JPH0378072U - - Google Patents
Info
- Publication number
- JPH0378072U JPH0378072U JP13860389U JP13860389U JPH0378072U JP H0378072 U JPH0378072 U JP H0378072U JP 13860389 U JP13860389 U JP 13860389U JP 13860389 U JP13860389 U JP 13860389U JP H0378072 U JPH0378072 U JP H0378072U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- block
- supply pipe
- grains
- collision body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 3
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は第１図の−線に沿う断面図、第３図は
従来の供給装置を示す要部断面図である。 １……供給管、２……粒体、３……内壁、４…
…衝突体、５……流路。
２図は第１図の−線に沿う断面図、第３図は
従来の供給装置を示す要部断面図である。 １……供給管、２……粒体、３……内壁、４…
…衝突体、５……流路。
Claims (1)
- 粒体を落下させて供給する供給管内に、粒体の
流路の一部を遮るように衝突体を設け、この衝突
体から供給管の軸方向に対して離間した位置に、
前記衝突体により形成された粒体の流路を遮るよ
うに、他の衝突体を設けたことを特徴とする粒体
供給装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989138603U JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989138603U JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0378072U true JPH0378072U (ja) | 1991-08-07 |
| JPH069026Y2 JPH069026Y2 (ja) | 1994-03-09 |
Family
ID=31685692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989138603U Expired - Lifetime JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069026Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100490569B1 (ko) * | 1995-12-28 | 2005-09-16 | 미쓰비시 마테리알 가부시키가이샤 | 단결정인상장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6411594A (en) * | 1987-07-06 | 1989-01-17 | Sanyo Electric Co | Washing machine |
-
1989
- 1989-12-01 JP JP1989138603U patent/JPH069026Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6411594A (en) * | 1987-07-06 | 1989-01-17 | Sanyo Electric Co | Washing machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100490569B1 (ko) * | 1995-12-28 | 2005-09-16 | 미쓰비시 마테리알 가부시키가이샤 | 단결정인상장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069026Y2 (ja) | 1994-03-09 |