JPH0382156U - - Google Patents
Info
- Publication number
- JPH0382156U JPH0382156U JP14231589U JP14231589U JPH0382156U JP H0382156 U JPH0382156 U JP H0382156U JP 14231589 U JP14231589 U JP 14231589U JP 14231589 U JP14231589 U JP 14231589U JP H0382156 U JPH0382156 U JP H0382156U
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- silicon substrate
- fine diamond
- shaft
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 17
- 239000010432 diamond Substances 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 239000006061 abrasive grain Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231589U JPH0382156U (US06650917-20031118-M00005.png) | 1989-12-08 | 1989-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231589U JPH0382156U (US06650917-20031118-M00005.png) | 1989-12-08 | 1989-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0382156U true JPH0382156U (US06650917-20031118-M00005.png) | 1991-08-21 |
Family
ID=31689148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14231589U Pending JPH0382156U (US06650917-20031118-M00005.png) | 1989-12-08 | 1989-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0382156U (US06650917-20031118-M00005.png) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59166464A (ja) * | 1983-03-14 | 1984-09-19 | Hitachi Ltd | 研磨用定盤およびその製造方法 |
| JPS6227039A (ja) * | 1985-07-26 | 1987-02-05 | Ube Ind Ltd | 三塩化ホウ素吸着装置 |
| JPS6294263A (ja) * | 1985-10-17 | 1987-04-30 | Showa Denko Kk | カツタ−ブレ−ドおよびその製造方法 |
| JPS62218071A (ja) * | 1986-03-19 | 1987-09-25 | Showa Denko Kk | ダイヤモンド研摩シ−ト |
| JPH01177973A (ja) * | 1987-12-28 | 1989-07-14 | Idemitsu Petrochem Co Ltd | 研磨工具 |
| JPH01301071A (ja) * | 1988-05-28 | 1989-12-05 | Noritake Co Ltd | オンラインロール研削用短繊維強化砥石 |
-
1989
- 1989-12-08 JP JP14231589U patent/JPH0382156U/ja active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59166464A (ja) * | 1983-03-14 | 1984-09-19 | Hitachi Ltd | 研磨用定盤およびその製造方法 |
| JPS6227039A (ja) * | 1985-07-26 | 1987-02-05 | Ube Ind Ltd | 三塩化ホウ素吸着装置 |
| JPS6294263A (ja) * | 1985-10-17 | 1987-04-30 | Showa Denko Kk | カツタ−ブレ−ドおよびその製造方法 |
| JPS62218071A (ja) * | 1986-03-19 | 1987-09-25 | Showa Denko Kk | ダイヤモンド研摩シ−ト |
| JPH01177973A (ja) * | 1987-12-28 | 1989-07-14 | Idemitsu Petrochem Co Ltd | 研磨工具 |
| JPH01301071A (ja) * | 1988-05-28 | 1989-12-05 | Noritake Co Ltd | オンラインロール研削用短繊維強化砥石 |
