JPH0376833U - - Google Patents

Info

Publication number

JPH0376833U

JPH0376833U JP13789889U JP13789889U JPH0376833U JP H0376833 U JPH0376833 U JP H0376833U JP 13789889 U JP13789889 U JP 13789889U JP 13789889 U JP13789889 U JP 13789889U JP H0376833 U JPH0376833 U JP H0376833U

Authority

JP

Japan

Prior art keywords

plate materials

detection

suction

detection signals

vacuum

Prior art date

1989-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 6
• 239000000463 material Substances 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 2
• 239000012530 fluid Substances 0.000 description 1
• 239000013307 optical fiber Substances 0.000 description 1