JPH0394915 U JP H0394915U
Authority
JP
Japan
Prior art keywords
clean room
filter
air supply
supply section
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP297190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP297190U priority Critical patent/JPH0394915U/ja
Publication of JPH0394915U publication Critical patent/JPH0394915U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
JP297190U 1990-01-17 1990-01-17 Pending JPH0394915U (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP297190U JPH0394915U (US06534493-20030318-C00166.png) 1990-01-17 1990-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP297190U JPH0394915U (US06534493-20030318-C00166.png) 1990-01-17 1990-01-17

Publications (1)

Publication Number Publication Date
JPH0394915U true JPH0394915U (US06534493-20030318-C00166.png) 1991-09-27

Family

ID=31506814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP297190U Pending JPH0394915U (US06534493-20030318-C00166.png) 1990-01-17 1990-01-17

Country Status (1)

Country Link
JP (1) JPH0394915U (US06534493-20030318-C00166.png)

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