JPH0379875B2 - - Google Patents

Info

Publication number
JPH0379875B2
JPH0379875B2 JP61229533A JP22953386A JPH0379875B2 JP H0379875 B2 JPH0379875 B2 JP H0379875B2 JP 61229533 A JP61229533 A JP 61229533A JP 22953386 A JP22953386 A JP 22953386A JP H0379875 B2 JPH0379875 B2 JP H0379875B2
Authority
JP
Japan
Prior art keywords
layer
resistor
superconductor
wiring
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61229533A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6386487A (ja
Inventor
Shinichi Morohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61229533A priority Critical patent/JPS6386487A/ja
Publication of JPS6386487A publication Critical patent/JPS6386487A/ja
Publication of JPH0379875B2 publication Critical patent/JPH0379875B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61229533A 1986-09-30 1986-09-30 ジヨセフソン集積回路の抵抗体の製造方法 Granted JPS6386487A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61229533A JPS6386487A (ja) 1986-09-30 1986-09-30 ジヨセフソン集積回路の抵抗体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61229533A JPS6386487A (ja) 1986-09-30 1986-09-30 ジヨセフソン集積回路の抵抗体の製造方法

Publications (2)

Publication Number Publication Date
JPS6386487A JPS6386487A (ja) 1988-04-16
JPH0379875B2 true JPH0379875B2 (cs) 1991-12-20

Family

ID=16893658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61229533A Granted JPS6386487A (ja) 1986-09-30 1986-09-30 ジヨセフソン集積回路の抵抗体の製造方法

Country Status (1)

Country Link
JP (1) JPS6386487A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234533A (ja) * 1987-03-24 1988-09-29 Agency Of Ind Science & Technol ジヨセフソン接合素子の形成方法

Also Published As

Publication number Publication date
JPS6386487A (ja) 1988-04-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term