JPH0377438U - - Google Patents

Info

Publication number

JPH0377438U

JPH0377438U JP13747989U JP13747989U JPH0377438U JP H0377438 U JPH0377438 U JP H0377438U JP 13747989 U JP13747989 U JP 13747989U JP 13747989 U JP13747989 U JP 13747989U JP H0377438 U JPH0377438 U JP H0377438U

Authority

JP

Japan

Prior art keywords

pure water

tank

etching solution

etching

cleaning device

Prior art date

1989-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 6
• 238000005530 etching Methods 0.000 claims 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
• 239000004973 liquid crystal related substance Substances 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1