JPH0391656U - - Google Patents

Info

Publication number
JPH0391656U
JPH0391656U JP15154489U JP15154489U JPH0391656U JP H0391656 U JPH0391656 U JP H0391656U JP 15154489 U JP15154489 U JP 15154489U JP 15154489 U JP15154489 U JP 15154489U JP H0391656 U JPH0391656 U JP H0391656U
Authority
JP
Japan
Prior art keywords
rotating body
wafer
rotation jig
mounting rotation
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15154489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15154489U priority Critical patent/JPH0391656U/ja
Publication of JPH0391656U publication Critical patent/JPH0391656U/ja
Pending legal-status Critical Current

Links

JP15154489U 1989-12-27 1989-12-27 Pending JPH0391656U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15154489U JPH0391656U (US07860544-20101228-C00003.png) 1989-12-27 1989-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15154489U JPH0391656U (US07860544-20101228-C00003.png) 1989-12-27 1989-12-27

Publications (1)

Publication Number Publication Date
JPH0391656U true JPH0391656U (US07860544-20101228-C00003.png) 1991-09-18

Family

ID=31697839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15154489U Pending JPH0391656U (US07860544-20101228-C00003.png) 1989-12-27 1989-12-27

Country Status (1)

Country Link
JP (1) JPH0391656U (US07860544-20101228-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028065A1 (ja) * 2007-08-30 2009-03-05 Fujitsu Microelectronics Limited イオン注入装置、基板クランプ機構、及びイオン注入方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028065A1 (ja) * 2007-08-30 2009-03-05 Fujitsu Microelectronics Limited イオン注入装置、基板クランプ機構、及びイオン注入方法
US8063388B2 (en) 2007-08-30 2011-11-22 Fujitsu Semiconductor Limited Ion implantation apparatus, substrate clamping mechanism, and ion implantation method

Similar Documents

Publication Publication Date Title
JPS62114779U (US07860544-20101228-C00003.png)
JPH0394080U (US07860544-20101228-C00003.png)
JPH0391656U (US07860544-20101228-C00003.png)
JPS6294635U (US07860544-20101228-C00003.png)
JPS62150751U (US07860544-20101228-C00003.png)
JPS61187612U (US07860544-20101228-C00003.png)
JPS6171329U (US07860544-20101228-C00003.png)
JPH02721U (US07860544-20101228-C00003.png)
JPH01138636U (US07860544-20101228-C00003.png)
JPS6245768U (US07860544-20101228-C00003.png)
JPS6311743U (US07860544-20101228-C00003.png)
JPH0347764U (US07860544-20101228-C00003.png)
JPS62202667U (US07860544-20101228-C00003.png)
JPH0338312U (US07860544-20101228-C00003.png)
JPS62158731U (US07860544-20101228-C00003.png)
JPS6242108U (US07860544-20101228-C00003.png)
JPS62110752U (US07860544-20101228-C00003.png)
JPS6452148U (US07860544-20101228-C00003.png)
JPH0375918U (US07860544-20101228-C00003.png)
JPS6214734U (US07860544-20101228-C00003.png)
JPS62186107U (US07860544-20101228-C00003.png)
JPS61162050U (US07860544-20101228-C00003.png)
JPS6379744U (US07860544-20101228-C00003.png)
JPS6389248U (US07860544-20101228-C00003.png)
JPS63184469U (US07860544-20101228-C00003.png)