JPH0379839U - - Google Patents

Info

Publication number
JPH0379839U
JPH0379839U JP13880889U JP13880889U JPH0379839U JP H0379839 U JPH0379839 U JP H0379839U JP 13880889 U JP13880889 U JP 13880889U JP 13880889 U JP13880889 U JP 13880889U JP H0379839 U JPH0379839 U JP H0379839U
Authority
JP
Japan
Prior art keywords
main body
cleanliness
room
prober
floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13880889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735392Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13880889U priority Critical patent/JPH0735392Y2/ja
Publication of JPH0379839U publication Critical patent/JPH0379839U/ja
Application granted granted Critical
Publication of JPH0735392Y2 publication Critical patent/JPH0735392Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13880889U 1989-11-30 1989-11-30 半導体の製造設備 Expired - Fee Related JPH0735392Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13880889U JPH0735392Y2 (ja) 1989-11-30 1989-11-30 半導体の製造設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13880889U JPH0735392Y2 (ja) 1989-11-30 1989-11-30 半導体の製造設備

Publications (2)

Publication Number Publication Date
JPH0379839U true JPH0379839U (US07534539-20090519-C00280.png) 1991-08-15
JPH0735392Y2 JPH0735392Y2 (ja) 1995-08-09

Family

ID=31685886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13880889U Expired - Fee Related JPH0735392Y2 (ja) 1989-11-30 1989-11-30 半導体の製造設備

Country Status (1)

Country Link
JP (1) JPH0735392Y2 (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014001022A1 (de) * 2014-01-27 2015-07-30 Liebherr-Transportation Systems Gmbh & Co. Kg Fahrzeugkühlkreislauf

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014001022A1 (de) * 2014-01-27 2015-07-30 Liebherr-Transportation Systems Gmbh & Co. Kg Fahrzeugkühlkreislauf

Also Published As

Publication number Publication date
JPH0735392Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees