JPH0389969U - - Google Patents

Info

Publication number

JPH0389969U

JPH0389969U JP15184389U JP15184389U JPH0389969U JP H0389969 U JPH0389969 U JP H0389969U JP 15184389 U JP15184389 U JP 15184389U JP 15184389 U JP15184389 U JP 15184389U JP H0389969 U JPH0389969 U JP H0389969U

Authority

JP

Japan

Prior art keywords

chamber

activated carbon

atmosphere

container

communicates

Prior art date

1989-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
• 238000010926 purge Methods 0.000 claims description 4
• 229910052799 carbon Inorganic materials 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims description 2
• 229920003002 synthetic resin Polymers 0.000 claims 1
• 239000000057 synthetic resin Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2