JPH0378982U - - Google Patents

Info

Publication number
JPH0378982U
JPH0378982U JP13976289U JP13976289U JPH0378982U JP H0378982 U JPH0378982 U JP H0378982U JP 13976289 U JP13976289 U JP 13976289U JP 13976289 U JP13976289 U JP 13976289U JP H0378982 U JPH0378982 U JP H0378982U
Authority
JP
Japan
Prior art keywords
roughing
vacuum
valve
chamber
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13976289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13976289U priority Critical patent/JPH0378982U/ja
Publication of JPH0378982U publication Critical patent/JPH0378982U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13976289U 1989-11-30 1989-11-30 Pending JPH0378982U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13976289U JPH0378982U (US20090163788A1-20090625-C00002.png) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13976289U JPH0378982U (US20090163788A1-20090625-C00002.png) 1989-11-30 1989-11-30

Publications (1)

Publication Number Publication Date
JPH0378982U true JPH0378982U (US20090163788A1-20090625-C00002.png) 1991-08-12

Family

ID=31686788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13976289U Pending JPH0378982U (US20090163788A1-20090625-C00002.png) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0378982U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001295761A (ja) * 2000-04-11 2001-10-26 Ebara Corp 真空排気システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001295761A (ja) * 2000-04-11 2001-10-26 Ebara Corp 真空排気システム

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